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A capacitive sensor with high measurement accuracy and low electrical energy consumption

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Abstract

An accelerometer is a transducer that, on its own or in conjunction with electronics, instantly transmits an electrical signal corresponding to the force applied to its base. To measure vibrations with a capacitive accelerometer, it is important to know its accuracy, exact sensitivity, and reliability but sometimes the phase of the signal or the frequencies of interest. This paper chooses the capacitive accelerometer through its advantages over other types. The modeling of this type of accelerometer has been the subject of extracting from new formulas linked to the characteristics of the capacitive sensor and the simulation of the developed models makes it possible to minimize the measurement error, maximize the measurement accuracy, and reduce the electrical energy consumption by the appropriate choice of the damping rate and the frequency margin. A new equation for damping rate according to error is extracted by using the developed model. This equation makes easier the choice of damping rate that will minimize error to a very low value and maximize accuracy. This developed model is confirmed by experimental tests and finally, a new design of the capacitive accelerometer is proposed.

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References

  1. BENMESSAOUD Mourad, Conception et Modélisation des MEMS: application aux Accéléromètres. Thèse de doctorat, Université des Sciences et de la Technologie d'Oran Mohamed Boudiaf, Algérie ; Décembre (2014)

  2. Aboubacar Chaehoi, Conception et Modélisation de MEMS monolithique CMOS en technologie FSBM: application aux accéléromètres. Micro et nanotechnologies/Microélectronique. Université Montpellier II - Sciences et Techniques du Languedoc, 2005. Français. ‌tel-00277563

  3. T. Kose et al., A single-mass self-resonating closed-loop capacitive MEMS accelerometer. In 2016 IEEE SENSORS, 30 Oct.-3 Nov. 2016, Orlando, FL, USA

  4. Ye Ko Ko Aung et All “Study of Parameters and Characteristics of MEMS Capacitive Accelerometer with Vertical Overlap Comb Drive Construction” 2019 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus), 28–31 Jan. 2019, Saint Petersburg and Moscow, Russia, Russia.

  5. G. Royo et al., Transimpedance amplifier with programmable gain and bandwidth for capacitive MEMS accelerometers. In 2017 IEEE International Instrumentation and Measurement Technology Conference (I2MTC), 22–25 May 2017, Turin, Italy.

  6. T. Tsuchiya et al., Thermomechanical noise of arrayed capacitive accelerometers with 300-NM-gap sensing electrodes. In 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 18–22 June 2017, Kaohsiung, Taiwan

  7. Z. Andrabi and K-A Gupta. Study and analysis of materials for design of MEMS capacitive accelerometer. In 2018 3rd IEEE International Conference on Recent Trends in Electronics, Information & Communication Technology (RTEICT), 18–19 May 2018, Bangalore, India

  8. A. Utz et al., A high precision MEMS based capacitive accelerometer for seismic measurements. In 2017 IEEE SENSORS, 29 Oct.-1 Nov. 2017, Glasgow, UK

  9. S. Yan, H. Liu, Q. Xu, D. Liu, M. Zhang, W. Wu, L. Tu, A method for improving out-of-plane robustness of an area changed capacitive displacement transducer used in a micro-accelerometer. Sens. Actuators A (2020). https://doi.org/10.1016/j.sna.2020.112156

    Article  Google Scholar 

  10. W. Zhou, J. He, H. Yu, X. He, P. Penga, Analytical study of temperature coefficients of bulk MEMS capacitive accelerometers operating in closed-loop mode. Sens. Actuators A 290(1), 239–247 (2019)

    Article  Google Scholar 

  11. H. Zhang, X. Wei, Y. Ding, Z. Jiang, J. Ren, A low noise capacitive MEMS accelerometer with anti-spring structure. Sens. Actuators A 296(1), 79–86 (2019)

    Article  Google Scholar 

  12. H.-J. Ahn, S. Jeon, Error analysis of a new cylindrical capacitive sensor (CCS) for measuring five-dimensional motions of a rotor. Mech. Syst. Signal Process. 29, 148–163 (2012)

