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Experimental study on surface integrity and subsurface damage of fused silica in ultra-precision grinding

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Abstract

The surface quality and subsurface damage (SSD) distribution achieved with a fine-grained grinding wheel under different depth-of-cut and cutting speed is experimentally studied. The ground surface roughness (SR) is investigated via white light interferometry and expressed in terms of four typical roughness values (PV, RMS, Rz, and Ra). The SSD is characterized by the magnetorheological finishing (MRF) spot method and transmission electron microscopy. The results show that brittle-ductile surfaces and ductile-like surfaces are generated during ultra-precision grinding. Largely due to plastic flow removal, fracture defects such as fractured pits and grinding streaks on the ground surface can be mitigated. Instead, a ductile-like surface covered with grinding streaks is found. When the depth-of-cut decreases from 4 to 1 μm, the SR and SSD depth decreases from PV 1.34 μm, Ra 15.23 nm, Rz 0.94 μm, RMS 22.24 nm, and SSD 6.1 μm to PV 0.51 μm, Ra 5.07 nm, Rz 0.24 μm, RMS 6.70 nm, and SSD 1.2 μm. In addition, when the cutting speed increases from 3.9 to 23.4 m/s, the SR and SSD depth decreases from PV 1.03 μm, Ra 15.01 nm, Rz 0.82 μm, RMS 21.43 nm, and SSD 5.6 μm to PV 0.12 μm, Ra 3.17 nm, Rz 0.07 μm, RMS 4.65 nm, and SSD 0.003 μm. Moreover, the material removal mechanism under different grinding parameters is revealed by calculating undeformed chip thickness, and the mechanism of surface morphology and subsurface crack produced in brittle-ductile mode is analyzed. A linear relationship between the SR and SSD depth is in accord with the formula SSD = 0.41Ra−0.68 for brittle-ductile surfaces.

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Acknowledgements

We thank LetPub (www.letpub.com) for its linguistic assistance during the preparation of this manuscript.

Funding

This research was funded by the National Natural Science Foundation of China (NSFC) (No. 51991374, No. 51835013, and No. U1801259), National Key R&D Program of China (No. SQ2020YFB200368-04), Strategic Priority Research Program of the Chinese Academy of Sciences (No. XD25020317), the Excellent Youth Project of Educational Committee of Hunan Province of China (No. 20B067) and the Science and Technology Innovation Program of Hunan Province (2020JJ5617).

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Authors and Affiliations

  1. Laboratory of Science and Technology on Integrated Logistics Support, College of Intelligence Science and Technology, National University of Defense Technology, 109 Deya Road, Hunan, 410073, China

    Yaoyu Zhong, Yifan Dai, Hang Xiao & Feng Shi

  2. Hunan Key Laboratory of Ultra-Precision Machining Technology, 109 Deya Road, Hunan, 410073, China

    Yaoyu Zhong, Yifan Dai, Hang Xiao & Feng Shi

  3. College of Mechanical and Electrical Engineering, Changsha University, 98 Hongshan Road, 410022, Hunan, China

    Hang Xiao

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  1. Yaoyu Zhong
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  2. Yifan Dai
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  4. Feng Shi
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Contributions

Conceptualization, Yifan Dai; Investigation, Yaoyu Zhong; Methodology, Yaoyu Zhong and Hang Xiao; Supervision, Yifan Dai and Feng Shi; Validation, Feng Shi and Hang Xiao; Visualization, Yaoyu Zhong; Writing, Yaoyu Zhong.

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Correspondence to Yifan Dai.

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Zhong, Y., Dai, Y., Xiao, H. et al. Experimental study on surface integrity and subsurface damage of fused silica in ultra-precision grinding. Int J Adv Manuf Technol 115, 4021–4033 (2021). https://doi.org/10.1007/s00170-021-07439-y

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