Skip to main content
SpringerLink
Log in

Real-Time Analysis of Initial Oxidation Process on Si(001) by Means of Surface Differential Reflectance Spectroscopy and Reflectance Difference Spectroscopy

  • Chapter
  • First Online:
Frontiers in Optical Methods

Part of the book series: Springer Series in Optical Sciences ((SSOS,volume 180))

  • 1823 Accesses

Abstract

We introduce quantitative investigation of initial oxidation process on Si(001)-(2x1) by means of linear optical spectroscopic methods, namely, surface differential reflectance spectroscopy and reflectance difference spectroscopy. Our recent results obtained with these real-time measurement techniques revealed that the transition between two different oxide growth modes, Langmuir-type adsorption and two - dimensional island growth, could be identified. The activation energies were estimated from Arrhenius plots of the oxidation periods for the growth of an oxide mono layer. Our results suggest that a finite activation energy exists for monolayer oxide formation on Si(001)-(2x1) at high temperatures.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 84.99
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 109.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 109.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

References

  1. D.E. Aspnes, J.P. Harbison, A.A. Studna, L.T. Florez, J. Vac. Sci. Technol. A 6, 1327 (1988)

    Article  ADS  Google Scholar 

  2. N. Kobayashi, Y. Horikoshi, Jpn. J. Appl. Phys. 28, L1880 (1989)

    Article  ADS  Google Scholar 

  3. J.F. McGilp, Prog. Surf. Sci. 49, 1 (1995)

    Article  ADS  Google Scholar 

  4. P. Weightman, D.S. Marin, R.J. Cole, T. Farrell, Rep. Prog. Phys. 68, 1251 (2005)

    Article  ADS  Google Scholar 

  5. C. Beitia, W. Preyss, R. Del Sole, Y. Borensztein, Phys. Rev. B 56, R4371 (1997)

    Article  ADS  Google Scholar 

  6. M. Tanaka, E. Yamakawa, T. Shirao, K. Shudo, Phys. Rev. B 68, 165411 (2003)

    Article  ADS  Google Scholar 

  7. Y. Borensztein, O. Pluchery, N. Witkowski, Phys. Rev. Lett. 95, 117402 (2005)

    Article  ADS  Google Scholar 

  8. J. Kondoh, I. Nakai, M. Nagasaka, K. Amemiya, T. Ohta, J. Vac. Soc. Jpn. 52, 73 (2009)

    Article  ADS  Google Scholar 

  9. M. Okada, Y. Teraoka, J. Vac. Soc. Jpn. 52, 80 (2009)

    Article  ADS  Google Scholar 

  10. A.R. Turner, M.E. Pemble, J.M. Fernandez, B.A. Joyce, J. Zhang, A.G. Taylor, Phys. Rev. Lett. 74, 3213 (1995)

    Article  ADS  MATH  Google Scholar 

  11. T. Yasuda, N. Kumagai, M. Nishizawa, S. Yamasaki, H. Oheda, K. Yamabe, Phys. Rev. B 67, 195338 (2003)

    Article  ADS  Google Scholar 

  12. J. Takizawa, J. Koizumi, S. Ohno, K. Shudo, M. Tanaka, Shinku 49, 323 (2006)

    Article  Google Scholar 

  13. J. Takizawa, S. Ohno, J. Koizumi, K. Shudo, M. Tanaka, J. Phys.: Condens. Matter 18, L209 (2006)

    Article  ADS  Google Scholar 

  14. S. Ohno, J. Takizawa, J. Koizumi, F. Mitobe, R. Tamegai, T. Suzuki, K. Shudo, M. Tanaka, J. Phys.: Condens. Matter 19, 446011 (2007)

    Article  ADS  Google Scholar 

  15. S. Ohno, H. Kobayashi, F. Mitobe, T. Suzuki, K. Shudo, M. Tanaka, Phys. Rev. B 77, 085319 (2008)

    Article  ADS  Google Scholar 

  16. Y. Horikoshi, M. Kawashima, N. Kobayashi, J. Cryst. Growth 111, 200 (1991)

    Article  ADS  Google Scholar 

  17. T. Yasuda, Kotaibutsuri 34, 99 (1999) (in Japanese)

    Google Scholar 

  18. P. Harrison, T. Farrell, A. Maunder, C.I. Smith, P. Weightman, Meas. Sci. Technol. 12, 2185 (2001)

    Article  ADS  Google Scholar 

  19. H. Lüth, Solid Surfaces, Interfaces and Thin Films (Springer, Berlin, 2001)

    Google Scholar 

  20. V.G. Bordo, H.-G. Rubahn, Optics and Spectroscopy at Surfaces and Interfaces (WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim, 2005)

