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Thermal Desorption Spectroscopy

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Compendium of Surface and Interface Analysis

Abstract

TDS is a method for the study of adsorption, desorption, and reaction of adsorbed atoms or molecules on surfaces by measuring the desorption rate of desorbing gas from surfaces as a function of sample temperature. The basic concept of this method is that adsorbates with a higher desorption barrier desorb at higher temperature.

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Authors and Affiliations

  1. Institute of Industrial Science, The University of Tokyo, Tokyo, Japan

    Shohei Ogura & Katsuyuki Fukutani

Authors
  1. Shohei Ogura
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  2. Katsuyuki Fukutani
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Correspondence to Shohei Ogura .

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Editors and Affiliations

  1. Tokyo, Japan

    The Surface Science Society of Japan

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Ogura, S., Fukutani, K. (2018). Thermal Desorption Spectroscopy. In: The Surface Science Society of Japan (eds) Compendium of Surface and Interface Analysis. Springer, Singapore. https://doi.org/10.1007/978-981-10-6156-1_116

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