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Radiation of a plasma generated by laser pulse on CO2, CHF3, and CF4 gas-jet targets in the “water transparency window” 2.3–4.4 nm

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Abstract

The paper considers the emission spectra and dependences of the emission intensity of a number of carbon lines in absolute units for laser plasma generated by laser pulse on CO2, CHF3, and CF4 gas jets on the gas pressure at the nozzle inlet. A pulsed Nd:YAG laser, λ = 1064 nm, τ = 5.2 ns, Eimp = 0.8 J was used. Gas-jet targets were formed by a supersonic conical nozzle, the pressure at the nozzle inlet varied in the range of 5–25 bar. The emission spectra of the investigated gases were compared and the reasons for the different dependences of the radiation intensity on the gas pressure at the nozzle inlet were analyzed.

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Data availability

The datasets generated and analyzed during the current study are available from the corresponding author on reasonable request.

References

  1. H. Legall, G. Blobel, H. Stiel, W. Sandner, C. Seim, P. Takman, W. Diete, Compact X-ray microscope for the water window based on a high brightness laser plasma source. Opt. Exp. 20(16), 18362–18369 (2012)

    Article  Google Scholar 

  2. M. Berglund, L. Rymell, M. Peuker, T. Wilhein, H.M. Hertz, Compact water-window transmission X-ray microscopy. J. Microsc. 197(3), 268–273 (2000)

    Article  Google Scholar 

  3. I.V. Malyshev, A.E. Pestov, V.N. Polkovnikov, N.N. Salashchenko, M.N. Toropov, N.I. Chkhalo, Current state of development of a microscope operating at a wavelength of 3.37 nm at the institute of physics of microstructures of the Russian academy of sciences. J. Surf. Invest. X-ray Synchrotron Neutron Tech. 12(6), 1253 (2018)

    Article  Google Scholar 

  4. D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov, A.Y. Vinokhodov, I.Y. Vichev, R.R. Gayazov, A.A. Yakushkin, Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection (50th anniversary of the Institute of Spectroscopy, Russian Academy of Sciences). Phys. Usp. 62(3), 304 (2019)

    Article  ADS  Google Scholar 

  5. M. Suzuki, H. Daido, I.W. Choi, W. Yu, K. Nagai, T. Norimatsu, H. Fiedorowicz, Time and space-resolved measurement of a gas-puff laser-plasma X-ray source. Phys. Plasm. 10(1), 227–233 (2003)

    Article  ADS  Google Scholar 

  6. M.B. Smirnov, W. Becker, X-ray generation in laser-heated cluster beams. Phys. Rev. A 74(1), 013201 (2006)

    Article  ADS  Google Scholar 

  7. N.I. Chkhalo, S.A. Garakhin, S.V. Golubev, A.Y. Lopatin, A.N. Nechay, A.E. Pestov, S. Yulin, A double-stream Xe: He jet plasma emission in the vicinity of 6.7 nm. Appl. Phys. Lett. 112(22), 221101 (2018)

    Article  ADS  Google Scholar 

  8. H. Fiedorowicz, A. Bartnik, M. Szczurek, H. Daido, N. Sakaya, V. Kmetik, T. Wilhein, Investigation of soft X-ray emission from a gas puff target irradiated with a Nd: YAG laser. Opt. Commun. 163(1–3), 103 (1999)

    Article  ADS  Google Scholar 

  9. Y. Tao, M.S. Tillack, K.L. Sequoia, R.A. Burdt, S. Yuspeh, F. Najmabadi, Efficient 13.5 nm extreme ultraviolet emission from Sn plasma irradiated by a long CO2 laser pulse. Appl. Phys. Lett. 92(25), 251501 (2008)

    Article  ADS  Google Scholar 

  10. T. Higashiguchi, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, D. Kilbane, P. Dunne, G. O’Sullivan, Extreme ultraviolet source at 6.7 nm based on a low-density plasma. Appl. Phys. Lett. 99(19), 191502 (2011)

    Article  ADS  Google Scholar 

  11. K. Fukugaki, S. Amano, A. Shimoura, T. Inoue, S. Miyamoto, T. Mochizuki, Rotating cryogenic drum supplying solid Xe target to generate extreme ultraviolet radiation. Rev. Sci. Instr. 77(6), 063114 (2006)

    Article  ADS  Google Scholar 

  12. B.A.M. Hansson, O. Hemberg, H.M. Hertz, M. Berglund, H.J. Choi, B. Jacobsson, M. Wilner, Characterization of a liquid-xenon-jet laser-plasma extreme-ultraviolet source. Rev. Sci. Instr. 75(6), 2122–2129 (2004)

