Abstract
In this paper, we present an electromagnetically actuated two-axis scanning micromirror with large aperture and tilting angle for laser pointing applications. The two-axis micromirror with the plate size of 3 mm in diameter was realized using gimbaled single crystal silicon with a single-turn electroplated copper coil, and it was assembled with permanent magnets forming radial magnetic field. The micromirror was fabricated on SiOG (Silicon on Glass) wafer using 4 photolithography masks. The permanent magnet assembly composed of a cylindrical and a ring-type magnet was designed to optimize the radial magnetic field, and thus maximize the torque on the coil. Three different magnet assemblies were applied to the fabricated micromirror in order to verify the design. Horizontal resonance frequency of the fabricated micromirror was measured 1.421 kHz and vertical resonant frequency was 396 Hz. The vertical scan angle was 16.87°, 26.32° and 22.61° with the cylindrical magnet diameter of 2.6, 4.0 and 4.8 mm, respectively, at 60 Hz sinusoidal input of 640 mApp. For horizontal scan, maximum scan angle of 24.45° was obtained at 48 mApp input signal in resonance mode. In addition, the temperature distribution on the micromirror surface was measured with the applied current to the coil.
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References
Aoyagi I, Shimaoka K, Kato S, Makishi W, Kawai Y, Tanaka S, Ono T, Esashi M, Hane K (2011) 2-axis MEMS scanner for a laser range finder. In: Proceedings of IEEE International Conference on Optical MEMS and Nanophotonics, pp 39–40
Ataman C, Lani S, Noell W, de Rooij N (2013) A dual-axis pointing mirror with moving-magnet actuation. J Micromech Microeng 23:025002
Bogatscher S, Streck A, Heussner N, Fox M, Meinzer S, Stork W (2014) Large aperture at low cost three-dimensional time-of-flight range sensor using scanning micromirrors and synchronous detector switching. Appl Optics 53:1570–1582
Ehlert D, Adamek R, Horn HJ (2009) Laser rangefinder-based measuring of crop biomass under field conditions Precis. Agric 10:395–408
Glennie CL, Carter WE, Shrestha RL, Dietrich WE (2013) Geodetic imaging with airborne LiDAR: the Earth’s surface revealed. Rep Prog Phys 76:086801
Hah D, Patterson PR, Nguyen HD, Toshiyoshi H, Wu MC (2004) Theory and experiments of angular vertical comb-drive actuators for scanning micromirrors. IEEE J Sel Top Quantum Electron 10:505–513
Ji CH, Choi M, Kim SC, Song KC, Bu JU, Nam HJ (2007) Electromagnetic two-dimensional scanner using radial magnetic field. J Microelectromech Syst 16:989–996
Jin JY, Yoo S, Bae JS, Kim YK (2014) Deep wet etching of borosilicate glass and fused silica with dehydrated AZ4330 and a Cr/Au mask. J Micromech Microeng 24:015003
Kim M, Park JH, Jeon JA, Yoo BW, Park I, Kim YK (2009) High fill-factor micromirror array using a self-aligned vertical comb drive actuator with two rotational axes. J Micromech Microeng 19:035014
Kim JH, Lee SW, Jeoung HS, Lee SK, Ji CH, Park JH (2015) Electromagnetically actuated 2-axis scanning micromirror with large aperture and tilting angle for LIDAR applications. The 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’ 2015), pp 839–42
Krishnamoorthy U, Lee D, Solgaard O (2003) Self-aligned vertical electrostatic combdrives for micromirror actuation. J Microelectromech Syst 12:458–464
Mei L, Zhao G, Svanberg S (2015) Differential absorption lidar system employed for background atomic mercury vertical profiling in South China. Opt Lasers Eng 55:128–135
Milanović V (2004) Multilevel beam SOI-MEMS fabrication and applications. J Microelectromech Syst 13:19–30
Moss R, Yuan P, Bai X, Quesada E, Sudharsanan R, Stann BL, Dammann JF, Giza MM, Lawler WB (2012) Low-cost compact MEMS scanning LADAR system for robotic applications Proc SPIE 8379 837903
Niclass C, Ito K, Soga M, Matsubara H, Aoyagi I, Kato S, Kagami M (2012) Design and characterization of a 256x64-pixel single-photon imager in CMOS for a MEMSbased laser scanning time-of-flight sensor. Opt Expr 20:11863–11881
Sandner T, Grasshoff T, Wildenhain M, Schenk H (2010) Synchronized micro scanner array for large aperture receiver optics of LIDAR systems. Proc SPIE 7594 75940C
Sandner T, Grasshoffa T, Schwarzenberga M, Schroedtera R, Schenk H (2014) Quasi-static Microscanner with Linearized Scanning for an adaptive 3D-Lasercamera. Proc SPIE 8977 897717
Sinclair M 2002 A high frequency resonant scanner using thermal actuation. In: Tech. Dig. IEEE Int. Conf. MEMS pp 698–701
Stann BL, Dammann JF, Giorno MD, DiBerardino C, Giza MM, Powers MA, Uzunovic N (2014) Integration and demonstration of MEMS-scanned LADAR for robotic navigation. Proc SPIE 9084 90840 J
Tani M, Akamatsu M, Yasuda Y, Fujita H, Toshiyoshi H (2004) A 2D-optical scanner actuated by PZT film deposited by arc discharged reactive ion-plating (ADRIP) method. In: Proceedings of IEEE/LEOS International Conference on Optical MEMS (IEEE/LEOS, 2004) pp 188–9
Yalcinkaya AD, Urey H, Brown D, Montague T, Sprague R (2006) Two-axis electromagnetic microscanner for high resolution displays. J Microelectromech Syst 15:786–794
Yasuda Y, Akamatsu M, Tani M, Iijima T, Toshiyoshi H (2006) Piezoelectric 2D-optical micro scanners with PZT thick films. Integr Ferroelectr 80:341–353
Acknowledgments
This research was supported by the Space Core Technology Development Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Science, ICT and Future Planning (MSIP) (NRF-2013M1A3A3A02042410).
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Kim, JH., Jeong, H., Lee, SK. et al. Electromagnetically actuated biaxial scanning micromirror fabricated with silicon on glass wafer. Microsyst Technol 23, 2075–2085 (2017). https://doi.org/10.1007/s00542-016-2949-5
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DOI: https://doi.org/10.1007/s00542-016-2949-5