Abstract
Nanoimprint lithography (GlossaryTerm
NIL
) is an emerging high-resolution parallel patterning method, mainly aimed towards fields in which electron-beam and high-end photolithography are costly and do not provide sufficient resolution at reasonable throughput. In a top-down approach, a surface pattern of a stamp is replicated in a material by mechanical contact and three-dimensional material displacement. This can be done by shaping a liquid followed by a curing process for hardening, by variation of the thermomechanical properties of a film by heating and cooling, or by any other kind of shaping process using the difference in hardness of a mold and a moldable material. The local thickness contrast of the resulting thin molded film can be used as a means to pattern an underlying substrate at the wafer level by standard pattern transfer methods, but also directly in applications where a bulk modified functional layer is needed. This makes NIL a promising technique for high-volume manufacturing of nanostructured components. At present, structures with feature sizes smaller than 5 nm have been realized, and the resolution is limited by the ability to manufacture the stamp relief. For historical reasons, the term nanoimprint lithography refers to a hot embossing process (thermal NIL). In ultraviolet (GlossaryTermUV
) NIL, a photopolymerizable resin is used together with a UV-transparent stamp. In both processes thin-film squeeze flow and capillary action play a central role in understanding the NIL process. In this chapter we will give an overview of NIL, with emphasis on general principles and concepts rather than specific process issues and state-of-the-art tools and processes. Material aspects of stamps and resists are discussed. Specific applications are presented, where imprint methods have significant advantages over other structuring methods. We conclude by discussing the areas where further development in this field is required.Access this chapter
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References
E. Berliner: Gramophone, US Patent 372786 (1887)
K.C. Pohlmann: The Compact Disc Handbook, Computer Music and Digital Audio Series, Vol. 5, 2nd edn. (A-R Editions, Madison 1992)
H. Schift, C. David, M. Gabriel, J. Gobrecht, L.J. Heyderman, W. Kaiser, S. Köppel, L. Scandella: Nanoreplication in polymers using hot embossing and injection molding, Microelectron. Eng. 53, 171–174 (2000)
S.Y. Chou, P.R. Krauss: Imprint lithography with sub-10 nm feature size and high throughput, Microelectron. Eng. 35, 237–240 (1997)
R.W. Jaszewski, H. Schift, J. Gobrecht, P. Smith: Hot embossing in polymers as a direct way to pattern resist, Microelectron. Eng. 41/42, 575–578 (1998)
Y. Xia, G.M. Whitesides: Soft lithography, Angew. Chem. Int. 37, 550–575 (1998)
B. Michel, A. Bernard, A. Bietsch, E. Delamarche, M. Geissler, D. Juncker, H. Kind, J.-P. Renault, H. Rothuizen, H. Schmid, P. Schmidt-Winkel, R. Stutz, H. Wolf: Printing meets lithography: Soft approaches to high-resolution, IBM J. Res. Dev. 45(5), 697–719 (2001)
H. Schift: Nanoimprint lithography: An old story in modern times? A review, J. Vac. Sci. Technol. B 26(2), 458–480 (2008)
