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On-machine self-calibration method for compensation during precision fabrication of 900-mm-diameter zerodur aspheric mirror

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Abstract

An effective on-machine self-calibration compensation grinding method for the fabrication of a 900-mm-diameter zerodur aspheric mirror is presented in this paper. The proposed independent on-machine measuring system consists of a linear motion and a Heidenhain CT60 length gauge. Measurement errors caused by the length gauge’s tilt angle and offset would decrease the compensation grinding accuracy. The length gauge tilt angle and offset could be determined by using the workpiece itself, as the ground workpiece has excellent symmetry and small axial runout values. Three points on the workpiece concentric circle are sampled to determine the tilt angle. Multiple points along the X-axis are also sampled to determine the offset between the length gauge probe and the workpiece grinding center. Trial measurement experiment of the 180-mm K9 workpiece showed an excellent coherence with the PGI1250 measuring results. Based on the proposed self-calibration method, the raw measured profile error curve is firstly smoothened and then spline fitted to generate the compensated grinding path. The grinding experiment indicated that the profile error could be improved to be less than 5 μm from 40 μm for the 900-mm zerodur mirror after four compensation grinding cycles.

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References

  1. Shore P, Cunningham C, DeBra D, Evans C, Hough J, Gilmozzi R, Kunzmann H, Morantz P, Tonnellier X (2010) Precision engineering for astronomy and gravity science. CIRP Ann 59:694–716

    Article  Google Scholar 

  2. Brinksmeier E, Mutlugünesa Y, Klocke F, Aurich JC, Shore P, Ohmori H (2010) Ultra-precision grinding. CIRP Ann 59:652–671

    Article  Google Scholar 

  3. Comley P, Morantz P, Shore P, Tonnellier X (2011) Grinding meter scale mirror segments for the E-ELT ground based telescope. CIRP Ann 60:379–382

    Article  Google Scholar 

  4. Chen GS, Mei XS, Li HL (2013) Geometric error modeling and compensation for large-scale grinding machine tools with multi-axes. Int J Adv Manuf Technol 69:2583–2592

    Article  Google Scholar 

  5. Rahman MS, Saleh T, Lim HS, Son SM, Rahman M (2008) Development of an on-machine profile measurement system in ELID grinding for machining aspheric surface with software compensation. Int J Mach Tools Manuf 48:887–895

    Article  Google Scholar 

  6. Young HT, Chen DJ (2006) Online dressing of profile wheels. Int J Adv Manuf Technol 27:883–888

    Article  Google Scholar 

  7. Huang H, Chen WK, Kuriyagawa T (2007) Profile error compensation approaches for parallel nanogrinding of aspherical mould inserts. Int J Mach Tools Manuf 47:2237–2245

    Article  Google Scholar 

  8. Cheng HB, Feng ZJ, Cheng K, Wang YW (2005) Design of a six-axis high precision machine tool and its application in machining aspherical optical mirrors. Int J Mach Tools Manuf 45:1085–1094

    Article  Google Scholar 

  9. Lee WB, Cheung CF, Chiu WM, Leung TP (2000) An investigation of residual form error compensation in the ultra-precision machining of aspheric surfaces. J Mater Process Technol 99:129–134

    Article  Google Scholar 

  10. Yin SH, Morita S, Ohmori H, Uehara Y, Lin WM, Liu Q, Maihara T, Iwamuro F, Mochida D (2005) ELID precision grinding of large special Schmidt plate for fibre multi-object spectrograph for 8.2 m Subaru telescope. Int J Mach Tools Manuf 45:1598–1604

    Article  Google Scholar 

  11. Chen FJ, Yin SH, Ohmori H, Yu JW (2013) Form error compensation in single-point inclined axis nanogrinding for small aspheric insert. Int J Adv Manuf Technol 65:433–441

    Article  Google Scholar 

  12. Leadbeater PB, Clarke M, Wills-Moren WJ, Wilsonf TJ (1989) A unique machine for grinding large, off-axis optical components: the OAGM 2500. Precis Eng 11:191–196

    Article  Google Scholar 

  13. Zhang YH, Wang LH, Ma CX, Wu Q, Hu DJ (2008) A new digital measurement for accurate curve grinding process. Int J Adv Manuf Technol 36:305–314

    Article  Google Scholar 

  14. Shimizu Y, Goto S, Lee JC, Ito S, Gao W, Adachi S, Omiya K, Sato H, Hisada T, Saito Y, Kubota H (2013) Fabrication of large-size SiC mirror with precision aspheric profile for artificial satellite. Precis Eng 37:640–649

    Article  Google Scholar 

  15. Chen FJ, Yin SH, Huang H, Ohmori H, Wang Y, Fan YF, Zhu YJ (2010) Profile error compensation in ultra-precision grinding of aspheric surfaces with on-machine measurement. Int J Mach Tools Manuf 50:480–486

    Article  Google Scholar 

  16. Lin XH, Wang ZZ, Guo YB, Peng YF, Hu CL (2014) Research on the error analysis and compensation for the precision grinding of large aspheric mirror surface. Int J Adv Manuf Technol 71:233–239

    Article  Google Scholar 

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Authors and Affiliations

  1. State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an, Shaanxi, China

    B. Li, H. Y. Zhao, J. P. Xi & D. X. Ren

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  1. B. Li
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  2. H. Y. Zhao
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  3. J. P. Xi
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  4. D. X. Ren
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Correspondence to B. Li.

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Li, B., Zhao, H.Y., Xi, J.P. et al. On-machine self-calibration method for compensation during precision fabrication of 900-mm-diameter zerodur aspheric mirror. Int J Adv Manuf Technol 76, 1855–1863 (2015). https://doi.org/10.1007/s00170-014-6413-3

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  • DOI: https://doi.org/10.1007/s00170-014-6413-3

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