Abstract
Recently, surface profiles of nanostructures have been reduced in size in order to develop microfabrication techniques. In particular, feature sizes of a few tens of nanometers are common in the semiconductor industry. This chapter mention about the Stokes vector, the Mueller matrix, the Mueller matrix decomposition to evaluate the surface profiles of nanostructures. The profile of the structure is determined from the Mueller matrix, which expresses all the polarization properties of the sample by experimental measurements and calculated values. Furthermore, the Mueller matrix is decomposed for more precise detection. In the final part of this chapter, the experimental results after decomposition are compared to the values obtained by numerical analysis.
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Mizutani, Y., Otani, Y. (2013). Ellipsometry at the Nanostructure. In: Losurdo, M., Hingerl, K. (eds) Ellipsometry at the Nanoscale. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-33956-1_8
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DOI: https://doi.org/10.1007/978-3-642-33956-1_8
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