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Effect of wavelength and pulse duration on laser micro-welding of monocrystalline silicon and glass

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Abstract

Micro-welding characteristics of silicon and glass by pulsed lasers are described. In this study, four types of laser beam, which are nanosecond pulsed laser and picosecond pulsed laser of 532 and 1064 nm in wavelength, were used for joining monocrystalline silicon and glass. Influence of wavelength and pulse duration on micro-welding of monocrystalline silicon and glass was experimentally investigated under the same spot diameter, and the molten area of monocrystalline silicon and glass was characterized. Finally, the breaking strength was evaluated for the overlap weld joint with different pulse duration and wavelength. A splash area of molten silicon around the weld bead line was obvious in the nanosecond pulsed laser. On the other hand, there was no remarkable molten splash around the weld bead line in the picosecond pulsed laser. Breaking strength of specimens with 1064 nm wavelength was higher than with 532 nm wavelength in nanosecond laser, whereas breaking strength of laser-irradiated specimen by picosecond pulse duration was higher than that by nanosecond pulse duration. It is concluded that the combination of picosecond pulse duration and infrared wavelength leads to the stable molten area appearance of the weld bead and higher breaking strength in micro-welding of glass and monocrystalline silicon.

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References

  1. A.G. Darrin, R. Osiander, in MEMS Packaging Materials, ed. by R. Ghodssi, P. Lin (Springer, Boston, 2011)

    Chapter  Google Scholar 

  2. S.A. Audep, M.E. Katrina, International conference on Solid-state Sensors and Actuators (Chicago, 1997), pp. 287–289

  3. J. Baborowski, A. Pezous, D.G. Spinola, R. Jose James, R. Ziltener, C. Muller, M.A. Dubois, Proced. Chem. 1(1), 153538 (2009)

    Google Scholar 

  4. M. Chiao, Y.T. Cheng, L. Lin, in Introduction to MEMS Packaging, ed. by Z. Zhou, Z. Wang, L. Lin (Springer, Berlin, 2012), pp. 415–446

    Google Scholar 

  5. R.L. Smith, S.D. Collins, IEEE Trans. on Electron Devices 35, 787–792 (1988)

    Article  ADS  Google Scholar 

  6. A.S. Laskar, B. Blythe, Sens. Act. A 36, 1–27 (1993)

    Article  Google Scholar 

  7. R. Joyce, K. Singh, H. Sharma, S. Varghese, J. Akhtar, J. Microsyst, Technol. 20(6), 1153–1158 (2013)

    Google Scholar 

  8. J. Wei, H. Xie, M.L. Nai, C.K. Wong, L.C. Lee, J. Micromech. Microeng. 13, 217–222 (2003)

    Article  ADS  Google Scholar 

  9. A. Cozma, B. Puers, J. Micromech. Microeng. 5, 98–102 (1995)

    Article  ADS  Google Scholar 

  10. N. Lorenz, M.D. Smith, D.P. Hand, J. Microelectron. Reliab 51, 2257–2262 (2011)

    Article  Google Scholar 

  11. Y.T. Cheng, L. Lin, K. Najafi, J. Microelectromech. Syst. 9, 3–8 (2000)

    Article  Google Scholar 

  12. U.M. Mescheder, M. Alavi, K. Hiltmann, C. Lietzau, C. Nachtigall, H. Sandmaier, Sens. Act. 97–98, 422–427 (2002)

    Article  Google Scholar 

  13. M.J. Wild, A. Gillner, R. Poprawe, Sens. Act. A 93, 63–69 (2001)

    Article  Google Scholar 

  14. T. Tamaki, W. Watanabe, K. Itoh, Opt. Express 14, 10460–10468 (2006)

    Article  ADS  Google Scholar 

  15. A. Horn, I. Mingareev, A. Werth, M. Kachel, U. Brenk, Appl. Phys. A 93, 171–175 (2008)

    Article  ADS  Google Scholar 

  16. I. Miyamoto, K. Cvecek, Y. Okamoto, M. Schmidt, H. Helvajian, Opt. Express 19, 22961–22973 (2011)

    Article  ADS  Google Scholar 

  17. I. Miyamoto, K. Cvecek, Y. Okamoto, M. Schmidt, Appl. Phys. A 114, 1–22 (2014)

    Article  Google Scholar 

  18. Y. Okamoto, I. Miyamoto, K. Cvecek, A. Okada, K. Takahashi, M. Schmidt, J. Laser Micro/Nanoeng. 8, 65–69 (2013)

    Article  Google Scholar 

  19. K. Stolberg, B. Kremser, S. Friedel, Y. Atsuta, J. Laser Micro/Nanoeng. 4, 231–233 (2009)

    Article  Google Scholar 

  20. Q. Lu, S.S. Mao, X. Mao, R.E. Russo, J. Appl. Phys. 104, 083301–083307 (2008)

    Article  ADS  Google Scholar 

Download references

Acknowledgments

The authors would like to thank Prof. Dr. Isamu Miyamoto (Osaka University) and Prof. Dr. Yoshiyuki Uno (Chugoku Polytechnic College) for helpful discussion during writing this manuscript. This work was partially supported by Japan Society of the Promotion Science (JSPS) KAKENHI Grant No. 24760107.

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Authors and Affiliations

  1. Graduate School of Natural Science and Technology, Okayama University, 3-1-1 Tsushimanaka, Kita-ku, Okayama, 700-8530, Japan

    I. H. W. Nordin, Y. Okamoto, A. Okada & H. Jiang

  2. Kataoka Corporation, 2-14-27 Shinyokohama, Kohoku-ku, Yokohama, 222-0033, Japan

    T. Sakagawa

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  1. I. H. W. Nordin
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  2. Y. Okamoto
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  3. A. Okada
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  4. H. Jiang
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  5. T. Sakagawa
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Correspondence to I. H. W. Nordin.

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Nordin, I.H.W., Okamoto, Y., Okada, A. et al. Effect of wavelength and pulse duration on laser micro-welding of monocrystalline silicon and glass. Appl. Phys. A 122, 400 (2016). https://doi.org/10.1007/s00339-016-9849-5

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  • DOI: https://doi.org/10.1007/s00339-016-9849-5

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