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A novel piezo-driven microgripper with a large jaw displacement

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Abstract

This paper presents a novel piezo-driven microgripper for micromanipulation. A two-grade amplification mechanism is introduced to enlarge the jaw displacement of the microgripper driven by a piezoelectric actuator (PEA). The design adopts a hybrid flexure structure that integrates flexure hinge and flexure beam to combine their advantages to further improve the microgripper performance. The mechanical designs of two microgrippers with different output manners are first described, one of which is selected to conduct the detailed modeling and analysis. Subsequently, the finite element analysis (FEA) is performed to verify the microgripper performance and the effectiveness of the established models for the investigation of optimum structure parameters. Finally, after the prototype is fabricated, the experimental results show that the developed microgripper possesses the high-precision grasping capacity for different shaped and sized microobjects. Moreover, a large jaw displacement of 150.8 μm corresponding to the 100 V drive voltage and a high amplification ratio of 16.4 can be obtained.

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Acknowledgments

This research is supported by National Natural Science Foundation of China under Grant No. 51275018, Research Fund for the Doctoral Program of Higher Education of China under Grant No. 20131102110010 and Innovation Foundation of BUAA for PhD Graduates.

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Authors and Affiliations

  1. School of Automation Science and Electrical Engineering, Beihang University, Beijing, 100191, China

    Xiantao Sun, Weihai Chen & Rui Zhou

  2. Division of Microrobotics and Control Engineering, University of Oldenburg, 26111, Oldenburg, Germany

    Sergej Fatikow & Manuel Mikczinski

  3. School of Mechanical Engineering, Tianjin University, Tianjin, 300072, China

    Yanling Tian

  4. School of Mechanical Engineering and Automation, Beihang University, Beijing, 100191, China

    Jianbin Zhang

Authors
  1. Xiantao Sun
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  2. Weihai Chen
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  3. Sergej Fatikow
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  4. Yanling Tian
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  5. Rui Zhou
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  6. Jianbin Zhang
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  7. Manuel Mikczinski
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Correspondence to Weihai Chen.

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Sun, X., Chen, W., Fatikow, S. et al. A novel piezo-driven microgripper with a large jaw displacement. Microsyst Technol 21, 931–942 (2015). https://doi.org/10.1007/s00542-014-2199-3

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  • DOI: https://doi.org/10.1007/s00542-014-2199-3

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