H. Schift (Ed.): NaPa Library of Processes, http://www.psi.ch/lmn/helmut-schift (2014), 3rd edn.
H. Schift: Nanoimprint lithography: 2-D or not 2-D? A review, Appl. Phys. A 121(2), 415–435 (2015)
H. Schift, P. Urwyler, P.M. Kristiansen, J. Gobrecht: Nanoimprint lithography process chains for the fabrication of micro- and nanodevices, J. Micro/Nanolith. MEMS MOEMS 13(3), 031303 (2014)
B.W. Smith, K. Suzuki (Eds.): Science and Technology, Microlithography, 2nd edn. (CRC, Boca Raton 2007)
ITRS: International Technology Roadmap for Semiconductors, http://itrs2.net
H. Moore: Cramming more components onto integrated circuits with unit cost falling as the number of components per circuit rises, Electronics 38(8), 114–117 (1965)
S.Y. Chou, P.R. Krauss, P.J. Renstrom: Imprint of sub-25 nm vias and trenches in polymers, Appl. Phys. Lett. 67(21), 3114–3116 (1995)
S. Fujimori: Fine pattern fabrication by the molded mask method (nanoimprint lithography) in the 1970s, Jpn. J. Appl. Phys. 48, 06FH01 (2009)
S.Y. Chou, P.R. Krauss, P.J. Renstrom: Nanoimprint lithography, J. Vac. Sci. Technol. B 14(6), 4129–4133 (1996)
L. Baraldi, R. Kunz, J. Meissner: High-precision molding of integrated optical structures, Proc. SPIE 1992, 21–29 (1993)
L.J. Heyderman, H. Schift, C. David, J. Gobrecht, T. Schweizer: Flow behaviour of thin polymer films used for hot embossing lithography, Microelectron. Eng. 54, 229–245 (2000)
H. Schulz, M. Wissen, N. Bogdanski, H.-C. Scheer, K. Mattes, C. Friedrich: Impact of molecular weight of polymers and shear rate effects for nanoimprint lithography, Microelectron. Eng. 83, 259–280 (2006)
J. Haisma, M. Verheijen, K. van den Heuvel, J. van den Berg: Mold-assisted lithography: A process for reliable pattern replication, J. Vac. Sci. Technol. B 14, 4124–4128 (1996)
M. Colburn, S. Johnson, M. Stewart, S. Damle, T. Bailey, B. Choi, M. Wedlake, T. Michealson, S.V. Sreenivasan, J. Ekerdt, C.G. Willson: Step and flash imprint lithography: A new approach to high-resolution patterning, Proc. SPIE 3676, 379–389 (1999)
D.J. Resnick, W.J. Dauksher, D. Mancini, K.J. Nordquist, T.C. Bailey, S. Johnson, N. Stacey, J.G. Ekerdt, C.G. Willson, S.V. Sreenivasan, N. Schumaker: Imprint lithography: Lab curiosity or the real NGL?, Proc. SPIE 5037, 12–23 (2003)
D.J. Resnick, S.V. Sreenivasan, C.G. Willson: Step and flash imprint lithography, Mater. Today 8, 34–42 (2005)
Z. Ye, K. Luo, X. Lu, B. Fletcher, W. Liu, F. Xu, D. LaBrake, D.J. Resnick, S.V. Sreenivasan: Defect reduction for semiconductor memory applications using jet and flash imprint lithography, J. Micro/Nanolith. MEMS MOEMS 11(3), 031404 (2012)
M. Doi: Introduction to Polymer Physics (Claredon, Oxford 1996)
D.W. van Krevelen: Properties of Polymers (Elsevier, Amsterdam 1990)
H. Schift, L.J. Heyderman: Nanorheology-squeezed flow in hot embossing of thin films. In: Nanostructure Science and Technology, Alternative Lithography, ed. by D.J. Lockwood, C. Sotomayor Torres (Kluwer Academic, New York 2003) pp. 46–76
