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Micro Electrochemical Machining

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Micro and Nano Fabrication Technology

Part of the book series: Micro/Nano Technologies ((MNT,volume 1))

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Abstract

Electrochemical machining (ECM) is a machining method with a long history, especially applied in parts manufacturing in airplane and automobile industries. Although the advantages of ECM are very clear and attractive compared to other machining methods, its lower machining accuracy and bad environmental impact hindered the expansion of its application. Due to realization of micro ECM by using ultrashort voltage pulse with a width of several tens of nanoseconds, reported in 2000, electrochemical machining came to be noted again. In addition, other new technologies such as ECM by vibrating tool electrode and detoxification of electrolytic waste were developed for industrial application. In this chapter, after the outline and features of electrochemical machining is explained, the mechanism of anodic dissolution and ECM model are briefly introduced. Then, some up-to-date ECM researches and technologies, especially in micro ECM with ultrashort pulse and wire ECM, and electrolyte jet machining are introduced. After the explanation of the principle and method to generate complicated shapes by superimposing simple patterns with electrolyte jet machining, the outlook and vision of ECM technologies in future are described.

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Correspondence to Wataru Natsu .

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Natsu, W. (2018). Micro Electrochemical Machining. In: Yan, J. (eds) Micro and Nano Fabrication Technology. Micro/Nano Technologies, vol 1. Springer, Singapore. https://doi.org/10.1007/978-981-10-6588-0_26-1

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  • DOI: https://doi.org/10.1007/978-981-10-6588-0_26-1

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  • Publisher Name: Springer, Singapore

  • Print ISBN: 978-981-10-6588-0

  • Online ISBN: 978-981-10-6588-0

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