Abstract
Over the last two decades or so optical methods have become increasingly popular as a means to measure surface topology. Compared to traditional contacting methods, optical instruments such as Coherence Scanning Interferometers (CSI) and Confocal Microscopes (CM) have the capability to collect large, high-resolution data sets without risk of surface damage and consequently are extensively used in research laboratories to calculate areal surface parameters [1]. Despite the significant advantages of optical metrology, however, unexplained errors are frequently observed especially when sloped artefacts are measured and consequently their use as a traceable measurement tool has been brought into question [2].
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References
Leach, R.K.: Optical measurement of surface topography. Springer, Berlin (2011)
Gao, F., Leach, R.K., Petzing, J., Coupland, J.M.: Surface measurement errors using commercial scanning white light interferometers. Meas. Sci. Technol. 19, 015303 (2008)
Coupland, J.M., Lobera, J.: Holography, tomography and 3D microscopy as linear filtering operations. Meas. Sci. Technol. 19, 07010 (2008)
Ruiz, P.D., Huntley, J.M., Coupland, J.M.: Depth-resolved imaging and displacement measurement techniques viewed as linear filtering operations. Experimental Mechanics 13(51), 453–465 (2010)
Born, M., Wolf, E.: Principles of optics. Pergamon, 6th edn., p. 453 (1980)
Born, M., Wolf, E.: Principles of optics. Pergamon, 6th edn., pp. 379–382 (1980)
Wolf, E.: Three-dimensional structure determination of semi-transparent objects from holographic data. Opt. Commun. 1, 153–156 (1969)
Dandliker, R., Weiss, K.: Reconstruction of the three-dimensional refractive index from scattered waves. Opt. Commun. 1, 323–328 (1970)
Coupland, J.M., Mandal, R., Palodhi, K., Leach, R.: Coherence scanning interferometry: linear theory of surface measurement. Appl. Opt. 52(16), 3662–3670 (2013)
Sheppard, C.J.R.: Imaging of random surfaces and inverse scattering in the Kirchhoff approximation. Waves in Random Media 8(1), 53–66 (1998)
Beckmann, P., Spizzichino, A.: The scattering of electromagnetic waves from rough surfaces. Artech House, Norwood (1987)
Palodhi, K., Coupland, J.M., Leach, R.K.: A linear model of fringe generation and analysis in coherence scanning interferometry. In: ASPE Summer Topical Meeting on Precision Interferometric Metrology, Asheville, North Carolina, June 23-25 (2010)
Mandal, R., Palodhi, K., Coupland, J.M., Leach, R.K., Mansfield, D.: Application of linear systems theory to characterize coherence scanning interferometry. In: Proceedings of SPIE, vol. 8430, p. 84300T (2012)
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Coupland, J. (2014). Linear Theory of Optical Surface Measuring Instruments. In: Osten, W. (eds) Fringe 2013. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-36359-7_8
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DOI: https://doi.org/10.1007/978-3-642-36359-7_8
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