Abstract
This paper presents the investigation of surface damages of the workpiece during the process of tool positioning by using a force sensor-integrated fast servo (FS-FST) on a three-axis ultra-precision lathe. The cutting tool itself on the FS-FTS is employed as a force-controlled stylus probe to make contact with the workpiece surface and measure the forms of the fabricated micro-structures by servo controlling the tool displacement to keep a constant contact force. Experiments were carried out to demonstrate the surface damage degrees by varying the set contact force between the tool tip and the workpiece surface.
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Cai, Y.D., Chen, Y.L., Ito, S., Shimizu, Y., Gao, W. (2022). Investigation of Surface Damages in Contact and Form Measurement with a Force Sensor-Integrated Fast Tool Servo. In: Hinduja, S., da Silva Bartolo, P.J., Li, L., Jywe, WY. (eds) Proceedings of the 38th International MATADOR Conference. MATADOR 2015. Springer, Cham. https://doi.org/10.1007/978-3-319-64943-6_37
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DOI: https://doi.org/10.1007/978-3-319-64943-6_37
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