H.-C. Scheer, H. Schulz, T. Hoffmann, C.M. Sotomayor Torres: Nanoimprint techniques. In: Handbook of Thin Film Materials, Vol. 5, ed. by H.S. Nalva (Academic, New York 2002) pp. 1–60
E.A. Dobisz, S.L. Brandow, R. Bass, J. Mitterender: Effects of molecular properties on nanolithography in polymethyl methacrylate, J. Vac. Sci. Technol. B 18, 107–111 (2000)
R.B. Bird, C.F. Curtis, R.C. Armstrong, O. Hassager: Dynamics of Polymeric Liquids, Fluid Mechanics, Vol. 1 (Wiley, New York 1987)
H.-C. Scheer, H. Schulz: A contribution to the flow behaviour of thin polymer films during hot embossing lithography, Microelectron. Eng. 56, 311–332 (2001)
C. Gourgon, C. Perret, G. Micouin, F. Lazzarino, J.H. Tortai, O. Joubert, J.-P.E. Grolier: Influence of pattern density in nanoimprint lithography, J. Vac. Sci. Technol. B 21(1), 98–105 (2003)
H.D. Rowland, W.P. King: Polymer deformation and filling modes during microembossing, J. Micromech. Microeng. 14, 1625–1632 (2004)
H. Schift, L.J. Heyderman: M. Auf der Maur, J. Gobrecht: Pattern formation in hot embossing of thin polymer films, Nanotechnology 12, 173–177 (2001)
T.J. Ui, R.G. Hussey, R.P. Roger: Stokes drag on a cylinder in axial motion, Phys. Fluids 27, 787 (1984)
Y. Hirai, S. Yoshida, N. Takagi: Defect analysis in thermal nanoimprint lithography, J. Vac. Sci. Technol. B 21(6), 2765–2770 (2003)
M. Colburn, B.J. Choi, S.V. Sreenivasan, R.T. Bonnecaze, C.G. Willson: Ramifications of lubrication theory on imprint lithography, Microelectron. Eng. 75, 321–329 (2004)
A. Fuchs, M. Bender, U. Plachetka, U. Hermanns, H. Kurz: Ultraviolet-based nanoimprint at reduced environmental pressure, J. Vac. Sci. Technol. B 23(6), 2925–2928 (2005)
M. Colburn, I. Suez, B.J. Choi, M. Meissl, T. Bailey, S.V. Sreenivasan, J.G. Ekerdt, C.G. Willson: Characterization and modelling of volumetric and mechanical properties for step and flash imprint lithography photopolymers, J. Vac. Sci. Technol. B 19(6), 2685–2689 (2001)
D.J. Resnick, W.J. Dauksher, D. Mancini, K.J. Nordquist, T.C. Bailey, S. Johnson, N. Stacey, J.G. Ekerdt, C.G. Willson, S.V. Sreenivasan, N. Schumaker: Imprint lithography for integrated circuit fabrication, J. Vac. Sci. Technol. B 21(6), 2624–2631 (2003)
M. Komuro, J. Taniguchi, S. Inoue, N. Kimura, Y. Tokano, H. Hiroshima, S. Matsui: Imprint characteristics by photo-induced solidification of liquid polymer, Jpn. J. Appl. Phys. 39, 7075–7079 (2000)
H. Schulz, H.-C. Scheer, T. Hoffmann, C.M. Sotomayor Torres, K. Pfeiffer, G. Bleidiessel, G. Grützner, C. Cardinaud, F. Gaboriau, M.-C. Peignon, J. Ahopelto, B. Heidari: New polymer materials for nanoimprinting, J. Vac. Sci. Technol. B 18(4), 1861–1865 (2000)
X. Cheng, L.J. Guo: A combined-nanoimprint-and-photolithography patterning technique, Microelectron. Eng. 3/4, 277–282 (2004)
X. Cheng, L.J. Guo: One-step lithography for various size patterns with a hybrid mask-mold, Microelectron. Eng. 3/4, 288–293 (2004)
M. Tormen, L. Businaro, M. Altissimo, F. Romanato, S. Cabrini, F. Perennes, R. Proietti, H.-B. Sun, S. Kawata, E. Di Fabrizio: 3-D patterning by means of nanoimprinting, x-ray and two-photon lithography, Microelectron. Eng. 73/74, 535–541 (2004)