    Article  ADS  Google Scholar 

  13. Y.B. Zel’Dovich, Y.P. Raizer, Physics of Shock Waves and High-Temperature Hydrodynamic Phenomena (Courier Corporation, New York, 2002)

    Google Scholar 

  14. Yu.P. Raizer, Laser Spark and Discharge Propagation (Nauka, Moscow, 1974)

    Google Scholar 

  15. J. Holburg, M. Müller, K. Mann, S. Wieneke, Brilliance improvement of laser-produced extreme ultraviolet and soft X-ray plasmas based on pulsed gas jets. J. Vac. Sci. Technol. A: Vac. Surf. Films 37(3), 031303 (2019)

    Article  ADS  Google Scholar 

  16. M. Wieland, T. Wilhein, M. Faubel, C. Ellert, M. Schmidt, O. Sublemontier, EUV and fast ion emission from cryogenic liquid jet target laser-generated plasma. Appl. Phys. B 72(5), 591–597 (2001)

    Article  ADS  Google Scholar 

  17. P.W. Wachulak, A. Bartnik, H. Fiedorowicz, P. Rudawski, R. Jarocki, J. Kostecki, M. Szczurek, “Water window” compact, table-top laser plasma soft X-ray sources based on a gas puff target. Nucl. Instrum. Methods Phys. Res. Sect. B 268(10), 1692–1700 (2010)

    Article  ADS  Google Scholar 

  18. L. Malmqvist, L. Rymell, M. Berglund, H.M. Hertz, Liquid-jet target for laser-plasma soft X-ray generation. Rev. Sci. Instr. 67(12), 4150–4153 (1996)

    Article  ADS  Google Scholar 

  19. A.N. Nechay, A.A. Perekalov, N.I. Chkhalo, N.N. Salashchenko, I.G. Zabrodin, I.A. Kaskov, A. Ye, Pestov, modular device for the formation and study of cluster beams of inert and molecular gases. J. Surf. Invest. X-ray Synchrotron Neutron Tech. 13, 862–869 (2019)

    Article  Google Scholar 

  20. S.G. Kalmykov, P.S. Butorin, M.E. Sasin, Xe laser-plasma EUV radiation source with a wavelength near 11 nm—optimization and conversion efficiency. J. Appl. Phys. 126(10), 10301 (2019)

    Article  Google Scholar 

  21. P.S. Butorin, Yu.M. Zadiranov, SYu. Zuev, S.G. Kalmykov, V.N. Polkovnikov, M.E. Sasin, N.I. Chkhalo, Absolutely calibrated spectrally resolved measurements of Xe laser plasma radiation intensity in the EUV range. Tech. Phys. 63(10), 1507–1501 (2018)

    Article  Google Scholar 

  22. A.V. Vodop’yanov, S.A. Garakhin, I.G. Zabrodin, SYu. Zuev, A.Y. Lopatin, A.N. Nechay, A.E. Pestov, A.A. Perekalov, R.S. Pleshkov, V.N. Polkovnikov et al., Measurements of the absolute intensities of spectral lines of Kr, Ar, and O ions in the wavelength range of 10–18 nm under pulsed laser excitation. Quantum Electron 51(8), 700–707 (2021)

    Article  ADS  Google Scholar 

  23. R.L. Kelly, L.J. Palumbo, Atomic and Ionic Emission Lines Below Angstroms-Hydrogen Through Krypton (Naval Research Lab, Washington, DC, 1973), p.7599

    Book  Google Scholar 

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Funding

We are grateful the support by Center of Excellence «Center of Photonics» funded by The Ministry of Science and Higher Education of the Russian Federation, contract № 075-15-2022-316.

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Authors and Affiliations

  1. Institute for Physics of Microstructures RAS, Nizhny Novgorod, Russia, 603087

    A. N. Nechay, A. A. Perekalov, N. N. Salashchenko & N. I. Chkhalo

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  1. A. N. Nechay
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  2. A. A. Perekalov
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  3. N. N. Salashchenko
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  4. N. I. Chkhalo
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AN and AP conducted experimental studies and wrote the main text of the work. NS and NC critically examined/monitored each step of the work and further reviewed the manuscript.

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Correspondence to A. N. Nechay.

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Nechay, A.N., Perekalov, A.A., Salashchenko, N.N. et al. Radiation of a plasma generated by laser pulse on CO2, CHF3, and CF4 gas-jet targets in the “water transparency window” 2.3–4.4 nm. Appl. Phys. B 129, 49 (2023). https://doi.org/10.1007/s00340-023-07974-4

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