Abstract
As semiconductor device geometries continue to shrink, the semiconductor manufacturing process becomes increasingly complex. This usually results in unbalanced utilization of machines and decreases overall productivity. One way to resolve such a problem is to share the manufacturing resources between different lines divided by floors. To this end, designing an efficient lifter assignment method to more efficiently manage transfer requests (TRs) of wafer lots to different floors is required. Motivated by this, our study addresses the assignment of lifters for delivering wafer lots to different floors. In contrast to previous studies that consider only the current state of the system, our approach considers both the current and possible future states of the system in a probabilistic manner in the Markov decision process. To overcome the curse of dimensionality of the original problem, we design an efficient algorithm using clustering, partitioning, and tournament methods. Experiments based on historical data confirm the effectiveness of the proposed algorithm in reducing transportation times and delivery delays compared to the benchmark rules in practice and the method in the state-of-the-art. Sensitivity analysis demonstrates the robustness of the proposed model as the number of TRs increased. The proposed approach is expected to yield significant economic savings in both operating costs and labour.
Similar content being viewed by others
Change history
02 February 2022
A Correction to this paper has been published: https://doi.org/10.1007/s00170-022-08828-7
References
Na B, Woo JE, Lee J (2016) Lifter assignment problem for inter-line transfers in semiconductor manufacturing facilities. Int J Adv Manuf Technol 86:1615–26. https://doi.org/10.1007/s00170-015-8327-0
Kim J, Yu G, Jang YJ (2016) Semiconductor FAB layout design analysis with 300-mm FAB Data: Is minimum distance-based layout design best for semiconductor FAB design? Comput Ind Eng 99:330–346. https://doi.org/10.1016/j.cie.2016.02.012
Agrawal GK, Heragu SS (2006) A survey of automated material handling systems in 300-mm Semiconductor FABs. IEEE Trans Semicond Manuf 19:112–20. https://doi.org/10.1109/TSM.2005.863217
Le-Anh T, De Koster MBM (2006) A review of design and control of automated guided vehicle systems. Eur J Oper Res 171:1–23. https://doi.org/10.1016/j.ejor.2005.01.036
Qiu L, Hsu W, Huang S, Wang H (2002) Scheduling and routing algorithms for AGVs: a survey. Int J Prod Res 40:745–60. https://doi.org/10.1080/00207540110091712
Xie C, Allen TT (2015) Simulation and experimental design methods for job shop scheduling with material handling: a survey. Int J Adv Manuf Technol 80:233–43. https://doi.org/10.1007/s00170-015-6981-x
Huang CJ, Chang KH, Lin JT (2012) Optimal vehicle allocation for an automated materials handling system using simulation optimization. Int J Prod Res 50:5734–46. https://doi.org/10.1080/00207543.2011.622311
Liao DY, Fu HS (2004) Speed delivery: dynamic OHT allocation and dispatching in large-scale 300-mm AMHS management. IEEE Robot Autom Mag 22–32. https://doi.org/10.1109/MRA.2004.1337824
Lin JT, Wu CH, Huang CW (2013) Dynamic vehicle allocation control for automated material handling system in semiconductor manufacturing. Comput Oper Res 40:2329–39. https://doi.org/10.1016/j.cor.2013.04.007
Wang FK, Lin JT (2004) Performance evaluation of an automated material handling system for a wafer fab. Robot Comput Integr Manuf 20:91–100. https://doi.org/10.1016/j.rcim.2003.08.002
Kim BI, Park J (2009) Idle vehicle circulation policies in a semiconductor FAB. J Intell Manuf 20:709. https://doi.org/10.1007/s10845-008-0159-4
Vahdani B (2014) Vehicle positioning in cell manufacturing systems via robust optimization. Appl Soft Comput 24:78–85. https://doi.org/10.1016/j.asoc.2014.07.001
Lee S, Lim DE, Kang Y, Kim HJ (2021) Clustered multi-task sequence-to-sequence learning for autonomous vehicle repositioning. IEEE Access 9:14504–14515. https://doi.org/10.1109/ACCESS.2021.3051763
Schmaler R, Schmidt T, Schoeps M, Luebke J, Hupfer R, Schlaus N (2017) Simulation based evaluation of different empty vehicle management strategies with considering future transport jobs. In: Proceedings of the 2017 Winter Simulation Conference (WSC), vol 294. pp 1–12. https://doi.org/10.1109/WSC.2017.8248071
de Koster RBM, Le-Ahn T, Van der Meer JR (2004) Testing and classifying vehicle dispatching rules in three real-world settings. J Oper Manag 22:369–86. https://doi.org/10.1016/j.jom.2004.05.006
Egbelu PJ, Tanchoco JMA (1984) Characterization of automatic guided vehicle dispatching rules. Int J Prod Res 22:359–74. https://doi.org/10.1080/00207548408942459
