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Ultra-precision finishing of optical mold by magnetorheological polishing using a cylindrical permanent magnet

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Abstract

A magnetorheological polishing was proposed to be used for optical glass mold finishing, aiming at suppressing middle spatial frequency errors from ultra-precision grinding while improving surface roughness. A small polishing head, with a cylindrical permanent magnet enveloped by a nonmagnetic outer shell, was also developed. Polishing experiments were performed on concave aspheric tungsten carbide molds. The results demonstrated the developed magnetorheological polishing successfully suppressed the middle spatial frequency errors on the optical mold by decreasing amplitude to 1 nm, while improving overall surface finish to 1 nm in Ra.

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Funding

This work was financially supported by the Natural Science Foundation of Hunan province (Grant no. 2018JJ2328), the Foundation of Education Department of the Hunan province (Grant no. 17C1368), the Doctor Start-up Foundation of University of South China (Grant no. 2016XQD38), and the Science and Technology Development Plan Project in Hengyang (Grant no. 2017KJ291).

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Correspondence to Yongqiang Wang.

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Wang, Y., Yin, S. & Hu, T. Ultra-precision finishing of optical mold by magnetorheological polishing using a cylindrical permanent magnet. Int J Adv Manuf Technol 97, 3583–3594 (2018). https://doi.org/10.1007/s00170-018-2199-z

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  • DOI: https://doi.org/10.1007/s00170-018-2199-z

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