Abstract
Low Temperature Co-fired Ceramic (LTCC) technology is evolving. New materials now offer improved embedded passive components and kindle hope of integrating devices never before imagined. This rediscovery of LTCC is making it an important vehicle for systems integration. This chapter explores the current status of embedded capacitors and inductors in LTCC, providing a glimpse of the improved materials being developed. Investigations on materials for integrated nonreciprocal devices, such as, circulators and isolators are also discussed. For the first time, we report materials development for integrated solid oxide fuel cells within LTCC structures, opening up a new area of integrated power sources, hitherto unexplored.
Vivek Rane—Contributor for Materials for Integrated Ferrites.
Varsha Chaware—Contributor for Integrated Capacitors materials.
Shrikant Kulkarni—Contributor for integrated SOFC materials.
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Notes
- 1.
The glass composition is under patenting process.
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Acknowledgments
The authors gratefully acknowledge generous funding from NPSM for the project “Technology Demonstration of Multilayer LTCC Packages for MEMS Application” (PARC#3.2), NPMASS and Department of Electronics and Information Technology (DeitY), Govt. of India, for the project “Development of Advanced Processing Capabilities in LTCC” (PARC#2.14) and NPMASS for the Project “AMC and Spares for the MEMS fab equipment at C-MET, Pune” (PARC#2.6). The authors are extremely thankful to Dr. V. K. Aatre, Former advisor to Raksha Mantri, Govt. of India, for constant support and encouragement.
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Rane, V., Chaware, V., Kulkarni, S., Duttagupta, S., Phatak, G. (2014). Materials for Embedded Capacitors, Inductors, Nonreciprocal Devices, and Solid Oxide Fuel Cells in Low Temperature Co-fired Ceramic. In: Vinoy, K., Ananthasuresh, G., Pratap, R., Krupanidhi, S. (eds) Micro and Smart Devices and Systems. Springer Tracts in Mechanical Engineering. Springer, New Delhi. https://doi.org/10.1007/978-81-322-1913-2_17
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DOI: https://doi.org/10.1007/978-81-322-1913-2_17
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