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Effect of the mask geometry on the microstructure forming in through-mask electrochemical micromachining

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Abstract

The manufacturing of surface microstructure is an important means for the modification of surface characteristics of parts. Through-mask electrochemical manufacturing is also an efficient way to fabricate surface microstructures. Nevertheless, in cases where the through-mask electrochemical manufacturing is used for the fabrication of microstructures, many experiments are required to control the cross-section morphology of the microstructures. Furthermore, there is a lack of quantitative analysis of the impact of key variables on the process. In this paper, using numerical simulations based on the mask geometry, we analyze the effects of the aspect ratio of mask feature and the gap between cathode to mask on electrochemical micromachining. We further investigate the influence laws of the mask geometry on the anode current density distribution and forming process. A critical value of “0.8” is also determined for aspect ratio of mask feature which is closely related to the anode current density distribution and forming process. The through-mask electrochemical micromachining experiments confirm the effect laws of the geometric structure of the mask feature. And the critical value (0.8) of aspect ratio can be used as the basis for selecting mask feature.

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References

  1. Shi G, Yu X, Meng H, Zhao F, Wang J, Jiao J, Jiang H (2022) Effect of surface modification on friction characteristics of sliding bearings: a review. Tribol Int 177:107937. https://doi.org/10.1016/j.triboint.2022.107937

    Article  Google Scholar 

  2. Chu H, Xu N, Yu X, Jiang H, Ma W, Qiao F (2022) Review of surface modification in pool boiling application: coating manufacturing process and heat transfer enhancement mechanism. Appl Therm Eng 215:119041. https://doi.org/10.1016/j.applthermaleng.2022.119041

    Article  Google Scholar 

  3. Brinksmeier E, Karpuschewski B, Yan J, Schönemann L (2020) Manufacturing of multiscale structured surfaces. CIRP Ann-Manuf Techn 69(2):717–739. https://doi.org/10.1016/j.cirp.2020.06.001

    Article  Google Scholar 

  4. Holstein N, Krauss W, Konys J, Heuer S, Weber T (2016) Advanced electrochemical machining (ECM) for tungsten surface micro-structuring in blanket applications. Fusion Eng Des 109:956–960. https://doi.org/10.1016/j.fusengdes.2016.01.045

    Article  Google Scholar 

  5. Zhai K, Du L, Wang S, Wen Y, Liu J (2020) Research on the synergistic effect of megasonic and particles in through mask electrochemical etching process. Electrochim Acta 364:137300. https://doi.org/10.1016/j.electacta.2020.137300

    Article  Google Scholar 

  6. Saxena KK, Qian J, Reynaerts D (2018) A review on process capabilities of electrochemical micromachining and its hybrid variants. Int J Mach Tool Manu 127:28–56. https://doi.org/10.1016/j.ijmachtools.2018.01.004

    Article  Google Scholar 

  7. Wang G, Zhang Y, Li H, Tang J (2020) Ultrasound-assisted through-mask electrochemical machining of hole arrays in ODS superalloy. Materials 13(24):5780. https://doi.org/10.3390/ma13245780

    Article  Google Scholar 

  8. Zou H, Yue X, Luo H, Liu B, Zhang S (2020) Electrochemical micromachining of micro hole using micro drill with non-conductive mask on the machined surface. J Manuf Process 59:366–377. https://doi.org/10.1016/j.jmapro.2020.09.077

    Article  Google Scholar 

  9. Baldhoff T, Nock V, Marshall AT (2018) Review: Through-mask electrochemical micromachining. J Electrochem Soc 165(16):E841. https://doi.org/10.1149/2.1341814jes

    Article  Google Scholar 

  10. Courtney DG, Li H, Lozano PC (2012) Electrochemical micromachining on porous nickel for arrays of electrospray ion emitters. J Microelectromech S 22(2):471–482. https://doi.org/10.1109/jmems.2012.2227951

    Article  Google Scholar 

  11. Sun Y, Ling S, Zhao D, Liu J, Liu Z, Song J (2020) Through-mask electrochemical micromachining of micro pillar arrays on aluminum. Surf Coat Tech 401:126277. https://doi.org/10.1016/j.surfcoat.2020.126277

    Article  Google Scholar 

  12. Baldhoff T, Nock V, Marshall AT (2017) Through-mask electrochemical micromachining of aluminum in phosphoric acid. J Electrochem Soc 164(9):E194–E202. https://doi.org/10.1149/2.0441709jes

    Article  Google Scholar 

  13. Kunar S, Bhattacharyya B (2018) Influence of various flow methods during fabrication of micro ellipse pattern by maskless electrochemical micromachining. J Manuf Process 35:700–714. https://doi.org/10.1016/j.jmapro.2018.09.005

