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Experimental Research of Loading Effect on a 3-DOF Macro-Micro Precision Positioning System

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Intelligent Robotics and Applications (ICIRA 2017)

Part of the book series: Lecture Notes in Computer Science ((LNAI,volume 10464))

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Abstract

The precision positioning technology has developed for a long time and played a significant role in many fields. However, most precision positioning systems designed before only have one or two degrees of freedom, which greatly limits the application. In view of this, a kind of three-degrees-of-freedom (3-DOF) macro-micro precision positioning system is investigated and analyzed in the paper. The macro-micro precision positioning system is designed suitable for application in vacuum environment, which includes two main parts such as 3PRR (3 degrees of freedom, each branch consists of a prismatic pair (P) drive and two rotating pairs (R)) planar parallel platform and piezoelectric micro stage. Before conducting the experiment of macro-micro precision positioning system, it is necessary to investigate the loading effect on the 3PRR planar parallel platform. The loading experiment has showed that different loads have some effect on positioning accuracy and standard variance, but the positioning error is much less than the travel range of micro positioner. Then the experiment combining 3PRR planar parallel platform and piezoelectric micro stage has been carefully conducted by using laser interferometer as feedback control measurement. The experimental results demonstrate that the requirement of high positioning precision and large travel range can be simultaneously met by using the macro-micro precision positioning system.

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Acknowledgment

The authors gratefully acknowledge these support agencies such as the National Natural Science Foundation of China (Grant No. U1501247, U1609206), the Science and Technology Planning Project of Guangdong Province (Grant No. 2014B090917001), the Natural Science Foundation of Guangdong Province (Grant No. S2013030013355) and the Scientific and Technological Project of Guangzhou (Grant No. 2015090330001).

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Authors and Affiliations

  1. Guangdong Provincial Key Laboratory of Precision Equipment and Manufacturing Technology, School of Mechanical and Automotive Engineering, South China University of Technology, Guangzhou, 510640, China

    Lingbo Xie, Zhicheng Qiu & Xianmin Zhang

Authors
  1. Lingbo Xie
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  2. Zhicheng Qiu
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  3. Xianmin Zhang
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Corresponding author

Correspondence to Xianmin Zhang .

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Editors and Affiliations

  1. School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan, China

    YongAn Huang

  2. School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan, China

    Hao Wu

  3. Institute of Industrial Research, University of Portsmouth, Portsmouth, United Kingdom

    Honghai Liu

  4. School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan, China

    Zhouping Yin

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Xie, L., Qiu, Z., Zhang, X. (2017). Experimental Research of Loading Effect on a 3-DOF Macro-Micro Precision Positioning System. In: Huang, Y., Wu, H., Liu, H., Yin, Z. (eds) Intelligent Robotics and Applications. ICIRA 2017. Lecture Notes in Computer Science(), vol 10464. Springer, Cham. https://doi.org/10.1007/978-3-319-65298-6_69

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  • DOI: https://doi.org/10.1007/978-3-319-65298-6_69

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  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-319-65297-9

  • Online ISBN: 978-3-319-65298-6

  • eBook Packages: Computer ScienceComputer Science (R0)

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