Abstract
The microstructures arrays are widely used and have good prospects in different applications because of their special and unique engineering functions. Micro V-grooves array is one of the most common micro structures used for optical and biomedical functions. Precision grinding is one of the micro mechanical machining technologies for a wide range of hard non-ferrous materials to fabricate micro structures array. In this paper, a three-axis computer numerical control (CNC) grinding machine tool is designed for the grinding of micro V-grooves array on hard and brittle materials. Material removal and machining strategy are studied for the grinding of V-grooves array. A machining strategy design (MSD) system is established to generate NC program, simulate the tool paths and machining process as well as predict the total machining time for the grinding of V-grooves array in the developed machine tool. Experiments are designed to grind flat surface and micro V-grooves array on optical glass. The experimental results show that the grinding machine tool can produce high quality surface and micro V-grooves array with sub-micrometer form accuracy.
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Brinksmeier E, Mutlugünes Y, Klocke F, Aurich LC, Shore P, Ohmori H (2010) Ultra-precision grinding. CIRP Ann Manuf Technol 59(2):652–671
Zhong ZW, Lim SC, Asundi A (2005) Effects of thermally induced optical fiber shifts in V-groove arrays for optical MEMS. Microelectron J 36(2):109–113
Priyadarshi A, Fen L, Mhaisalkar S, Kripesh V, Asundi A (2006) Fiber misalignment in silicon V-groove based optical modules. Opt Fiber Technol 12(2):170–184
Lin CY, Su CH, Hsu CM, Lin CR (2008) Improvement of the microcrystalline cube corner reflective structure and efficiency. Jpn J Appl Phys 47(7R):5693–5701
Li P, Xie J, Cheng J, Wu K (2014) Anisotropic wetting properties on a precision-ground micro-V-grooved Si surface related to their micro-characterized variables. J Micromech Microeng 24(7):075004
Kaiser JP, Reinmannb A, Bruinink A (2006) The effect of topographic characteristics on cell migration velocity. Biomaterials 27(30):5230–5241
Huo DH, Cheng K, Wardle F (2010) Design of a five-axis ultra-precision micro-milling machine—UltraMill. Part 1: holistic design approach, design considerations and specifications. Int J Adv Manuf Technol 47:867–877
Fang F, Liu Y (2004) On minimum exit-burr in micro cutting. J Micromech Microeng 14(7):984–988
Moriya T, Nakamoto K, Ishida T, Takeuchi Y (2010) Creation of v-shaped microgrooves with flat-ends by 6-axis control ultraprecision machining. CIRP Ann Manuf Technol 59(1):61–66
Takeuchi Y, Murota M, Kawai T, Sawada K (2003) Creation of flat-end V-shaped microgrooves by nonrotational cutting tools. CIRP Ann Manuf Technol 52(1):41–44
Wang SJ, To S, Chen X, Wang H, Xia HJ (2014) A study of the fabrication of v-groove structure in ultra-precision milling. Int J Comput Integr Manuf 27(11):986–996
Wang SJ, Chen X, To S, Ouyang XB, Liu Q, Liu JW, Lee WB (2015) Effect of cutting parameters on heat generation in ultra-precision milling of aluminum alloy 6061. Int J Adv Manuf Technol 80:1265–1275
Fiocchi AA, Fortulan CA, De Angelo Sanchez LE (2015) Ultra-precision face grinding with constant pressure, lapping kinematics, and SiC grinding wheels dressed with overlap factor. Int J Adv Manuf Technol 79:1531–1543
Butler-Smith PW, Axinte DA, Daine M (2011) Ordered diamond micro-arrays for ultra-precision grinding—an evaluation in Ti–6Al–4V. Int J Mach Tool Manu 51:54–66
Guo B, Zhao QL, Fang XY (2014) Precision grinding of optical glass with laser micro-structured coarse-grained diamond wheels. J Mater Process Technol 214:1045–1051
Zhao QL, Guo B (2015) Ultra-precision grinding of optical glasses using mono-layer nickelelectro plated coarse-grained diamond wheels. Part 2: investigation of profile and surface grinding. Int J Precis Eng Manuf 39:67–78
Tönshoff HK, Schmieden WV, Inasaki I, König W, Spur G (1990) Abrasive machining of silicon. Ann CIRP 39(2):621–635
Blake PN, Scattergood RO (1990) Ductile regime machining of germanium and silicon. J Am Chem Soc 73:949–957
Zhang B, Howes TD (1994) Material-removal mechanisms in grinding ceramics. CIRP Ann Manuf Technol 43(1):305–308
