Abstract
This paper presents a new design of MEMS switch to achieve a six-bit small size and low loss DMTL phase shifter. In the proposed structure two electrodes are added to the universal MEMS capacitive switch. These additional electrodes are placed near the center line under the bridge. By using these electrodes it is possible to create two phase states in a unit cell. The structure is calculated and simulated at 30 GHz using MATLAB and HFSS softwares, respectively. According to calculation and simulation results for all phase states the return loss is better than −10 dB. Using this design the number of cells is decreased considerably. As a result the size and loss are decreased. The design can be easily scaled to other frequencies with more bits.
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Afrang, S., Samandari, K. & Rezazadeh, G. A small size Ka band six-bit DMTL phase shifter using new design of MEMS switch. Microsyst Technol 23, 1853–1866 (2017). https://doi.org/10.1007/s00542-016-2987-z
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DOI: https://doi.org/10.1007/s00542-016-2987-z