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A study of SiC decomposition under laser irradiation

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Abstract

In this experimental study we investigate the laser induced thermal decomposition of 4H-Sic under ambient conditions using fiber laser. Using a unique two-color pyrometer setup, we measure the temporal evolution of the temperature in the irradiated zone and determine the decomposition rate for various laser power levels. We find that the temporal evolution of the temperature in the irradiated area exhibits an initial heating phase up to about 1300 K, being characterized by an unaffected SiC surface. Upon an expeditious temperature increase, a decomposition phase follows with temperatures above 1700 K, being accompanied by carbonization of the SiC surface. The decomposed volume depends linearly on the duration of the decomposition phase and increases linearly with laser power. The temperature evaluation of the decomposition speed reveals an Arrhenius-type behavior allowing the calculation of the activation energy for the decomposition under ambient conditions to 613 kJ/mol in the temperature range between 2140 and 2420 K.

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  1. University of Applied Science Aschaffenburg, Wuerzburger Strasse 45, 63743, Aschaffenburg, Germany

    B. Adelmann & R. Hellmann

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Adelmann, B., Hellmann, R. A study of SiC decomposition under laser irradiation. Appl. Phys. A 123, 454 (2017). https://doi.org/10.1007/s00339-017-1046-7

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