Skip to main content
SpringerLink
Log in

Theoretical and finite element analysis of dynamic deformation in resonating micromirrors

  • Technical Paper
  • Published:
Microsystem Technologies Aims and scope Submit manuscript

Abstract

Dynamic deformation is one of the limiting factors in the design of high frequency resonating microscanners that are intended for high definition raster scanning display applications. Out-of-plane deformation resulting from high acceleration loads causes beam divergence, which will in turn reduce the optical resolution. This paper presents a detailed analysis on the mechanical design aspects contributing to dynamic deformation such as the micromirror layout and the micromirror-spring linkage design. The applicability of one-dimensional plate bending theory in evaluating micromirror deformation due to inertial loads is investigated using finite element analysis. Improved analytical dynamic deformation predictions, which take into consideration the two-dimensional mirror plate twist, will also be presented. A comparison among a number of layout designs was carried out with the aim of increasing micromirror bending stiffness in a direction parallel to the axis of rotation. Moreover, spring-linkage effects were also addressed and a significant improvement in dynamic deformation was achieved with the inclusion of a gimbal structure between the micromirror and the torsion springs. A parametric analysis was also carried out in order to optimise the gimbal frame design in order to comply with the Rayleigh diffraction limit criterion.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11
Fig. 12

Similar content being viewed by others

References

  • Baran U, Brown D, Holmstrom S, Balma D (2012) Resonant PZT MEMS scanner for high-resolution displays. J Microelectromech Syst 21(6):1303–1310

    Article  Google Scholar 

  • Brosens P (1972) Dynamic mirror distortions in optical scanning. Appl Opt 11(12):2987–2990

    Article  Google Scholar 

  • Chen C-D, Wang Y-J, Chang P (2012) A novel two-axis MEMS scanning mirror with a PZT actuator for laser scanning projection. Opt Express 20(24):27003–27017

    Article  Google Scholar 

  • Cho AR, Han A, Ju S, Jeong H, Park J-H, Kim I, Bu J-U, Ji C-H (2015) Electromagnetic biaxial microscanner with mechanical amplification at resonance. Opt Express 23(13):16792–16802

    Article  Google Scholar 

  • Conant R (2003) Micromachined mirrors. Springer Science + Business Media, New York

    Book  Google Scholar 

  • Elhady AA, Sabry YM, Khalil D (2017) Optical characterization of high speed microscanners based on static slit profiling method. Opt Lasers Eng 88:129–168

    Article  Google Scholar 

  • Fan C, He S (2016) Micromirror based virtual image automotive head-up display. Microsyst Technol 22:1–6

    Article  Google Scholar 

  • Freeman M, Champion M, Madhavan S (2009) Scanned laser pico-projectors: seeing the big picture (with a small device). Optics and photonics news, pp 28–34, May 2009

  • Grahmann J, Wildenhain M, Grasshoff T, Gerwig C, Dallmann H-G, Wolter A, Schenk H (2012) Laser projector solution based on two 1D resonant scanning micro mirrors assembled in a low vertical distortion scan head. In: MOEMS and miniaturized systems XI, San Francisco, 2012

  • Hofmann U, Oldsen M, Quenzer H-J, Janes J, Heller M, Weiss M, Fakas G, Ratzmann L, Marchetti E, D’Ascoli F, Melani M, Bacciarelli L, Volpi E, Battini F, Mostardini L, Sechi F, De Marinis M, Wagner B (2008) Wafer-level vacuum packaged resonant micro-scanning mirrors for compact laser projection displays. In: MOEMS and miniaturized systems VII, San Jose, 2008

  • Holmstrom S, Baran U, Urey H (2014) MEMS laser scanners: a review. Microelectromech Syst 23(2):259–275

    Article  Google Scholar 

  • Hsu S, Klose T, Drabe C, Schenk H (2008) Fabrication and characterization of a dynamically flat high resolution micro-scanner. J Opt Pure Appl Opt 10(4):044005

    Article  Google Scholar 

  • Hung AC-L, Lai HY-H, Lin T-W, Fu S-G, Lu MS-C (2015) An electrostatically driven 2D micro-scanning mirror with capacitive sensing for projection display. Sens Actuators A 222:122–129

    Article  Google Scholar 

  • Ji C-H, Choi M, Kim S-C, Lee S-H, Kim S-H, Yee Y, Bu J-U (2006) An electrostatic scanning micromirror with diaphragm mirror plate and diamond-shaped reinforcement frame. J Micromech Microeng 16(5):1033–1039

    Article  Google Scholar 

  • Soemers H, Krastev K, van Lierop D (2008) Design of a high frequency MEMS scanning mirror. In: American society for precision engineering 23rd annual meeting, portland

  • Timoshenko S, Woinowsky-Kreiger S (1987) Theory of plates and shells. McGraw-Hill Book Company, pp 79–82

  • Urey H, Wine D, Osborn T (2000) Optical performance requirements for MEMS-scanner based microdisplays. In: MOEMS and miniaturized systems conference, Santa Clara, 2000

  • Urey H, DeWitt F, Luanava S (2002) Optical scanners for high resolution RSD systems. In: Helmet- and head-mounted displays VII, Orlando, 2002

  • Wolter A, Klose T, Hsu S-T, Schenk H, Lakner H (2006) Scanning 2D micromirror with enhanced flatness at high frequency. In: MOEMS display, imaging, and miniaturized microsystems IV, San Jose, 2006

  • Zappe H (2010) Fundamentals of micro-optics: technology, devices and applications. Cambridge University Press, Cambridge

    Book  Google Scholar 

  • Zhang S, Ataman C, Zappe H (2016) Compact architecture for high-frequency resonant microscanners with low dynamic deformation. In: International conference on optical MEMS and nanophotonics, Singapore, 2016

Download references

Acknowledgements

The work presented in this paper is part of the research undertaken by the authors in Lab4MEMSII, which is an ENIAC Joint Undertaking financed project.

Author information

Authors and Affiliations

  1. Department of Microelectronics and Nanoelectronics, Faculty of Information and Communication Technology, University of Malta, Msida, MSD 2080, Malta

    Russell Farrugia, Ivan Grech, Owen Casha, Edward Gatt & Joseph Micallef

  2. Department of Mechanical Engineering, Faculty of Engineering, University of Malta, Msida, MSD 2080, Malta

    Duncan Camilleri

Authors
  1. Russell Farrugia
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Ivan Grech
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Duncan Camilleri
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Owen Casha
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Edward Gatt
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Joseph Micallef
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Russell Farrugia.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Farrugia, R., Grech, I., Camilleri, D. et al. Theoretical and finite element analysis of dynamic deformation in resonating micromirrors. Microsyst Technol 24, 445–455 (2018). https://doi.org/10.1007/s00542-017-3335-7

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00542-017-3335-7

Search

Navigation