Abstract
The problem of calculation of electromagnetic field from a large number (108 and more) of elementary radiating objects for the needs of holographic lithography is considered. The specially designed big pixel method is proposed. This method was implemented as a part of a parallel software package and was used on the MVS-100K JSCC RAS and the MIIT T4700 clusters (100 TFLOPS and 4.7 TFLOPS correspondingly). The big pixel method allows calculating of Gabor holograms for images of real-size chip topologies on modern clusters. A parallel efficiency of the algorithm was investigated. It is shown an example of Gabor hologram synthesis for an image of topology consisting of 1.6*109 elements.
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Shamaev, A., Knyazkov, D. (2013). An Effective Method of Electromagnetic Field Calculation. In: Dimov, I., Faragó, I., Vulkov, L. (eds) Numerical Analysis and Its Applications. NAA 2012. Lecture Notes in Computer Science, vol 8236. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-41515-9_55
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DOI: https://doi.org/10.1007/978-3-642-41515-9_55
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