    Article  Google Scholar 

  14. Zhao L, Zhang Y, Bian H, Wang G, Ji L (2022) Investigation of electrochemical dissolution behavior of Ni (γ)/Ni3Al (γ′) and Co (γ)/Co3Al (γ′) superalloys in NaNO3 solution. Corros Sci 208:110622. https://doi.org/10.1016/j.corsci.2022.110622

    Article  Google Scholar 

  15. Wu M, Liu J, He J, Chen X, Guo Z (2020) Fabrication of surface microstructures by mask electrolyte jet machining. Int J Mach Tool Manu 148:103471. https://doi.org/10.1016/j.ijmachtools.2019.103471

    Article  Google Scholar 

  16. Chen XL, Zhu JJ, Xu Z, Su GK (2021) Modeling and experimental research on the evolution process of micro through-slit array generated with masked jet electrochemical machining. J Mater Process Tech 298:117304. https://doi.org/10.1016/j.jmatprotec.2021.117304

    Article  Google Scholar 

  17. Zhai K, Du L, Wen Y, Wang S, Cao Q, Zhang X, Liu J (2020) Fabrication of micro pits based on megasonic assisted through-mask electrochemical micromachining. Ultrasonics 100:105990. https://doi.org/10.1016/j.ultras.2019.105990

    Article  Google Scholar 

  18. Kunar S, Bhattacharyya B (2019) Electrochemical micromachining of micro square pattern using reusable masked tool. Mater Manuf Process 34(5):487–493. https://doi.org/10.1080/10426914.2018.1532582

    Article  Google Scholar 

  19. Chen XL, Fan GC, Lin CH, Dong BY, Guo ZN, Fang XL, Qu NS (2020) Investigation on the electrochemical machining of micro groove using masked porous cathode. J Mater Process Tech 276:116406. https://doi.org/10.1016/j.jmatprotec.2019.116406

    Article  Google Scholar 

  20. Zhao C, Ming P, Zhang X, Qin G, Shen J, Yan L et al (2020) Through-mask electrochemical micromachining with reciprocating foamed cathode. Micromachines 11(2):188. https://doi.org/10.3390/mi11020188

    Article  Google Scholar 

  21. Mahata S, Kunar S, Bhattacharyya B (2018) Micro dimple array fabrication by through mask electrochemical micromachining utilizing low-aspect ratio mask. J Electrochem Soc 165(3):E129–E137. https://doi.org/10.1149/2.0521803jes

    Article  Google Scholar 

  22. Patel DS, Agrawal V, Ramkumar J, Jain VK, Singh G (2020) Micro-texturing on free-form surfaces using flexible-electrode through-mask electrochemical micromachining. J Mater Process Tech 282:116644. https://doi.org/10.1016/j.jmatprotec.2020.116644

    Article  Google Scholar 

  23. Zhang X, Qu N, Chen X (2016) Sandwich-like electrochemical micromachining of micro-dimples. Surf Coat Tech 302:438–447. https://doi.org/10.1016/j.surfcoat.2017.01.035

    Article  Google Scholar 

  24. Chen XL, Dong BY, Zhang CY, Wu M, Guo ZN (2018) Jet electrochemical machining of micro dimples with conductive mask. J Mater Process Tech 257:101–111. https://doi.org/10.1016/j.jmatprotec.2018.02.035

    Article  Google Scholar 

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Funding

This work was supported by the National Natural Science Foundation of China (Grant No. 52205472) and the Basic Research Programs of Jiangsu (Grant No. BK20190669).

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Authors and Affiliations

  1. School of Mechanical and Power Engineering, Nanjing Tech University, Nanjing, 211816, China

    Guoqian Wang, Shan Jiang, Shoudong Ni & Yan Zhang

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  1. Guoqian Wang
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  2. Shan Jiang
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  3. Shoudong Ni
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  4. Yan Zhang
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Contributions

All authors contributed to the study conception and design. Numerical simulation and data analysis were performed by Guoqian Wang and Shan Jiang. Shoudong Ni designed the experiments. The test and analysis of experimental results were implemented by Guoqian Wang and Yan Zhang. The first draft of the manuscript was written by Guoqian Wang and Shan Jiang. All authors commented on previous versions of the manuscript. All authors read and approved the final manuscript.

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Correspondence to Guoqian Wang.

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Wang, G., Jiang, S., Ni, S. et al. Effect of the mask geometry on the microstructure forming in through-mask electrochemical micromachining. Int J Adv Manuf Technol 126, 3339–3351 (2023). https://doi.org/10.1007/s00170-023-11306-3

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  • DOI: https://doi.org/10.1007/s00170-023-11306-3

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