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Two-dimensional spin coating technology and the effect of artificial gravity on film’s air-bubbling

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Abstract

This article mathematically and experimentally investigates the effects of increased artificial gravity acceleration on a film’s air-bubbling defect. The controllable artificial gravity is generated using a two-dimensional (2D) spin coating method. In order to conduct these studies a 2D spin coater was designed and manufactured. The mathematics of particle motion in fluids (Stokes’ Law) is investigated in order to analyze the motion of air-bubbles along the thickness of the film. The mathematic of particle motion in fluids is simulated using MATLAB in a wide range of variation of related parameters. These simulations illustrate that increasing the artificial gravity acceleration increases the velocity of air-bubbles motion and decreases the decay time of the air-bubble release. Simulations also show that the fluid viscosity and size of air-bubbles are effective factors which can affect the decay time of air-bubble release and their velocity along the thickness of the film. To investigate the simulation results, a high viscous photoresist (SU8-3050) is used as the coating material. The mentioned photoresist is coated with the both conventional and 2D spin coating methods and their results are compared. The surface and cross section of coated substrates are imaged with an SEM device. The natural results of mathematic simulations are in agreement with our experimental comparisons.

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Authors and Affiliations

  1. Department of Mechanical and Electric Engineering, School of Aerospace Engineering, Xiamen University, Xiamen, Fujian, China

    Soroosh Mahmoodi, Hu Guoqing & Lingyun Wang

  2. Soroosh-Khorshide Iranian Co., Abyek Industrial Zone, Qazvin, Iran

    Soroosh Mahmoodi

  3. School of Mechanical and Automotive Engineering, South China University of Technology, Guangzhou, Guangdong, China

    Hu Guoqing

  4. Faculty of Mechanical Engineering, Shahid Rajaee Teacher Training University, Tehran, Iran

    Mehrdad Nourikhajavi

Authors
  1. Soroosh Mahmoodi
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  2. Hu Guoqing
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  3. Lingyun Wang
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  4. Mehrdad Nourikhajavi
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Correspondence to Soroosh Mahmoodi.

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Mahmoodi, S., Guoqing, H., Wang, L. et al. Two-dimensional spin coating technology and the effect of artificial gravity on film’s air-bubbling. Microsyst Technol 23, 1585–1594 (2017). https://doi.org/10.1007/s00542-017-3275-2

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  • DOI: https://doi.org/10.1007/s00542-017-3275-2

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