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Development of new co-planar platform configuration of MOX gas sensor

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Abstract

In this article, a new configuration of MOX gas sensor was designed, fabricated, and characterized, with a particular design including a micro-heater and a sensing electrode on the same plane using uncomplicated and low-cost steps. A spiral form of the micro-heater and sensing electrode were fabricated in 5 mm × 5 mm surface on a Si/SiO2/Al-0.5Cu. Owing to its high sensitivity in gas sensing, the SnO2 layer was deposited on the top of the sensor. The performances of the fabricated sensor were performed by electrical characterization and sensing behavior under ethanol, LPG, and natural gas. The thermal characterization gave a TCR of 3.2 × 10−3 °C−1 for SnO2/Al-0.5Cu micro-heater. The evolution under gases of the typical device at different temperatures ranging from 218 to 280 °C and relative humidity from 40% to more than 80% showed high response, stability, and reproducibility. The selectivity of the fabricated sensor towards ethanol makes it a perfect candidate for ethanol sensing.

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Data availability

The datasets generated during and/or analyzed during the current study are available from the corresponding author on reasonable request.

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Acknowledgements

This work was supported by the General Directorate for Scientific Research and Technological Development (Algerian Ministry of Higher Education).

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Authors and Affiliations

  1. DMN, P-MEMS, Centre de Développement des Technologies Avancées, Cité du 20 Août 1956 Baba Hassen, BP 16081, Alger, Algeria

    Yamna Bakha, Sidi Mohammed Merah & Hammouche Khales

  2. Département de Physique, USTO-MB, Université des Sciences et Techniques d’Oran, M ’Nouar BP 1505, Oran, Algeria

    Mostefa Kameche

  3. Centre de Recherche en Technologie des Semi-Conducteur pour l’Energétique (CRTSE), 02 Bd Frantz Fanon, Bp 140. 7 Merveilles, Alger, Algeria

    Abdelkader Djelloul

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  1. Yamna Bakha
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  2. Sidi Mohammed Merah
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  4. Mostefa Kameche
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  5. Abdelkader Djelloul
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Contributions

All authors contributed to the study conception and design. Materials preparation, data collection, and analysis were performed by YB, SMM, HK, MK, and AD. The first draft of the manuscript was written by YB and all authors commented on previous versions of the manuscript. All authors read and approved the final manuscript.

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Correspondence to Abdelkader Djelloul.

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Bakha, Y., Merah, S.M., Khales, H. et al. Development of new co-planar platform configuration of MOX gas sensor. Appl. Phys. A 129, 363 (2023). https://doi.org/10.1007/s00339-023-06647-5

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