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The influence of the thermal diffusivity of the substrates on fabrication of metal nanostructures by femtosecond laser irradiation

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Abstract

We demonstrate the fabrication of nanowire gratings by irradiation of femtosecond laser pulses to platinum thin films on various substrates: silicon carbide, aluminum nitride, silicon and fused silica. Scanning electron microscopy showed that many cracks were formed on the nanowire surfaces formed on silicon carbide, aluminum nitride and silicon substrates, while few cracks were formed on a fused silica substrate. Elemental analysis by energy-dispersive X-ray spectroscopy indicated that melting or evaporation of the platinum thin film could hardly occur in the case of the silicon carbide and aluminum nitride substrates. Calculated results by two temperature models revealed that the lattice temperature within the platinum thin films after laser irradiation depends on the thermal diffusivity of the substrates, which could influence the melting phase existence time. From the experimental and the calculated results, melting of the metal thin film could have influenced metal nanowire grating formation.

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Acknowledgements

Y. Nakajima is grateful for a Grant-in-Aid for Research Fellow of the Japan Society for the Promotion of Science (JSPS).

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Authors and Affiliations

  1. School of Integrated Design Engineering, Keio University, 3-14-1, Hiyoshi, Kohoku-ku, Yokohama, 223-8522, Japan

    Akihiro Takami, Yasutaka Nakajima & Mitsuhiro Terakawa

  2. Institute of Electronics, Bulgarian Academy of Sciences, Tzarigradsko shousse 72, 1784, Sofia, Bulgaria

    Nikolay Nedyalkov

  3. Department of Electronics and Electrical Engineering, Keio University, 3-14-1, Hiyoshi, Kohoku-ku, Yokohama, 223-8522, Japan

    Mitsuhiro Terakawa

Authors
  1. Akihiro Takami
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  2. Yasutaka Nakajima
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  3. Nikolay Nedyalkov
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  4. Mitsuhiro Terakawa
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Correspondence to Mitsuhiro Terakawa.

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Takami, A., Nakajima, Y., Nedyalkov, N. et al. The influence of the thermal diffusivity of the substrates on fabrication of metal nanostructures by femtosecond laser irradiation. Appl. Phys. A 123, 126 (2017). https://doi.org/10.1007/s00339-017-0771-2

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  • DOI: https://doi.org/10.1007/s00339-017-0771-2

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