X. Sun, L. Zhuang, W. Zhang, S.Y. Chou: Multilayer resist methods for nanoimprint lithography on nonflat surfaces, J. Vac. Sci. Technol. B 16(6), 3922–3925 (1998)
A. Lebib, M. Natali, S.P. Li, E. Cambril, L. Manin, Y. Chen, H.M. Janssen, R.P. Sijbesma: Control of the critical dimension with a trilayer nanoimprint lithography procedure, Microelectron. Eng. 57/58, 411–416 (2001)
M.W. Lin, H.-L. Chao, J. Hao, E.K. Kim, F. Palmieri, W.C. Kim, M. Dickey, P.S. Ho, C.G. Willson: Planarization for reverse-tone step and flash imprint lithography, Proc. SPIE 6151, 688–699 (2006)
W. Trybula: Sematech, AMRC, and Nano. In: Oral Presentation at Nanoprint and Nanoimprint Tech. (NNT) Conf., Vienna (2004)
S. Johnson, D.J. Resnick, D. Mancini, K.J. Nordquist, W.J. Dauksher, K. Gehoski, J.H. Baker, L. Dues, A. Hooper, T.C. Bailey, S.V. Sreenivasan, J.G. Ekerdt, C.G. Willson: Fabrication of multi-tiered structures on step and flash imprint lithography templates, Microelectron. Eng. 67/68, 221–228 (2003)
H.-J. Kim, M. Almanza-Workman, B. Garcia, O. Kwon, F. Jeffrey, S. Braymen, J. Hauschildt, K. Junge, D. Larson, D. Stieler, A. Chaiken, B. Cobene, R. Elder, W. Jackson, M. Jam, A. Jeans, H. Luo, P. Mei, C. Perlov, C. Taussig: Roll-to-roll manufacturing of electronics on flexible substrates using self-aligned imprint lithography (SAIL), J. Soc. Inf. Disp. 17(11), 963–970 (2009)
Y.P. Kong, H.Y. Lowa, S.W. Pang, A.F. Yee: Duo-mold imprinting of three-dimensional polymeric structures, J. Vac. Sci. Technol. B 22(6), 3251–3265 (2004)
T. Borzenko, M. Tormen, G. Schmidt, L.W. Molenkamp: Polymer bonding process for nanolithography, Appl. Phys. Lett. 79(14), 2246–2248 (2001)
N. Kehagias, V. Reboud, G. Chansin, M. Zelsmann, C. Jeppesen, C. Schuster, M. Kubenz, F. Reuther, G. Gruetzner, C.M. Sotomayor Torres: Reverse-contact UV nanoimprint lithography for multilayered structure fabrication, Nanotechnology 18, 175303 (2007)
C.G. Willson, R.A. Dammel, A. Reiser: Photoresist materials: A historical perspective, Proc. SPIE 3049, 28–41 (1997)
M.D. Stewart, C.G. Willson: Photoresists. In: Encyclopedia of Materials: Science and Technology, ed. by K.H.J. Buschow, R.W. Cahn, M.C. Flemings, B. Ilschner (Elsevier, Amsterdam 2001) pp. 6973–6978
B.K. Long, B.K. Keitz, C.G. Willson: Materials for step and flash imprint lithography (S-FIL), J. Mater. Chem. 17, 3575–3580 (2007)
M. Vogler, S. Wiedenberg, M. Mühlberger, I. Bergmair, T. Glinsner, H. Schmidt, E.-B. Kley, G. Grützner: Development of a novel, low-viscosity UV-curable polymer system for UV-nanoimprint lithography, Microelectron. Eng. 84, 984–988 (2007)
F.A. Houle, C.T. Rettner, D.C. Miller, R. Sooriyakumaran: Antiadhesion considerations for UV nanoimprint lithography, Appl. Phys. Lett. 90, 213103 (2007)
F.A. Houle, E. Guyer, D.C. Miller, R. Dauskardt: Adhesion between template materials and UV-cured nanoimprint resists, J. Vac. Sci. Technol. B 25(4), 1179–1185 (2007)
H. Schift, S. Park, J. Gobrecht, S. Saxer, F. Meier, W. Raupach, K. Vogelsang: Hybrid bendable stamp copies for molding fabricated by nanoimprint, Microelectron. Eng. 78/79, 605–611 (2005)
