Abstract
The irradiation damage for Mo/Si, Ru/Si, and Nb/Si multilayers are investigated using the soft X-ray laser system at QST. Scanning electronic microscopy observations reveal that the size of the damage on the Nb/Si multilayer is smaller than the other multilayers. This suggests that the damage fluence by the EUV irradiation of the Nb/Si multilayers is greater than the other multilayers.
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Ichimaru, S. et al. (2018). Irradiation Damage Test of Mo/Si, Ru/Si and Nb/Si Multilayers Using the Soft X-Ray Laser Built at QST. In: Kawachi, T., Bulanov, S., Daido, H., Kato, Y. (eds) X-Ray Lasers 2016. ICXRL 2016. Springer Proceedings in Physics, vol 202. Springer, Cham. https://doi.org/10.1007/978-3-319-73025-7_45
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DOI: https://doi.org/10.1007/978-3-319-73025-7_45
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