Skip to main content
SpringerLink
Log in

Broadband and wide-angle antireflective characteristics of nanoporous anodic alumina films for silicon-based optoelectronic applications

  • Published:
Applied Physics B Aims and scope Submit manuscript

Abstract

Nanoporous anodic alumina (NPAA) films are fabricated on silicon (Si) surfaces by the anodization of aluminum (Al). Effect of the thickness of initial Al films on the antireflective characteristics of NPAA films consisting of random pore structures is investigated in the wavelength range of 300–1,100 nm at incident light angles (θ inc) of 3°–70°, together with theoretical analysis using a rigorous coupled-wave analysis method. The reflectance strongly depends on the thickness and porosity of NPAA films, resulting from anodization parameters such as applied voltage, anodization time, and pore widening time. For the obtained NPAA film at the initial Al thickness of 100 nm and the applied voltage of 30 V, the surface reflectance is reduced over a wide wavelength region of 300–1,100 nm at normal incidence of ~3°, exhibiting the relatively lower average reflectance (R avg) of ~19 % (i.e., R avg ~ 39 % for the bare Si substrate). The lower angle-dependent reflective properties are observed compared to the bare Si substrate at θ inc = 20°–70° for unpolarized light. The calculated reflectance results of NPAA films show similar trends to the measured data.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7

Similar content being viewed by others

References

  1. D.E. Carlson, C.R. Wronski, Appl. Phys. Lett. 28, 671 (1976)

    Article  ADS  Google Scholar 

  2. B. Yan, G. Yue, L. Sivec, J. Yang, S. Guha, C.S. Jiang, Appl. Phys. Lett. 99, 113512 (2011)

    Article  ADS  Google Scholar 

  3. W.S. Wong, S. Raychaudhuri, R. Lujan, S. Sambandan, R.A. Street, Nano Lett. 11, 2214 (2011)

    Article  ADS  Google Scholar 

  4. K. Seo, M. Wober, P. Steinvurzel, E. Schonbrun, Y. Dan, T. Ellenbogen, K.B. Crozier, Nano Lett. 11, 1851 (2011)

    Article  ADS  Google Scholar 

  5. I. Goykhman, B. Desiatov, J. Khurgin, J. Shappir, U. Levy, Opt. Express 20, 28594 (2012)

    Article  ADS  Google Scholar 

  6. J. Konle, H. Presting, H. Kibbel, K. Thonke, R. Sauer, Solid State Electron. 45, 1921 (2001)

    Article  ADS  Google Scholar 

  7. J.-Q. Xi, M.F. Schubert, J.K. Kim, E.F. Schubert, M. Chen, S.-Y. Lin, W. Liu, J.A. Smart, Nat. Photon. 1, 176 (2007)

    ADS  Google Scholar 

  8. J.W. Leem, J.S. Yu, Opt. Express 19, A258 (2011)

    Article  Google Scholar 

  9. S. Sarkar, S.K. Pradhan, Appl. Surf. Sci. 290, 509 (2014)

    Article  ADS  Google Scholar 

  10. J.W. Leem, J.S. Yu, Thin Solid Films 518, 6285 (2010)

    Article  ADS  Google Scholar 

  11. J.W. Leem, J.S. Yu, Nanoscale 5, 2520 (2013)

    Article  ADS  Google Scholar 

  12. T. Yang, X. Wang, W. Liu, Y. Shi, F. Yang, Opt. Express 21, 18207 (2013)

    Article  ADS  Google Scholar 

  13. J.D. Berrigan, T. McLachlan, J.R. Deneault, Y. Cai, T.-S. Kang, M.F. Durstock, K.H. Sandhage, J. Mater. Chem. A 1, 128 (2013)