R.W. Jaszewski, H. Schift, B. Schnyder, A. Schneuwly, P. Gröning: The deposition on anti-adhesive ultra-thin teflon-like films and their interaction with polymers during hot embossing, Appl. Surf. Sci. 143, 301–308 (1999)
H. Schift, S. Saxer, S. Park, C. Padeste, U. Pieles, J. Gobrecht: Controlled co-evaporation of silanes for nanoimprint stamps, Nanotechnology 16, S171–175 (2005)
N. Roos, T. Luxbacher, T. Glinsner, K. Pfeiffer, H. Schulz, H.-C. Scheer: Nanoimprint lithography with a commercial 4 inch bond system for hot embossing, Proc. SPIE 4343, 427–436 (2001)
T. Haatainen, J. Ahopelto, G. Grützner, M. Fink, K. Pfeiffer: Step and stamp imprint lithography using a commercial flip chip bonder, Proc. SPIE 3997, 874–879 (2000)
H. Tan, A. Gilbertson, S.Y. Chou: Roller nanoimprint lithography, J. Vac. Sci. Technol. B 16(6), 3926–3928 (1998)
R. Ji, M. Hornung, M.A. Verschuuren, R. van de Laar, J. van Eekelen, U. Plachetka, M. Moeller, C. Moormann: UV enhanced substrate conformal imprint lithography (UV-SCIL) technique for photonic crystals patterning in LED manufacturing, Microelectron. Eng. 87(5–8), 963–967 (2010)
M. Tormen, E. Sovernigo, A. Pozzato, M. Pianigiani, M. Tormen: Sub-100 μs nanoimprint lithography at wafer scale, Microelectron. Eng. 141, 21–26 (2015)
S.Y. Chou, C. Keimel, J. Gu: Ultrafast and direct imprint of nanostructures in silicon, Nature 417, 835–837 (2002)
H. Schift: Roll embossing and roller imprint. In: Science and New Technol. Nanoimprint Adv. Technol. Appl. Nanoimprint, ed. by Y. Hirai (Frontier, Tokyo 2006) pp. 74–89
N. Kooy, K. Mohamed, L.T. Pin, O.S. Guan: A review of roll-to-roll nanoimprint lithography, Nanoscale Res. Lett. 9, 320 (2014)
H. Schift, R.W. Jaszewski, C. David, J. Gobrecht: Nanostructuring of polymers and fabrication of interdigitated electrodes by hot embossing lithography, Microelectron. Eng. 46, 121–124 (1999)
L.J. Heyderman, H. Schift, C. David, B. Ketterer, M. Auf der Maur, J. Gobrecht: Nanofabrication using hot embossing lithography and electroforming, Microelectron. Eng. 57/58, 375–380 (2001)
L.J. Heyderman, B. Ketterer, D. Bächle, F. Glaus, B. Haas, H. Schift, K. Vogelsang, J. Gobrecht, L. Tiefenauer, O. Dubochet, P. Surbled, T. Hessler: High volume fabrication of customised nanopore membrane chips, Microelectron. Eng. 67/68, 208–213 (2003)
H. Schift, P. Urwyler, P.M. Kristiansen, J. Gobrecht: Nanoimprint lithography process chains for the fabrication of micro- and nanodevices, J. Micro/Nanolith. MEMS MOEMS 10, 031303 (2014)
T. Higashiki, T. Nakasugi, I. Yoneda: Nanoimprint lithography and future patterning for semiconductor devices, J. Micro/Nanolith. MEMS MOEMS 10(4), 043008 (2011)
T.R. Albrecht, H. Arora, V. Ayanoor-Vitikkate, J.-M. Beaujour, D. Bedau, D. Berman, A.L. Bogdanov, Y.-A. Chapuis, J. Cushen, E.E. Dobisz, G. Doerk, H. Gao, M. Grobis, B. Gurney, W. Hanson, O. Hellwig, T. Hirano, P.-O. Jubert, D. Kercher, J. Lille, Z. Liu, C.M. Mate, Y. Obukhov, K.C. Patel, K. Rubin, R. Ruiz, M. Schabes, L. Wan, D. Weller, T.-W. Wu, E. Yan: Bit patterned magnetic recording: theory, media fabrication, and recording performance, IEEE Trans. Magn. 51(5), 44 (2015)
