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Influence of methane flow ratios on the structural and mechanical properties of Ti-doped diamond-like carbon films

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Abstract

Diamond-like carbon films with Ti dopant (Ti-DLC) are synthesized by reactive magnetron sputtering using a pure Ti metal target. This study determines the effect of methane flow ratios (Rm=CH4/(Ar + CH4), ranging from 4 to 12%) on the surface morphology, microstructure, mechanical properties, and cermet cutting tool insert features of Ti-DLC films. The GIXRD diffraction spectrum for Ti-DLC film depicts an amorphous structure. There are peaks for nano-crystalline TiC at 2θ values of 35.88°, 41.52°, and 60.14°, which respectively correspond to the (111), (200), and (220) planes of the face-centered cubic structure. The characteristic binding energy of C 1s, Ti 2p, and O 1s for Ti-DLC film is determined using a high-resolution XPS spectrum. Increasing Rm flow ratio (reducing Ti metal doping) increases the intensity of the Raman spectrum because there is an increased sp2-C (sp2/sp3 ratio) site fraction for DLC components. The experimental results show that the hardness of the DLC film increases from 11.07 to 14.76 GPa as the Rm flow ratio is increased from 4 to 12%. The adhesive strength of the Ti-DLC film coating is measured using a scratch test and shows that the film adheres well to the substrate. The Ti-DLC films are coated onto cutter inserts for the dry milling of an Inconel 718 workpiece, and the results show that all coated tools have a significantly longer tool life than uncoated tools.

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Funding

The authors gratefully acknowledge the support of the Ministry of Science and Technology of the Republic of China, Taiwan, through Grant Nos. MOST 111-2637-E-262-002, MOST 111-2221-E-262-005, and NSTC 111-2622-E-262-002.

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Authors and Affiliations

  1. Graduate Institute of Manufacturing Technology, National Taipei University of Technology, Taipei, Taiwan

    Wei-Hsiang Lee & Yin-Tung Alber Sun

  2. Department of Mechanical Engineering, National Taipei University of Technology, Taipei, 10608, Taiwan

    Wei-Hsiang Lee & Yin-Tung Alber Sun

  3. Department of Mechanical Engineering, Ming Chi University of Technology, Taipei, Taiwan

    Chih-Chung Hu

  4. Department of Mechanical Engineering, Lunghwa University of Science and Technology, Taoyuan, 33306, Taiwan

    Bo-Yuan Wang & Chun-Yao Hsu

  5. Department of Semiconductor and Electro-optical Technology, Minghsin University of Science and Technology, Hsinchu, 30401, Taiwan

    Ho Chang

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  1. Wei-Hsiang Lee
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Contributions

Wei-Hsiang Lee and Yin-Tung Alber Sun: conceptualization. Chih-Chung Hu, Bo-Yuan Wang, and Ho Chang: experimentation. Wei-Hsiang Lee and Yin-Tung Alber Sun: characterization. Chih-Chung Hu, Bo-Yuan Wang, and Ho Chang: validation. Ho Chang and Chun-Yao Hsu: analysis. Chun-Yao Hsu: writing the draft

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Correspondence to Ho Chang or Chun-Yao Hsu.

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Lee, WH., Hu, CC., Sun, YT.A. et al. Influence of methane flow ratios on the structural and mechanical properties of Ti-doped diamond-like carbon films. Int J Adv Manuf Technol 129, 1145–1157 (2023). https://doi.org/10.1007/s00170-023-12368-z

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