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Tool-Servo Driven Diamond Turning for Structured Surface

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Micro and Nano Fabrication Technology

Part of the book series: Micro/Nano Technologies ((MNT,volume 1))

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Abstract

Structured surfaces are increasingly demanded in many fields. Ultraprecision cutting is an effective method for machining structured surfaces with high form accuracy, surface quality, and flexibility of geometry. In recent years, tool-servo driven diamond turning has been focused, because it can greatly reduce the machining time for structured surfaces compared to other methods. However, unlike in conventional diamond turning, the tool posture and cutting behavior in tool-servo driven diamond turning change significantly with time. Thus, the machining mechanism becomes very complicated, especially for brittle materials. In this chapter, after the recent advances in tool-servo driven diamond turning technology have been overviewed, the fabrication process of microlens arrays on single-crystal silicon by slow tool servo (STS) driven diamond turning will be introduced. The fundamental machining mechanisms including the brittle fracture and phase transformation of silicon will be discussed, and the feasibility of ductile mode cutting will be demonstrated. In STS, machining of microlens arrays with sharp edges, the follow-up error of the machine tool is a potential problem. To reduce the follow-up error, a new method named segment turning method was proposed. From the results of both cutting tests and theoretical analysis, the effectiveness of the proposed method will be examined. Hexagonal microlens arrays of silicon have been successfully machined with a form error less than 300 nmPV and surface roughness less than 5 nmSa.

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Authors and Affiliations

  1. Department of Mechanical Engineering, Faculty of Science and Technology, Keio University, Yokohama, Japan

    Mao Mukaida & Jiwang Yan

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  1. Mao Mukaida
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  2. Jiwang Yan
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Correspondence to Jiwang Yan .

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Editors and Affiliations

  1. Department of Mechanical Engineering, Keio University Department of Mechanical Engineering, Yokohama, Japan

    Jiwang Yan

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Mukaida, M., Yan, J. (2018). Tool-Servo Driven Diamond Turning for Structured Surface. In: Yan, J. (eds) Micro and Nano Fabrication Technology. Micro/Nano Technologies, vol 1. Springer, Singapore. https://doi.org/10.1007/978-981-10-6588-0_7-2

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  • DOI: https://doi.org/10.1007/978-981-10-6588-0_7-2

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  • Publisher Name: Springer, Singapore

  • Print ISBN: 978-981-10-6588-0

  • Online ISBN: 978-981-10-6588-0

  • eBook Packages: Springer Reference EngineeringReference Module Computer Science and Engineering

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Chapter history

  1. Latest

    Tool-Servo Driven Diamond Turning for Structured Surface
    Published:
    18 April 2018

    DOI: https://doi.org/10.1007/978-981-10-6588-0_7-2

  2. Original

    Tool-Servo Driven Diamond Turning for Structured Surface
    Published:
    27 February 2018

    DOI: https://doi.org/10.1007/978-981-10-6588-0_7-1

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