Abstract
When the linearly polarized light is reflected from a clean surface or a surface covered by a thin film, its polarization changes and the light becomes elliptically polarized. Ellipsometry measures this change in the polarization state of light upon reflection from a surface (Azzam, Bashara in Ellipsometry and Polarized Light. North Holland, Amsterdam, 1987 [1]; Tompkins, Irene in Handbook of Ellipsometre. New York, 2005 [2]). As a result of the measurement, ellipsometric angles Ψ & Δ are obtained.
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References
Azzam, R.M.A., Bashara, N.M.: Ellipsometry and Polarized Light, North Holland, Amsterdam (1987)
Tompkins, H.G., Irene, E.A.: Handbook of Ellipsometry, Willian Andrew, New York (2005)
Aspnes D.E.: Handbook of Optical Constants of Solids, chapter 5, 104 (1985)
Hirakawa, S., Nabatova-Gabain, N., Wasai, Y., Iida, H.: HORIBA Technical Reports English edition, 19, vol. 5 (2003)
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Moriyama, T. (2018). Spectroscopic Ellipsometry. In: The Surface Science Society of Japan (eds) Compendium of Surface and Interface Analysis. Springer, Singapore. https://doi.org/10.1007/978-981-10-6156-1_100
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DOI: https://doi.org/10.1007/978-981-10-6156-1_100
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