Abstract
In vibrating structures like resonators, various intrinsic and extrinsic energy dissipation mechanisms exist which limit the maximum achievable quality factor. Among the different types of energy losses, damping caused by thermoelastic effect is a crucial mechanism which arises due to the interaction among thermal and mechanical fields. Thermoelastic damping (TED) limits the maximum attainable quality factor (QTED), and coupling between the strain and temperature fields varies with temperature. In this paper, the effects of temperature on energy dissipation due to TED in a simply supported rectangular microplate resonator is analyzed. When the devices are downsized, size effects should be incorporated, and instead of classical elasticity theories, modified couple stress theory (MCST) is applied to investigate the energy dissipations. The impact of temperature on energy dissipation with and without size effects is investigated by incorporating a length scale parameter (l) which is made dimensionless by dividing it by the plate thickness (l/h). The influence of temperature on QTED in rectangular microplates with and without size effects is analyzed using various structural materials (polySi, SiC, GaAs, diamond, and Si). The thermoelastic energy dissipation seems to be increased with rise in temperature, and with the incorporation of size scaling, owing to the impact of dimensionless length scale parameter, even at elevated temperatures, high QTED is achieved. Thermoelastic energy dissipation in rectangular plate is analyzed by pertaining MCST, and the impact of temperature on energy loss with size effects using l/h is numerically simulated using MATLAB 2015.
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References
Unlu, M., Hashemi, M., Berry, C.W., Li, S., Yang, S.H., Jarrahi, M.: Switchable scattering meta-surfaces for broadband terahertz modulation. Nat. Sci. Rep. 4, 5708 (2014)
Rebeiz, G.M.: RF MEMS. Wiley-Blackwell, Hoboken (2003)
Srikar, V.T., Swan, A.K., Ünlü, M.S., Goldberg, B.B., Spearing, S.M.: Micro-Raman measurement of bending stresses in micromachined silicon flexures. J. Microelectromech. Syst. 12(6), 779–788 (2003)
Duwel, R.N., Candler, T.W., Varghese, K.M.: Engineering MEMS resonators with low thermoelastic damping. J. Microelectromech. Syst. 15(6), 1437–1445
Kim, S.-B., Kim, J.-H.: Quality factors for the nano-mechanical tubes with thermoelastic damping and initial stress. J. Sound Vibr. 330, 1393–1402 (2011)
Zener, C.: Internal friction in solids. I. Theory of internal friction in reeds. Phys. Rev. 52(3):230–235 (1937)
Zener, C.: Internal friction in solids II. General theory of thermoelastic internal friction. Phys. Rev. 53(1), 90–99 (1938)
Lifshitz, R., Roukes, M.L.: Thermoelastic damping in micro-and nanomechanical systems. Phys. Rev. B 61(8), 5600 (2000)
Zuo, W., Li, P., Zhang, J., Fang, Y.: Analytical modeling of thermoelastic damping in bilayered microplate resonators. Int. J. Mech. Sci. 106, 128–137 (2016)
Resmi, R., Suresh Babu, V., Baiju, M.R.: Analysis of thermoelastic damping limited quality factor and critical dimensions of circular plate resonators based on axisymmetric and non-axisymmetric vibrations. AIP Adv. 11, 035108 (2021). https://doi.org/10.1063/5.0033087
Nayfe, A.H., Younis, M.I.: Modeling and simulations of thermoelastic damping in microplates. J. Micromech. Microeng. 14(12), 1711–1717 (2004)
Yang, F., Chong, A., Lam, D.C.C., Tong, P.: Couple stress based strain gradient theory for elasticity. Int. J. Solids Struct. 39(10), 2731–2743 (2002)
Park, S.K., Gao, X.-L.: Bernoulli-Euler beam model based on a modified couple stress theory. J. Micromech. Microeng. 16, 2355–2359 (2006)
Razavilar, R., Alashti, R.A., Fathi, A.: Investigation of thermoelastic damping in rectangular microplate resonator using modified couple stress theory. Int. J. Mech. Mater. Des. 12(1), 39–51 (2016)
Resmi, R., Baiju, M.R., Suresh Babu, V.: Thermoelastic damping dependent quality factor analysis of rectangular plates applying modified coupled stress theory. AIP Conf. Proc. 2166, 020029 (2019). https://doi.org/10.1063/1.5131616
Zhong, Z.Y., Zhang, W.M., Meng, G., Wang, M.Y.: Thermoelastic damping in the size-dependent microplate resonators based on modified couple stress theory. J. Microelectromech. Syst. 24(2), 431–445 (2015)
Fang, Y., Li, P., Zhou, H., Zuo, W.: Thermoelastic damping in rectangular microplate resonators with three- dimensional heat conduction. Int. J. Mech. Sci. 133, 578–589 (2017)
Borjalilou, V., Asghari, M.: Small-scale analysis of plates with thermoelastic damping based on the modified couple stress theory and the dual-phase-lag heat conduction model. Springer-Verlag GmbH Austria, part of Springer Nature 2018. https://doi.org/10.1007/s00707-018-2197-0
Resmi, R., Suresh Babu, V., Baiju, M.R.: Impact of dimensionless length scale parameter on material dependent thermoelastic attenuation and study of frequency shifts of rectangular microplate resonators. In: 2021 IOP Conference Series: Materials Science and Engineering, vol. 1091, p. 012067
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Resmi, R., Babu, V.S., Baiju, M.R. (2022). Analysis of Temperature Impacts on Material-Dependent Thermoelastic Damping in Simply Supported Rectangular Microplate Resonators Applying Size Effects. In: Pandian, A.P., Fernando, X., Haoxiang, W. (eds) Computer Networks, Big Data and IoT. Lecture Notes on Data Engineering and Communications Technologies, vol 117. Springer, Singapore. https://doi.org/10.1007/978-981-19-0898-9_48
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DOI: https://doi.org/10.1007/978-981-19-0898-9_48
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