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Other Nanomanufacturing Principles and Technological Breakthroughs

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Fundamental Research on Nanomanufacturing

Part of the book series: Reports of China’s Basic Research ((RCBR))

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Abstract

Focusing on the core research goals of nanoprecision manufacturing, nanoscale manufacturing, and cross-scale manufacturing in nanomanufacturing, this Major Research Plan is aimed at subdivided areas such as nanomaterial manufacturing, special nanoprocessing methods, nanodevice integrated manufacturing, and nanometering and measurement. The corresponding layout and project support have been achieved, and breakthroughs in principles and methods have been achieved, providing support for the overall development of China’s nanomanufacturing field.

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Author information

Authors and Affiliations

  1. Xi’an Jiaotong University, Xi’an, Shaanxi, China

    Bingheng Lu

  2. Tsinghua University, Beijing, China

    Jianbin Luo

  3. Xiamen University, Xiamen, Fujian, China

    Zhongqun Tian

  4. Dalian University of Technology, Dalian, Liaoning, China

    Dongming Guo

  5. Huazhong University of Science and Technology, Wuhan, Hubei, China

    Han Ding

  6. Institute of Physics, Chinese Academy of Sciences, Beijing, China

    Changzhi Gu

  7. Tianjin University, Tianjin, China

    Zhihong Li

  8. School of Microelectronics, University of Science and Technology of China, Hefei, Anhui, China

    Ming Liu

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  1. Bingheng Lu
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  2. Jianbin Luo
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  3. Zhongqun Tian
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  4. Dongming Guo
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  5. Han Ding
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  6. Changzhi Gu
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  8. Ming Liu
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Corresponding author

Correspondence to Bingheng Lu .

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  1. Xi'an Jiaotong University, Xi'an, Shaanxi, China

    Bingheng Lu

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Lu, B. et al. (2023). Other Nanomanufacturing Principles and Technological Breakthroughs. In: Lu, B. (eds) Fundamental Research on Nanomanufacturing. Reports of China’s Basic Research. Springer, Singapore. https://doi.org/10.1007/978-981-19-8975-9_7

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  • DOI: https://doi.org/10.1007/978-981-19-8975-9_7

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  • Publisher Name: Springer, Singapore

  • Print ISBN: 978-981-19-8974-2

  • Online ISBN: 978-981-19-8975-9

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