Skip to main content
SpringerLink
Log in

Single-shot ablation threshold of chromium using UV femtosecond laser pulses

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

Single-shot ablation threshold for thin chromium film was studied using 266 nm, femtosecond laser pulses. Chromium is a useful material in the nanotechnology industry and information on ablation threshold using UV femtosecond pulses would help in precise micromachining of the material. The ablation threshold was determined by measuring the ablation crater diameters as a function of incident laser pulse energy. Absorption of 266 nm light on the chromium film was also measured under our experimental conditions, and the absorbed energy single-shot ablation threshold fluence was \(46 \pm 5\) mJ/cm2. The experimental ablation threshold fluence value was compared to time-dependent heat flow calculations based on the two temperature model for ultrafast laser pulses. The model predicts a value of 31.6 mJ/cm2 which is qualitatively consistent with the experimentally obtained value, given the simplicity of the model.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4

Similar content being viewed by others

References

  1. R. Fedosejevs, Y. Tsui, Z. Chen, S. Banerjee, in Nanofabrication, ed. by M. Stepanova, S. Dew. Chap. Laser Nanopatterning (Springer-Verlag/Wien, New York, 2012), pp. 301–319

  2. H.B. Sun, S. Kawata, Adv. Polym. Sci. 170, 169 (2004)

    Article  Google Scholar 

  3. J. Békési, J.H. Klein-Wiele, P. Simon, Appl. Phys. A 76, 355 (2003)

    ADS  Google Scholar 

  4. J.A. Sue, T. Chang, Surf. Coat. Technol. 76–77, 61 (1995)

    Article  Google Scholar 

  5. V. Mulloni, F.B. Kessler, in Chromium: Environmental, Medical and Materials Studies, ed. by M. P. Salden. Chromium in MEMS Technology (Nova Publishers, New York, 2011)

  6. S.P. Banerjee, Z. Chen, I. Utkin, R. Fedosejevs, Appl. Phys. A 111, 791 (2013)

    Article  ADS  Google Scholar 

  7. S.P. Banerjee, R. Fedosejevs, Spectrochim. Acta Part B 92, 34 (2014)

    Article  ADS  Google Scholar 

  8. D.J. Hwang, H. Jeon, C.P. Grigoropoulos, J. Yoo, R.E. Russo, Appl. Phys. Lett. 91, 251118 (2007)

    Article  ADS  Google Scholar 

  9. S. Nolte, B.N. Chichkov, H. Welling, Y. Shani, K. Lieberman, H. Terkel, Opt. Lett. 24(13), 914 (1999)

    Article  ADS  Google Scholar 

  10. J.H. Weaver, H.P.R. Frederikse, in CRC Handbook of Chemistry and Physics, ed. by D. R. Lide. Chap. Optical Properties of Selected Elements (CRC Press, Boca Raton, Florida, 2004), pp. 12–135