Li Z, Zhang F, Zhang Y, Luo X (2017) Experimental investigation on the surface and subsurface damages characteristics and formation mechanisms in ultra-precision grinding of SiC. Int J Adv Manuf Technol 92:2677–2688
Yu T, Li H, Wang W (2016) Experimental investigation on grinding characteristics of optical glass BK7: with special emphasis on the effects of machining parameters. Int J Adv Manuf Technol 82:1405–1419
Wang H, Chen H, Fu G, Xiao H (2016) Relationship between grinding process and the parameters of subsurface damage based on the image processing. Int J Adv Manuf Technol 83:1707–1715
Gu W, Yao Z, Liang X (2011) Material removal of optical glass BK7 during single and double scratch tests. Wear 270(3):241–246
Wang C, Chen J, Fang Q, Liu F, Liu Y (2016) Study on brittle material removal in the grinding process utilizing theoretical analysis and numerical simulation. Int J Adv Manuf Technol 87:2603–2614
Liu YM, Warkentin A, Bauer R, Gong YD (2013) Investigation of different grain shapes and dressing to predict surface roughness in grinding using kinematic simulations. Precis Eng 37(3):758–764
Jin Y, Chen J (2017) Experimental investigation on surface generation mechanism of micro-grinding of hard brittle crystal materials. Int J Adv Manuf Technol 91:3953–3965
Su Y, Lin B, Cao Z (2018) Prediction and verification analysis of grinding force in the single grain grinding process of fused silica glass. Int J Adv Manuf Technol. https://doi.org/10.1007/s00170-018-1643-4
Wu C, Li B, Yang J, Liang Steven Y (2016) Prediction of grinding force for brittle materials considering co-existing of ductility and brittleness. Int J Adv Manuf Technol 87:1967–1975
Wang CC, Fang QH, Chen JB, Liu YW, Jin T (2016) Subsurface damage in high-speed grinding of brittle materials considering kinematic characteristics of the grinding process. Int J Adv Manuf Technol 83(5):937–948
Schinker MG (1991) Subsurface damage mechanisms at high speed ductile machining of optical glasses. J Prec Eng 13:208–218
Chen J, Xu J, Wang C (2017) Experimental investigation of subsurface damage of optical glass in precision grinding using a brittle material removal fraction. Int J Adv Manuf Technol 90:725–730
Alao AR, Konneh M (2012) Surface finish prediction models for precision grinding of silicon. Int J Adv Manuf Technol 58:949–967
Chen B, Guo C, Zhao Q (2015) An investigation into parallel and cross grinding of aspheric surface on monocrystal silicon. Int J Adv Manuf Technol 80:737–746
Zhang L, Xie J, Guo RB, Wu KK, Li P, Zheng JH (2016) Precision and mirror micro-grinding of micro-lens array on macro-freeform glass substrate for micro-photovoltaic performances. Int J Adv Manuf Technol 86:87–96
Guo B, Zhao Q, Jackson Mark J (2013) Precision grinding of binderless ultrafine tungsten carbide (WC) microstructured surfaces. Int J Adv Manuf Technol 64:727–735
Wang Z, Guo J (2015) Research on an optimized machining method for parallel grinding of f-θ optics. Int J Adv Manuf Technol 80:1411–1419
Koichi K, Yukiyasu N (2006) Newly products ultra-precision surface grinding machine and grinding techniques. J Jpn Soc Abras Technol 50:377–380
Nicholas DJ, Boon JE (1981) The generation of high precision aspherical surfaces in glass by CNC machining. J Phys D Appl Phys 14:593–600
Corbett J, Morantz P, Stephenson DJ, Read RF (2002) An advanced ultraprecision face grinding machine. Int J Adv Manuf Technol 20:639–648
Ruckman J, Fess E, Li Y (1991) Contour mode deterministic micro-grinding. Proc 14th Ann Meeting of ASPE 20:542–546
Zheng Y, Duan J (2011) Materials and fabrication issues of micro V-groove for optoelectronics packaging. Adv Mater Res 295–297:1330–1334
Funding
This study is funded by the Joint Funds of National Natural Science Foundation of China (U160120189) and Guangdong Innovative Research Team Program (201001G0104781202). It is also funded by Guangdong Provincial Project (2015B090921007, 2015A030312008, 2015B010104006).
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Wang, S.J., Chen, X., Liu, Q. et al. Development of a precision grinding machine system for the fabrication of micro V-grooves array. Int J Adv Manuf Technol 97, 2141–2150 (2018). https://doi.org/10.1007/s00170-018-2042-6
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DOI: https://doi.org/10.1007/s00170-018-2042-6