    Article  ADS  Google Scholar 

  13. Z. Czaja, A measurement method for capacitive sensors based on a versatile direct sensor-to-microcontroller interface circuit. Measurement (2020). https://doi.org/10.1016/j.measurement.2020.107547

    Article  Google Scholar 

  14. M. Klanjšek Gunde, N. Hauptman, M. Maček et al., The influence of hard-baking temperature applied for SU8 sensor layer on the sensitivity of capacitive chemical sensor. Appl. Phys. A 95, 673–680 (2009)

    Article  ADS  Google Scholar 

  15. M. Puentes, M. Schüßler, C. Damm et al., Extraction of capacitive profiles with a planar metamaterial sensor. Appl. Phys. A 103, 815–819 (2011)

    Article  ADS  Google Scholar 

  16. Z. Ghemari, Analysis and optimization of vibration sensor. In 2018 IEEE International Conference on Smart Materials and Spectroscopy (SMS), Hammamet, Tunisia, 2018, pp. 1–5.

  17. Z. Ghemari, S. Saad, The use of mechanical sensitivity model to enhance capacitive sensor characteristics. Analog Integr. Circ. Sig. Process. 99, 349–357 (2019)

    Article  Google Scholar 

  18. Z. Ghemari, Enhancement of the vibratory analysis technique by the accelerometer characteristics evolution. The 7th International Conference on Control Engineering & Information Technology, Morocco, 2019.

  19. Z. Ghemari, S. Belkhiri, ‘Mechanical resonator sensor characteristics development for precise vibratory analysis. Sens Imaging 22, 40 (2021)

    Article  ADS  Google Scholar 

  20. K.D. Hemmati, B.A. Ganji, Retraction Note: a new structure and modeling of a three-axis MEMS capacitive accelerometer with high dynamic range and sensitivity. Microsyst. Technol. 29, 289 (2023)

    Article  Google Scholar 

  21. N. Gupta, S. Dutta, A. Panchal et al., Design and fabrication of SOI technology based MEMS differential capacitive accelerometer structure. J. Mater. Sci.: Mater. Electron. 30, 15705–15714 (2019)

    Google Scholar 

  22. P. Kongpark, Conditionnement de capteurs capacitifs dans des systèmes faible consommation (Micro et nanotechnologies/Microélectronique. Université Montpellier, 2016)

    Google Scholar 

  23. Z. Ghemari, S. Saad, Enhancement of capacitive accelerometer operation by parameters improvement. Int. J. Num. Modell. Electron. Netw. Device. Field. (2019). https://doi.org/10.1002/jnm.2568

    Article  Google Scholar 

  24. Z. Ghemari, S. Saad, The use of mechanical sensitivity model to enhance capacitive sensor characteristics. Analog Integrated Circ. Signal 99(2), 349–357 (2019). https://doi.org/10.1007/s10470-018-01383-w

    Article  Google Scholar 

  25. S.K. Kar et al., A differential output interfacing ASIC for integrated capacitive sensors. IEEE Trans. Instrum. Measure. 67(1), 196–203 (2018)

    Article  ADS  Google Scholar 

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Funding

Not applicable. This work was supported by the Algerian General Direction of Research DGRDT.

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Authors and Affiliations

  1. Electrical Engineering Department, Mohamed Boudiaf University of M’sila, 28000, M’Sila, Algeria

    Zine Ghemari & Salah Belkhiri

  2. Laboratoire des Systèmes Electromécaniques, Badji Mokhtar University of Annaba, 23000, Annaba, Algeria

    Salah Saad

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  1. Zine Ghemari
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  2. Salah Belkhiri
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  3. Salah Saad
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A novel capacitive sensor design will also be recommended.

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Correspondence to Zine Ghemari.

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Ghemari, Z., Belkhiri, S. & Saad, S. A capacitive sensor with high measurement accuracy and low electrical energy consumption. Appl. Phys. A 129, 362 (2023). https://doi.org/10.1007/s00339-023-06644-8

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