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Design and simulations of a resonant accelerometer

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Abstract

A resonant accelerometer was designed and simulated in detail. The structure was composed of external frame and internal structure. The internal structure consists of a single proof mass, a pair of resonators and elastic beams. Structure design is implemented by taking advantage of the finite element analyses. From the simulation results we can see that the design of external frame, should ensure that the frame in line with the “beam” characteristics, and increase its stiffness under this condition. The design of internal structure, should ensure that the resonant beam stiffness, sensitivity, vertical vibration and range. Moreover, simulation results reveal the resonant accelerometer linearity is better under the condition of |F| < 5 N, the range is ±25 g and the sensitivity is 272.5 Hz/g. All these simulations above can verify the high performance accelerometer by simple and optimized structure design.

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Acknowledgements

This study is supported by the National Natural Science Foundation of China under Grant no. 61503018.

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Authors and Affiliations

  1. School of Mechanical Electronic and Information Engineering, China University of Mining and Technology, Beijing, 100083, China

    Yan Li, Yuanyuan Qu & Yunjiu Zhang

  2. School of Instrument Science and Opto-electronics Engineering, Beihang University, Beijing, 100191, China

    Guo Zhan-She

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  1. Yan Li
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  2. Guo Zhan-She
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  3. Yuanyuan Qu
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  4. Yunjiu Zhang
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Correspondence to Guo Zhan-She.

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Li, Y., Zhan-She, G., Qu, Y. et al. Design and simulations of a resonant accelerometer. Microsyst Technol 24, 1631–1641 (2018). https://doi.org/10.1007/s00542-017-3535-1

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