Introduction
3D-optical microscopes such as white-light interference microscopes, confocal microscopes, and structured illumination microscopes are well-established instruments in micro- and nanotechnology.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
De Groot, P., Colonna de Lega, X.: Interpreting interferometric height measurements using the instrument transfer function. In: Proc. Fringe 2005, pp. 30–37 (2005)
Lehmann, P., Xie, W., Kühnhold, P., Niehues, J.: Interferometric measurement of functional surfaces. In: SPIE Proc., vol. 8769 (in print, 2013)
Xie, W., Lehmann, P., Niehues, J.: Lateral resolution and transfer characteristics of vertical scanning white-light interferometers. Appl. Opt. 51, 1795–1803 (2012)
Lehmann, P., Xie, W., Niehues, J.: Transfer characteristics of rectangular phase gratings in interference microscopy. Opt. Lett. 37, 758–760 (2012)
Harasaki, A., Wyant, J.C.: Fringe modulation skewing effect in white-light vertical scanning interferometry. Appl. Opt. 39, 2101–2106 (2000)
Gustafsson, M.G.L.: Surpassing the lateral resolution limit by a factor of two using structured illumination microscopy. J. of Microscopy 198, 82–87 (2000)
Gao, P., Pedrini, G., Osten, W.: Resolution enhancement and autofocusing in digital holographic microscopy using structured illumination. In: SPIE Proc., vol. 8788, pp. 09-1–09-7 (2013)
Tavrov, A., Schmit, J., Kerwien, N., Osten, W., Tiziani, H.: Diffraction-induced coherence levels. Appl. Opt. 44, 2202–2212 (2005)
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2014 Springer-Verlag Berlin Heidelberg
About this paper
Cite this paper
Lehmann, P., Niehues, J., Tereschenko, S. (2014). 3D-Optical Interference Microscopy at the Lateral Resolution Limit. In: Osten, W. (eds) Fringe 2013. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-36359-7_125
Download citation
DOI: https://doi.org/10.1007/978-3-642-36359-7_125
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-36358-0
Online ISBN: 978-3-642-36359-7
eBook Packages: EngineeringEngineering (R0)