Abstract
Femtosecond laser micromachining is a powerful enabling technology that is currently gaining an increasing interest among the scientific community due to the wide range of possibilities that it offers. It consists in focusing a femtosecond laser beam in a transparent substrate to permanently modify the focal volume. The core of this technique lies in the confinement of the substrate modification that is due to the nonlinearity of the process. Many interesting properties derive from this aspect. The capability to realize modified structures with 3D layouts in the substrate volume, the possibility to modify a wide range of transparent materials, and the fast prototyping of devices are just some examples of the undeniable advantages of this technique. In this chapter we will discuss some of the applications were femtosecond laser writing permitted real breakthroughs and we will present some relevant examples. First, we will shortly discuss the physical mechanism and the type of modifications that can be induced in the substrate by this microfabrication technique. These constitute the fundamental building blocks for the devices that we will present and discuss in the second part of the chapter.
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Corrielli, G., Paiè, P., Osellame, R. (2020). Applications of Femtosecond-Laser-Generated in-Volume Structures. In: Sugioka, K. (eds) Handbook of Laser Micro- and Nano-Engineering. Springer, Cham. https://doi.org/10.1007/978-3-319-69537-2_34-1
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DOI: https://doi.org/10.1007/978-3-319-69537-2_34-1
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