Abstract
The applicability of micro-electrical discharge machining (micro-EDM) using laminated 3D microelectrodes to eliminate defects such as numerous micro-stripes that are prone to appear on the sidewalls of microstructures manufactured via micro-electrochemical machining (micro-ECM) was examined. The study proposes the fabrication of 3D microstructures with laminated 3D microelectrodes through micro-EDM with deionized water containing B4C powder having a particle size of 1 μm. First, the effect of different machining voltages, B4C concentrations, and microelectrode back-off distances on the unilateral gap was investigated. The results indicated that a machining voltage of 100 V, a B4C concentration of 3 g/L, and a microelectrode back-off distance of 200 μm resulted in a 69 μm unilateral gap of the 3D microstructures. Given the effect of micro-EDM and that B4C is a semiconductor, the plasma discharge channels were enlarged, and the material removal was uniform. This significantly improved the machining efficiency. Furthermore, the polishing of B4C on electrode surfaces and workpiece surfaces smoothly removed the processing attachments with dielectric and ensured efficient and stable machining. Based on the optimized process parameters and after 1.5 h, 3D microstructures with a depth of 800 μm with a square-shaped blind hole and with semicircular and rectangular islands were obtained, and the corresponding roughness (Ra) of the bottom surface was 0.389, 0.388, and 0.392 μm. However, the corresponding microelectrodes wear was low and approximately corresponded to 20, 15, and 15 μm.
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References
Singh T, Dvivedi A (2016) Developments in electrochemical discharge machining: a review on electrochemical discharge machining, process variants and their hybrid methods. Int J Mach Tool Manu 105:1–13
Kagaya K, Oishi Y, Yada K (1990) Micro electro-discharge machining using water as a working fluid 2: narrow slit fabrication. Precis Eng 12(4):213–217
Chow HM, Yan BH, Huang FY (1999) Micro slit machining using electro-discharge machining with a modified rotary disk electrode (RDE). J Mater Process Technol 91(1–3):161–166
Tzeng YF, Lee CY (2001) Effects of powder characteristics on electrodischarge machining efficiency. Int J Adv Manuf Technol 17(8):586–592
Guu YH, Hou TK (2007) Effect of machining parameters on surface textures in EDM of Fe-Mn-Al alloy. Mater Sci Eng A 466(1–2):61–67
Osenbruggen CV (1969) High-precision spark machining. Philips Tech Rev 30:195–208
Jeswani ML (1981) Electrical discharge machining in distilled water. Wear 72(1):81–88
Lin CT, Chow HM, Yang LD, Chen YF (2007) Feasibility study of micro-slit EDM machining using pure water. Int J Adv Manuf Technol 34(1–2):104–110
Zhang Y, Liu Y, Shen Y, Ji R, Li Z, Zheng C (2014) Investigation on the influence of the dielectrics on the material removal characteristics of EDM. J Mater Process Technol 214(5):1052–1061
Zhang Y, Liu Y, Ji R, Zheng C, Shen Y, Wang X (2013) Transient dynamics simulation of the electrical discharge-generated bubble in sinking EDM. Int J Adv Manuf Technol 68(5–8):1707–1715
Ekmekci B, Elkoca O, Erden A (2005) A comparative study on the surface integrity of plastic mold steel due to electric discharge machining. Metall Mater Trans B 36(1):117–124
Luo YF (1997) The dependence of interspace discharge transitivity upon the gap debris in precision electrodischarge machining. J Mater Process Technol 68(68):121–131
Tripathy S, Tripathy DK (2017a) An approach for increasing the micro-hardness in electrical discharge machining by adding conductive powder to the dielectric. Mate. Today: Proc 4:1215–1224. https://doi.org/10.1016/j.matpr.2017.01.140
Wong YS, Lim LC, Rahuman I, Tee WM (1998) Near-mirror-finish phenomenon in EDM using powder-mixed dielectric. J Mater Process Technol 79(1):30–40