G.M. McClelland, M.W. Hart, C.T. Rettner, M.E. Best, K.R. Carter, B.D. Terris: Nanoscale patterning of magnetic islands by imprint lithography using a flexible mold, Appl. Phys. Lett. 81, 1483–1485 (2002)
Y.-C. Lee, S.-C. Yeh, Y.-Y. Chou, P.-J. Tsai, J.-W. Pan, H.-M. Chou, C.-H. Hou, Y.-Y. Chang, M.-S. Chu, C.-H. Wu, C.-H. Ho: High-efficiency InGaN-based LEDs grown on patterned sapphire substrates using nanoimprinting technology, Microelectron. Eng. 105, 86–90 (2013)
S.-W. Ahn, K.-D. Lee, J.-S. Kim, S.H. Kim, S.H. Lee, J.-D. Park, P.-W. Yoon: Fabrication of subwavelength aluminum wire grating using nanoimprint lithography and reactive ion etching, Microelectron. Eng. 78/79, 314–318 (2005)
H. Schift, S. Park, C.-G. Choi, C.-S. Kee, S.-P. Han, K.-B. Yoon, J. Gobrecht: Fabrication process for polymer photonic crystals using nanoimprint lithography, Nanotechnology 16, S261–S265 (2005)
C.-Y. Chao, L.J. Guo: Polymer microring resonators fabricated by nanoimprint technique, J. Vac. Sci. Technol. B 20, 2862–2866 (2002)
J. Wang, X. Sun, L. Chen, S.Y. Chou: Direct nanoimprint of submicron organic light-emitting structures, Appl. Phys. Lett. 75, 2767–2769 (1999)
X. Cheng, Y. Hong, J. Kanicki, L.J. Guo: High-resolution organic polymer light-emitting pixels fabricated by imprinting technique, J. Vac. Sci. Technol. B 20, 2877–2880 (2002)
D. Nilsson, S. Balslev, A. Kristensen: A microfluidic dye laser fabricated by nanoimprint lithography in a highly transparent and chemically resistant cyclo-olefin copolymer (COC), J. Micromech. Microeng. 15, 296–300 (2005)
C. Clavijo Cedeno, J. Seekamp, A.P. Kam, T. Hoffmann, S. Zankovych, C.M. Sotomayor Torres, C. Menozzi, M. Cavallini, M. Murgia, G. Ruani, F. Biscarini, M. Behl, R. Zentel, J. Ahopelto: Nanoimprint lithography for organic electronics, Microelectron. Eng. 61/62, 25–31 (2002)
L.I. Segerink, J.C.T. Eijkel: Nanofluidics in point of care applications, Lab Chip 14, 3201–3205 (2014)
A. Manz, N. Graber, H.M. Widmer: Miniaturized total chemical analysis systems: A novel concept for chemical sensing, Sens. Actuators B 1, 244–248 (1990)
E. Verpoorte, N.F. De Rooij: Microfluidics meets MEMS, Proc. IEEE 91, 930–953 (2003)
A. Pepin, P. Youinou, V. Studer, A. Lebib, Y. Chen: Nanoimprint lithography for the fabrication of DNA electrophoresis chips, Microelectron. Eng. 61/62, 927–932 (2002)
K. Emoto, F. Sakai, C. Sato, Y. Takabayashi, H. Nakano, T. Takabayashi, K. Yamamoto, T. Hattori, M. Hiura, T. Ando, Y. Kawanobe, H. Azuma, T. Iwanaga, J. Choi, A. Aghili, C. Jones, J.W. Irving, B. Fletcher, Z. Ye: Defectivity and particle reduction for mask life extension, and imprint mask replication for high-volume semiconductor manufacturing, Proc. SPIE 9777, 97770C (2016), Alternative Lithographic Technol. VIII
S.Y. Chou: Patterned magnetic nanostructures and quantized magnetic disks, Proc. IEEE 85, 652–671 (1997)