    Book  Google Scholar 

  21. T. Onishi, Y. Horiike, K. Yoshihara (eds.), Kotaihyomenbunseki II (Kodansha Scientific, 1995) (in Japanese)

    Google Scholar 

  22. H. Fujiwara, Spectroscopic Ellipsometry (Maruzen 2003) (in Japanese)

    Google Scholar 

  23. J.D.E. McIntyer, D.E. Aspnes, Surf. Sci. 24, 417 (1971)

    Article  ADS  Google Scholar 

  24. K. Hingerl, D.E. Aspnes, I. Kamiya, L. Florez, Appl. Phys. Lett. 63, 885 (1993)

    Article  ADS  Google Scholar 

  25. M. Nakayama, J. Phys. Soc. Jpn. 39, 265 (1975)

    Article  ADS  Google Scholar 

  26. A. Bagchi, R.G. Barrera, A.K. Rajagopal, Phys. Rev. B 20, 4824 (1979)

    Article  ADS  Google Scholar 

  27. R. Del Sole, Solid State Commun. 37, 537 (1981)

    Article  ADS  Google Scholar 

  28. S. Ogawa, Y. Takakuwa, Jpn. J. Appl. Phys. 44, L1048 (2005)

    Article  ADS  Google Scholar 

  29. S. Ogawa, A. Yoshigoe, S. Ishidzuka, Y. Teraoka, Y. Takakuwa, Jpn. J. Appl. Phys. 46, 3244 (2007)

    Article  ADS  Google Scholar 

  30. F.J. Himpsel, F.R. McFeely, T. Taleb-Ibrahimi, J.A. Yarmoff, G. Hollinger, Phys. Rev. B 38, 6084 (1988)

    Article  ADS  Google Scholar 

  31. Ph Avouris, C. Cahill, Ultramicroscopy 42–44, 838 (1992)

    Article  Google Scholar 

  32. M. Suemitsu, Y. Enta, Y. Miyanishi, N. Miyamoto, Phys. Rev. Lett. 82, 2334 (1999)

    Article  ADS  Google Scholar 

  33. Y. Takakuwa, F. Ishida, T. Kawawa, Appl. Surf. Sci. 190 (2002) 20; 216 (2003) 133

    Google Scholar 

  34. K. Kato, T. Uda, K. Terakura, Phys. Rev. Lett. 80, 2000 (1998)

    Article  ADS  Google Scholar 

  35. N. Witkowski, R. Coustel, O. Pluchery, Y. Borensztein, Surf. Sci. 600, 5142 (2006)

    Article  ADS  Google Scholar 

  36. F. Fuchs, W.G. Schmidt, F. Bechstedt, Phys. Rev. B 72, 075353 (2005)

    Article  ADS  Google Scholar 

  37. X.L. Fan, Y.F. Zhang, W.M. Lau, Z.F. Liu, Phys. Rev. Lett. 94, 016101 (2005)

    Article  ADS  Google Scholar 

  38. Y. Enta, Y. Takegawa, M. Suemitsu, N. Miyamoto, Appl. Surf. Sci. 100(101), 449 (1996)

    Article  ADS  Google Scholar 

  39. H. Watanabe, K. Kato, T. Uda, K. Fujita, M. Ichikawa, T. Kawamura, K. Terakura, Phys. Rev. Lett. 80, 345 (1998)

    Article  ADS  Google Scholar 

  40. A. Pasquarello, H. Hybertsen, R. Car, Nature 396, 58 (1998)

    Article  ADS  Google Scholar 

  41. A. Cricenti, J. Phys.:Condens. Matter 16 (2004) S4243

    Google Scholar 

  42. T. Nakayama, M. Murayama, T. Yasuda, Kotaibutsuri 38, 201 (2003) (in Japanese)

    Google Scholar 

  43. Y. Mogawa, S. Ohno, K. Shudo, M. Tanaka, J. Vac. Soc. Jpn. 49, 138 (2006) (in Japanese)

    Google Scholar 

  44. K. Gaal-Nagy, A. Incze, G. Onida, Y. Borensztein, N. Witkowski, O. Pluchery, F. Fuchs, F. Bechstedt, R. Del Sole, Phys. Rev. B 79, 045312 (2009)

    Google Scholar 

  45. S. Ogata, S. Ohno, M. Tanaka, T. Horikawa, T. Yasuda, Jpn. J. Appl. Phys. 49, 022403 (2010)

    Article  ADS  Google Scholar 

  46. K. Seino, W.G. Schmidt, Surf. Sci. 548, 183 (2004)

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Physics, Faculty of Engineering, Yokohama National University, Yokohama, Japan

    Shin-ya Ohno, Ken-ichi Shudo & Masatoshi Tanaka

Authors
  1. Shin-ya Ohno
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Ken-ichi Shudo
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Masatoshi Tanaka
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Shin-ya Ohno .

Editor information

Editors and Affiliations

  1. Yokohama National University, Yokohama National University, Yokohama, Japan

    Ken-ichi Shudo

  2. Faculty of Engeneering, Yokohama National University, Yokohama, Japan

    Ikufumui Katayama

  3. Faculty of Engeneering, Yokohama National University, Yokohama, Japan

    Shin-Ya Ohno

Rights and permissions

Reprints and permissions

Copyright information

© 2014 Springer-Verlag Berlin Heidelberg

About this chapter

Cite this chapter

Ohno, Sy., Shudo, Ki., Tanaka, M. (2014). Real-Time Analysis of Initial Oxidation Process on Si(001) by Means of Surface Differential Reflectance Spectroscopy and Reflectance Difference Spectroscopy. In: Shudo, Ki., Katayama, I., Ohno, SY. (eds) Frontiers in Optical Methods. Springer Series in Optical Sciences, vol 180. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-40594-5_2

Download citation

  • DOI: https://doi.org/10.1007/978-3-642-40594-5_2

  • Published:

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-40593-8

  • Online ISBN: 978-3-642-40594-5

  • eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)

Publish with us

Policies and ethics

Search

Navigation