    Article  Google Scholar 

  14. M. Aramesh, K. Fox, D.W.M. Lau, J. Fang, K. Ostrikov, S. Prawer, J. Cervenka, Carbon 75, 452 (2014)

    Article  Google Scholar 

  15. J. Zuidema, X. Ruan, T.S. Fisher, Opt. Express 21, 22053 (2013)

    Article  ADS  Google Scholar 

  16. S. Miyajima, J. Irikawa, A. Yamada, M. Konagai, Appl. Phys. Express 3, 012301 (2010)

    Article  ADS  Google Scholar 

  17. R. Hezel, K. Jaeger, J. Electrochem. Soc. 136, 518 (1989)

    Article  Google Scholar 

  18. T. Kumeria, A. Santos, D. Losic, Sensors 14, 11878 (2014)

    Article  Google Scholar 

  19. J.W. Leem, J.S. Yu, J. Heo, W.K. Park, J.H. Park, W.J. Cho, D.E. Kim, Sol. Energy Mater. Sol. Cells 120, 555 (2014)

    Article  Google Scholar 

  20. K. Guan, Surf. Coat. Technol. 191, 155 (2005)

    Article  Google Scholar 

  21. R. Nayak, D.R. Knapp, Anal. Chem. 79, 4950 (2007)

    Article  Google Scholar 

  22. J.W. Leem, Y.P. Kim, J.S. Yu, J. Opt. Soc. Am. B 29, 357 (2012)

    Article  ADS  Google Scholar 

  23. J.W. Leem, K.S. Chung, J.S. Yu, Curr. Appl. Phys. 12, 291 (2012)

    Article  ADS  Google Scholar 

  24. SOPRA, N&K Database (2014). http://refractiveindex.info. Accessed 1 May 2014

  25. G.E. Thompson, R.C. Furneaux, G.C. Wood, J.A. Richardson, J.S. Goode, Nature 272, 433 (1978)

    Article  ADS  Google Scholar 

  26. F. Zhou, A.K.M. Al-Zenati, A. Baron-Wiecheć, M. Curioni, S.J. Garcia-Vergara, H. Habazaki, P. Skeldon, G.E. Thompson, J. Electrochem. Soc. 158, C202 (2011)

    Article  Google Scholar 

  27. I. Vrublevsky, V. Parkoun, J. Schreckenbach, G. Marx, Appl. Surf. Sci. 220, 51 (2003)

    Article  ADS  Google Scholar 

  28. I. Vrublevsky, V. Parkoun, V. Sokol, J. Schreckenbach, G. Marx, Appl. Surf. Sci. 222, 215 (2004)

    Article  ADS  Google Scholar 

  29. J.P. O’Sullivan, G.C. Wood, Proc. R. Soc. Lond. Ser. A 317, 511 (1970)

    Article  ADS  Google Scholar 

  30. G. Paolini, M. Masoero, F. Sacchi, M. Paganelli, J. Electrochem. Soc. 112, 32 (1965)

    Article  Google Scholar 

  31. J.W. Leem, Y.M. Song, J.S. Yu, Nanoscale 5, 10455 (2013)

    Article  ADS  Google Scholar 

  32. H.V. Han, C.C. Lin, Y.L. Tsai, H.C. Chen, K.J. Chen, Y.L. Yeh, W.Y. Lin, H.C. Kuo, P. Yu, Sci. Rep. 4, 5734 (2014)

    ADS  Google Scholar 

  33. Z. Li, J. Wang, Y. Zhang, J. Wang, L. Jiang, Y. Song, Appl. Phys. Lett. 97, 233107 (2010)

    Article  ADS  Google Scholar 

Download references

Acknowledgments

This work was supported by the National Research Foundation of Korea (NRF) Grant funded by the Korea government (MSIP) (No. 2013-068407).

Author information

Authors and Affiliations

  1. Department of Electronics and Radio Engineering, Kyung Hee University, 1732 Deogyeong-daero, Giheung-gu, Yongin-si, Gyeonggi-do, 446-701, Republic of Korea

    Bhaskar Dudem, Jung Woo Leem, Minkyu Choi & Jae Su Yu

Authors
  1. Bhaskar Dudem
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Jung Woo Leem
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Minkyu Choi
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Jae Su Yu
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Jae Su Yu.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Dudem, B., Leem, J.W., Choi, M. et al. Broadband and wide-angle antireflective characteristics of nanoporous anodic alumina films for silicon-based optoelectronic applications. Appl. Phys. B 118, 439–447 (2015). https://doi.org/10.1007/s00340-015-6007-2

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00340-015-6007-2

Keywords

Search

Navigation