M.N. Baibich, J.M. Broto, A. Fert, F.N. Van Dau, F. Petroff, P. Eitenne, G. Creuzet, A. Friederich, J. Chazelas: Giant magnetoresistance of (001)Fe/(001)Cr magnetic superlattices, Phys. Rev. Lett. 61, 2472–2475 (1988)
Y. Li, A.K. Menon: Magnetic recording technologies: Overview. In: Encyclopedia of Materials: Science and Technology, ed. by K.H.J. Buschow, R.W. Cahn, M.C. Flemings, B. Ilschner (Elsevier, Amsterdam 2001) pp. 4948–4957
D. Wachenschwanz, W. Jiang, E. Roddick, A. Homola, P. Dorsey, B. Harper, D. Treves, C. Bajorek: Design of a manufacturable discrete track recording medium, IEEE Trans. Magn. 41, 670–675 (2005)
S.Y. Chou, M. Wei, P.R. Krauss, P.B. Fisher: Study of nanoscale magnetic structures fabricated using electron beam lithography and quantum magnetic disk, J. Vac. Sci. Technol. B 12, 3695–3698 (1994)
S.Y. Chou: Patterned magnetic nanostructures and quantized magnetic disks, Proc. IEEE 85, 652–671 (1997)
P. Lalanne, M. Hutley: Artificial media optical properties – Subwavelength scale. In: Enclopedia of Optical Engineering, ed. by R.G. Driggers, C. Hoffman (Marcel Dekker, New York 2003) pp. 62–71
Z. Yu, W. Wu, L. Chen, S. Chou: Fabrication of large area 100 nm pitch grating by spatial frequency doubling an nanoimprint lithography for subwavelength optical applications, J. Vac. Sci. Technol. B 19, 2816–2819 (2001)
S. Ahn, J. Yang, M. Miller, M. Ganapathisubramanian, M. Menezes, J. Choi, F. Xu, D.J. Resnick, S.V. Sreenivasan: High performance wire grid polarizers using jet and flash imprint lithography, Proc. SPIE 8680, 86800W (2013), Alternative Lithographic Technol. V
M.G. Kang, L.J. Guo: Nanoimprinted semitransparent metal electrodes and their application in organic light-emitting diodes, Adv. Mater. 19(10), 1391 (2007)
A. Boltasseva: Plasmonic components fabrication via nanoimprint, J. Opt. A: Pure Appl. Opt. 11, 114001 (2009)
A. Kristensen, J.K.W. Yang, S.I. Bozhevolnyi, S. Link, P. Nordlander, N.J. Halas, N.A. Mortensen: Plasmonic color generation, Nat. Rev. Mater. 2, 1–14 (2016)
G. Kang, J. Yoo, J. Ahn, K. Kim: Transparent dielectric nanostructures for efficient light management in optoelectronic applications, Nano Today 10(1), 22–47 (2015)
S.H. Kim, K.-D. Lee, J.-Y. Kim, M.-K. Kwon, S.-J. Park: Fabrication of photonic crystal structures on light emitting diodes by nanoimprint lithography, Nanotechnology 18, 055306 (2007)
H. Chen, Q. Zhang, S.Y. Chou: Patterning of light-extraction nanostructures on sapphire substrates using nanoimprint and ICP etching with different masking materials, Nanotechnology 26(8), 085302 (2015)
A. Mellor, H. Hauser, C. Wellens, J. Benick, J. Eisenlohr, M. Peters, A. Guttowski, I. Tobías, A. Martí, A. Luque, B. Bläsi: Nanoimprinted diffraction gratings for crystalline silicon solar cells: Implementation, characterization and simulation, Opt. Express 21(S2), A295 (2013)
D. Nilsson, T. Nielsen, A. Kristensen: Solid state micro-cavity dye lasers fabricated by nanoimprint lithography, Rev. Sci. Instrum. 75, 4481–4486 (2004)
C. Clavijo Cedeno, J. Seekamp, A.P. Kam, T. Hoffmann, S. Zankovych, C.M. Sotomayor Torres, C. Menozzi, M. Cavallini, M. Murgia, G. Ruani, F. Biscarini, M. Behl, R. Zentel, J. Ahopelto: Nanoimprint lithography for organic electronics, Microelectron. Eng. 61/62, 25–31 (2002)
