Abstract
Resonant sensors have established themselves in the market place, usually in applications that require high resolution, for measuring physical and chemical phenomena. The electronics for collocated and self-sensing piezoelectric resonators are described as they are important components in resonant sensor design. The applicability of the closed-loop electronics and self-sensing electronics to the cantilever-based piezo actuated/sensed resonant sensor for measuring the thickness and DC current is presented.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
Stemme G (1991) Resonant silicon sensors. J Micromech Microeng 1(2):113–125
Yan T, Jones BE, Rakowski RT, Tudor MJ, Beeby SP, White NM (2004) Design and fabrication of thick-film PZT-metallic triple beam resonators. Sens Actuators, A 115:401–407
Uma G, Umapathy M, Suneel Kumar K, Suresh K, Maria Josephine A (2009) Microcontroller based split mass resonant sensor for absolute and differential sensing. J Smart Struct Syst 5(3)
Dosch JJ, Inman DJ, Garcia E (1992) A self-sensing piezoelectric actuator for collocated control. J Intell Mater Syst Struct 3:166–185
Simmers GE, Hodgkins JR, Mascarenas DD, Park G, Sohn H (2004) Improved piezoelectric self-sensing actuation. J Intell Mater Syst Struct 15:941–953
Bentley JP (2005) Principles of measurement systems, 4th edn. Pearson Education Limited, England
Suresh K, Uma G, Santhosh BVMP, Kumar U, Varun Kumar M, Umapathy (2011) Piezoelectric based resonant mass sensor using phase measurement. Measurement 44(2):320–325
UmaG , Umapathy M, Maria Josephine A, Aishwarya S, Suresh K (2008) Design of microcontroller based resonant sensor with piezoelectric excitation and detection. J Instrum Sci Technol 36(4)
Reza Moheimani SO (2000) Experimental verification of the corrected transfer function of a piezoelectric laminate beam. IEEE Trans Control Syst Technol 8(4):525–530
Steidel RF (1998) An introduction to mechanical vibration, 3rd edn. Wiley, New York (ISBN-0470-82091-1)
Franco S (2002) Design with operational amplifiers and analog integrated circuits. Tata McGraw-Hill, 3rd edn. Wiley, New York (ISBN 0-07-053044-0)
Suresh K, Uma G, Umapathy M (2013) New observation on automatic phase adjustment of smart cantilever resonator. J Vib Control. doi:10.1177/1077546313497244 published on July 31
Suresh K, Uma G, Umapathy M (2012) A new self sensing electronics for piezoelectric resonance sensors. J Intell Mater Syst Struct 23(5):587–593
Park G, Inman DJ (2007) Structural health monitoring using piezoelectric impedance measurements. Philos Trans R So A 365:373–392
Suresh K, Uma G, Umapathy M (2012) Design of resonance based mass sensor using self sensing piezoelectric actuator. Smart Mater Struct 21:025015
Challa VR, Prasad MG, Shi Y, Fisher FT (2008) A vibration energy harvesting device with bidirectional resonance frequency tunability. Smart Mater Struct 17:015035
Sodano HA, Bae J-S, Inman DJ (2006) Improved concept and model of Eddy current damper. Trans ASME 294:128
Suresh K, Uma G, Umapathy M (2011) A new resonance based method for the measurement of non magnetic conducting sheet thickness. IEEE Trans Instrum Meas 60(12):3892–3897
Leland ES, Wright PK, White RM (2009) A MEMS AC current sensor for residential and commercial electricity end—use monitoring. J Micromech Microeng 19:094018
Santhosh Kumar BVMP, Suresh K, Varun Kumar U, Uma G, Umapathy M (2010) Design and simulation of resonance based DC current sensor. Int J Interact Multiscale Mech 3(3)
Ziegler S, Woodward RC, Ho-Ching Iu H (2009) Current sensing techniques: a review. IEEE Sens J 9(4):354–376
Santhosh Kumar BVMP, Suresh K, Varun Kumar U, Uma G, Umapathy M (2011) Resonance based DC current sensor. Measurement 45(3):369–374
Acknowledgments
The authors would like to thank Dr. V.K.Aatre and his team for their continuous support and encouragement to work in the area of smart materials and MEMS. They would also like to thank the team members of NPSM and NPMASS for sanctioning the project: “Establishment of new national MEMS design centers (Project No: 2:10)”.
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2014 Springer India
About this chapter
Cite this chapter
Umapathy, M., Uma, G., Suresh, K. (2014). Electronic Circuits for Piezoelectric Resonant Sensors. In: Vinoy, K., Ananthasuresh, G., Pratap, R., Krupanidhi, S. (eds) Micro and Smart Devices and Systems. Springer Tracts in Mechanical Engineering. Springer, New Delhi. https://doi.org/10.1007/978-81-322-1913-2_26
Download citation
DOI: https://doi.org/10.1007/978-81-322-1913-2_26
Published:
Publisher Name: Springer, New Delhi
Print ISBN: 978-81-322-1912-5
Online ISBN: 978-81-322-1913-2
eBook Packages: EngineeringEngineering (R0)