  11. J. Kim, S. Na, Opt. Laser Technol. 39, 1443 (2007)

    Article  ADS  Google Scholar 

  12. S. Preuss, A. Demchuk, M. Stuke, Appl. Phys. A 61, 33 (1995)

    Article  ADS  Google Scholar 

  13. S. Preuss, E. Matthias, M. Stuke, Appl. Phys. A 59, 79 (1994)

    Article  ADS  Google Scholar 

  14. S. Preuss, M. Späth, Y. Zhang, M. Stuke, Appl. Phys. Lett. 62, 3049 (1993)

    Article  ADS  Google Scholar 

  15. S.P. Banerjee, Z. Chen, R. Fedosejevs, J. Appl. Phys. 113, 183101 (2013)

    Article  ADS  Google Scholar 

  16. S.E. Kirkwood, A.C.V. Popta, Y.Y. Tsui, R. Fedosejevs, Appl. Phys. A 81, 729 (2005)

    Article  ADS  Google Scholar 

  17. J. Byskov-Nielsen, J.M. Savolainen, M.S. Christensen, P. Balling, Appl. Phys. A 101, 97 (2010)

    Article  ADS  Google Scholar 

  18. J.M. Liu, Opt. Lett. 7(5), 196 (1982)

    Article  ADS  Google Scholar 

  19. A. Rosenfeld, E.E.B. Campbell, Appl. Surf. Sci. 96–98, 439 (1996)

    Article  Google Scholar 

  20. J. Ihlemann, A. Scholl, H. Schmidt, B. Woltf-Rottke, Appl. Phys. A 60, 411 (1995)

    Article  ADS  Google Scholar 

  21. L. Cabalín, J. Laserna, Spectrochim. Acta Part B 53, 723 (1998)

    Article  ADS  Google Scholar 

  22. D.R. Lide (ed.), CRC Handbook of Chemistry and Physics, 87th edn. (CRC Press, Boca Raton, 2006)

    Google Scholar 

  23. Y.M. Lai, N.H. Cheung, Rev. Sci. Instrum. 64, 1606 (1993)

    Article  ADS  Google Scholar 

  24. S. Petzoldt, J. Reif, E. Matthias, Appl. Surf. Sci. 96–98, 199 (1996)

    Article  Google Scholar 

  25. A. Lisfi, M. Guyot, R. Krishnan, V. Cagan, Appl. Surf. Sci. 96–98, 66 (1996)

    Article  Google Scholar 

  26. J. Jandeleit, G. Urbasch, H.D. Hoffmann, H.G. Treusch, E. Kreutz, Appl. Phys. A 63, 117 (1996)

    Article  ADS  Google Scholar 

  27. Y. Jee, M.F. Becker, R.M. Walser, J. Opt. Soc. Am. B 5(3), 648 (1988)

    Article  ADS  Google Scholar 

  28. C. Momma, S. Nolte, B.N. Chichkov, F. von Alvensleben, A. Tünnermann, Appl. Surf. Sci. 109/110, 15 (1997)

    Article  ADS  Google Scholar 

  29. S.I. Anisimov, B.L. Kapeliovich, T.L. Perel’man, Sov. Phys. JETP 39(2), 375 (1974)

    ADS  Google Scholar 

  30. P.B. Corkum, F. Brunel, N.K. Sherman, T. Srinivasan-Rao, Phys. Rev. Lett. 61(25), 2886 (1988)

    Article  ADS  Google Scholar 

  31. S.E. Kirkwood, Ph.D. thesis, University of Alberta (2007)

  32. C. Kittel (ed.), Introduction to Solid State Physics, 7th edn. (Wiley, New York, 1996)

    Google Scholar 

  33. M. Bonn, D.N. Denzler, S. Funk, M. Wolf, S.S. Wellershoff, J. Hohlfeld, Phys. Rev. B 61(2), 1101 (2000)

    Article  ADS  Google Scholar 

  34. S.I. Anisimov, B. Rethfeld, Proc. SPIE 3093, 192 (1997)

    Article  ADS  Google Scholar 

  35. C. Schäfer, H.M. Urbassek, L.V. Zhigilei, Phys. Rev. B 66, 115404 (2002)

    Article  ADS  Google Scholar 

  36. R. Fedosejevs, R. Ottmann, R. Sigel, G. Kühnle, S. Szatmári, F.P. Schäfer, Appl. Phys. B 50, 79 (1990)

    Article  ADS  Google Scholar 

Download references

Acknowledgments

The authors wish to acknowledge funding for this research from the Natural Sciences and Engineering Research Council of Canada.

Author information

Authors and Affiliations

  1. Department of Electrical and Computer Engineering, University of Alberta, Edmonton, AB, T6G2V4, Canada

    S. P. Banerjee & R. Fedosejevs

Authors
  1. S. P. Banerjee
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. R. Fedosejevs
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to S. P. Banerjee.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Banerjee, S.P., Fedosejevs, R. Single-shot ablation threshold of chromium using UV femtosecond laser pulses. Appl. Phys. A 117, 1473–1478 (2014). https://doi.org/10.1007/s00339-014-8577-y

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-014-8577-y

Keywords

Search

Navigation