L.J. Guo, X. Cheng, C.Y. Chao: Fabrication of photonic nanostructures in nonlinear optical polymers, J. Modern Opt. 49, 663–673 (2002)
L.J. Guo: Recent progress in nanoimprint technology and its applications, J. Phys. D: Appl. Phys. 37, R123–R141 (2004)
C.-Y. Chao, L.J. Guo: Reduction of surface scattering loss in polymer microrings using thermal-reflow technique, IEEE Photonics Technol. Lett. 16, 1498–1500 (2004)
H.C. Hoch, L.W. Jelinski, H.C. Craighead (Eds.): Nanofabrication and Biosystems: Integrating Materials Science, Engineering and Biology (Cambridge Univ. Press, Cambridge 1996)
H.G. Craighead: Nanoelectromechanical systems, Science 290, 1532–1535 (2000)
L.R. Huang, J.O. Tegenfeldt, J.J. Kraeft, J.C. Sturm, R.H. Austin, E.C. Cox: A DNA prism for high-speed continous frationation of large DNA molecules, Nat. Biotechnol. 20, 1048–1051 (2002)
H.G. Craighead: Nanostructure science and technology: Impact and prospects for biology, J. Vac. Sci. Technol. A 21, S216–S221 (2003)
J.O. Tegenfeldt, C. Prinz, H. Cao, S. Chou, W.W. Reisner, R. Riehn, Y.M. Wang, E.C. Cox, J.C. Sturm, P. Silberzan, R.H. Austin: The dynamics of genomic-length DNA molecules in 100-nm channels, Proc. Natl. Acad. Sci. USA 101, 10979–10983 (2004)
L.J. Guo, X. Cheng, C.-F. Chou: Fabrication of size-controllable nanofluidic channels by nanoimprinting and its application for DNA stretching, Nano Lett. 4, 69–73 (2004)
L.H. Thamdrup, A. Klukowska, A. Kristensen: Stretching DNA in polymer nanochannels fabricated by thermal imprint in PMMA, Nanotechnology 19, 125301 (2008)
J.O. Tegenfeldt, C. Prinz, H. Cao, R.L. Huang, R.H. Austin, S.Y. Chou, E.C. Cox, J.C. Sturm: Micro- and nanofluidics for DNA analysis, Anal. Bioanal. Chem. 378, 1678–1692 (2004)
M.J. Dalby, N. Gadegaard, R. Tare, A. Andar, M.O. Riehle, P. Herzyk, C.D.W. Wilkinson, R.O.C. Oreff: The control of human mesenchymal cell differentiation using nanoscale symmetry and disorder, Nat. Mater. 6, 997–1003 (2007)
J. Hasan, K. Chatterjee: Recent advances in engineering topography mediated antibacterial surfaces, Nanoscale 7, 15568 (2015)
K. Seunarine, D.O. Meredith, M.O. Riehle, C.D.W. Wilkinson, N. Gadegaard: Biodegradable polymer tubes with lithographically controlled 3-D micro- and nanotopography, Microelectron. Eng. 85(5/6), 1350–1354 (2008)
A. Kapr: Johann Gutenberg: The man and his invention, http://www.gutenberg.de/publ.htm (1996)
J.A. Liddle, G.M. Gallatin: Nanomanufacturing: A Perspective, ACS Nano (2016) doi:10.1021/acsnano.5b03299
M. Beck, B. Heidari: Nanoimprint lithography for high volume HDI manufacturing, OnBoard Technol. Sept., 52–55 (2006), http://www.Onboard-Technology.com
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Schift, H., Kristensen, A. (2017). Nanoimprint Lithography. In: Bhushan, B. (eds) Springer Handbook of Nanotechnology. Springer Handbooks. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-54357-3_5
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