Im K, Kim K, Lee S (2009) Effective vehicle dispatching method minimizing the blocking and delivery times in automatic material handling systems of 300 mm semiconductor fabrication. Int J Prod Res 47:3997–4011. https://doi.org/10.1080/00207540801914934
Kuo CH, Huang CS (2006) Dispatching of overhead hoist vehicles in a fab intrabay using a multimission-oriented controller. Int J Adv Manuf Technol 27:824–32
Bozer YA, Yen C (1996) Intelligent dispatching rules for trip-based material handling systems. J Manuf Syst 15(4):226–239. https://doi.org/10.1016/0278-6125(96)84549-3
Kim BI, Oh S, Shin J, Jun M (2007) Effectiveness of vehicle reassignment in a large-scale overhead hoist transport system. Int J Prod Res 45:789–802. https://doi.org/10.1080/00207540600675819
Le-Ahn T, De Koster MBM (2007) On-line dispatching rules for vehicle-based internal transport systems. Int J Prod Res 43:1711–28. https://doi.org/10.1080/00207540412331320481
Chen HK, Hsueh CF, Chang MS (2006) The real-time time-dependent vehicle routing problem. Transp Res Part E Log Transp 42:383–408. https://doi.org/10.1016/j.tre.2005.01.003
Kim CW, Tanchoco JMA (1991) Conflict-free shortest-time bidirectional AGV routing. Int J Prod Res 29:2377–2391. https://doi.org/10.1080/00207549108948090
Smolic-Rocak N, Bogdan S, Kovacic Z, Petrovic T (2010) Time windows based dynamic routing in multi-AGV systems. IEEE Trans Autom Sci 7:151–155. https://doi.org/10.1109/TASE.2009.2016350
Taghaboni-Dutta F, Tanchoco JMA (2007) Comparison of dynamic routeing techniques for automated guided vehicle system. Int J Prod Res 33:2653–69. https://doi.org/10.1080/00207549508945352
Bartlett K, Lee J, Ahmed S, Nemhauser G, Sokol J, Na B (2014) Congestion-aware dynamic routing in automated material handling systems. Comput Ind Eng 70:176–182. https://doi.org/10.1016/j.cie.2014.02.002
Lau H, Woo SO (2008) An agent-based dynamic routing strategy for automated material handling systems. Int J Comput Integr Manuf 21:269–288. https://doi.org/10.1080/09511920701241624
Kim H, Lim DE, Lee S (2020) Deep learning-based dynamic scheduling for semiconductor manufacturing with high uncertainty of automated material handling system capability. IEEE Trans Semicond Manuf 33:13–22. https://doi.org/10.1109/TSM.2020.2965293
Siebert M, Bartlett K, Kim H, Ahmed S, Lee J, Nazzal D, Nemhauser G, Sokol J (2018) Lot targeting and lot dispatching decision policies for semiconductor manufacturing: optimization under uncertainty with simulation validation. Int J Prod Res 56:629–41. https://doi.org/10.1080/00207543.2017.1387679
Lee S, Kim Y, Kahng H, Lee SK, Chung S, Cheong T, Shin K, Park J, Kim SB (2020) Intelligent traffic control for autonomous vehicle systems based on machine learning. Expert Syst Appl 144:113074. https://doi.org/10.1016/j.eswa.2019.113074
Jimenez J, Kim B, Fowler J, Mackulak G, Choung YI (2002) Operational modeling and simulation of an inter-bay AMHS in semiconductor wafer fabrication. Proc Winter Simul Conf 2:1377–1382. https://doi.org/10.1109/WSC.2002.1166405
Lee J, Kim S, Na B (2018) Optimization of lifter operations for inter-line transfers in semiconductor manufacturing facilities. Int J Mech Prod Eng Res Dev 8:167–178. https://doi.org/10.24247/ijmperdaug201819
Puterman ML (2014) Markov decision processes: discrete stochastic dynamic programming. John Wiley & Sons. https://doi.org/10.1002/9780470316887
Ross SM (1996) Stochastic processes. Wiley, New York
Ester M, Kriegel HP, Sander J, Xu X (1996) A density-based algorithm for discovering clusters in large spatial datasets with noise. Proc Sec Int Conf Knowl Discov Data Min 94:226–231
Funding
This was supported by the Korea National University of Transportation in 2021. This research was partially supported by the National Research Foundation of Korea (NRF) grant funded by the Ministry of Science and ICT (No. NRF-2019R1F1A1063365).
Author information
Authors and Affiliations
Corresponding author
Ethics declarations
Ethical approval
Not applicable.
Consent to participate
Not applicable.
Consent to publications
Not applicable.
Conflict of interest
The authors declare no competing interests.
Additional information
Publisher's note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
The original online version of this article was revised: To insert year 2021 in Funding section.
Rights and permissions
About this article
Cite this article
Shin, K., Jang, H. & Kim, H. An MDP-based lifter assignment algorithm for inter-floor transportation in semiconductor fabrication. Int J Adv Manuf Technol 119, 6583–6598 (2022). https://doi.org/10.1007/s00170-021-08387-3
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00170-021-08387-3