Kibria G, Sarkar BR, Pradhan BB, Bhattacharyya B (2010) Comparative study of different dielectrics for micro-EDM performance during microhole machining of Ti-6Al-4v alloy. Int J Adv Manuf Technol 48(5–8):557–570
Ekmekci B, Ersöz Y (2012) How suspended particles affect surface morphology in powder mixed electrical discharge machining (PMEDM). Metall Mater Trans B 43(5):1138–1148
Tripathy S, Tripathy DK (2017b) Surface characterization and multi-response optimization of EDM process parameters using powder mixed dielectric. Mate. Today: Proc 4:2058–2067. https://doi.org/10.1016/j.matpr.2017.02.051
Schuster R, Kirchiner V, Allongue P, Ertl G (2000) Electrochemical micromachining. Science 289(5476):98–101
Kim BH, Ryu SH, Choi DK, Chu CN (2005) Micro electrochemical milling. J Micromech Microeng 15:124–129
Shibayama T, Kunieda M (2006) Diffusion bonded EDM electrode with micro holes for jetting dielectric liquid. CIRP Ann Manuf Technol 55(1):171–174
Shibayama T, Kunieda M (2010) Diffusion-bonded tool electrode for electrical discharge machining with microchannels for jetting dielectric liquid. J. Jpn. Soc. Electr. Mach. Eng 44(105):12–16
Xu B, Wu XY, Lei JG, Cheng R, Ruan SC, Wang ZL (2015) Laminated fabrication of 3D micro-electrode based on WEDM and thermal diffusion welding. J Mater Process Technol 221:56–65
Lei J, Wu X, Xu B, Zhao Z, Ruan S, Cheng R (2015) Laminated fitting fabrication of Cu–Sn composite 3d microelectrodes and elimination of ridges on the machined surface of 3d micro-cavities. J Mater Process Technol 225:24–31
Lei J, Wu X, Wu B, Xu B, Guo D, Zhong J (2016) Fabrication of 3D microelectrodes by combining wire electrochemical micromachining and micro-electric resistance slip welding ☆. Procedia Cirp 42:825–830
Wu ZZ, Wu XY, Lei JG, Xu B, Jiang K, Zhong JM, Diao DF, Ruan SC (2018) Vibration-assisted micro-ECM combined with polishing to machine 3D microcavities by using an electrolyte with suspended B4C particles. J Mater Process Technol 255:275–284
Fan ZW, Hourng LW (2009) The analysis and investigation on the microelectrode fabrication by electrochemical machining. Int J Mach Tool Manu 49(7):659–666
Mcgeough JA, Khayry ABM, Munro W, Crookall JR (1983) Theoretical and experimental investigation of the relative effects of spark erosion and electrochemical dissolution in electrochemical arc machining. CIRP Ann Manuf Technol 32(1):113–118
Liu Y, Wei Z, Wang M, Zhang J (2017) Experimental investigation of micro wire electrochemical discharge machining by using a rotating helical tool. J Manuf Process 29:265–271
Wu B, Wu XY, Lei JG, Xu B, Ruan SC, Zhong JM (2017) Study on machining 3D micro mould cavities using reciprocating micro ECM with queued foil microelectrodes. J Mater Process Technol 241:120–128
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The authors are grateful to their colleagues for essential contribution to the work.
Funding
This work is supported by the National Natural Science Foundation of China (No. 51575360, 51605305), PhD Start-up Fund of Natural Science Foundation of Guangdong Province (No. 2016A030310036, 2016A030310050), the Research and Development Foundation of Science and Technology of Shenzhen (No. JCYJ20160308103527680, JCYJ20150525092941026, JCYJ20150324140036865), and the newly introduced teacher launch scientific research project of Shenzhen University (No. 2016037).
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Wu, Zz., Luo, F., Guo, Dj. et al. Micro-EDM by using laminated 3D microelectrodes with deionized water containing B4C powder. Int J Adv Manuf Technol 99, 2893–2902 (2018). https://doi.org/10.1007/s00170-018-2581-x
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DOI: https://doi.org/10.1007/s00170-018-2581-x