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Influence of Annealing Temperature on the Morphology and Crystallography of Cr, CrN and CrAlN Films

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Proceedings of the 6th International Conference on Recrystallization and Grain Growth (ReX&GG 2016)

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Abstract

The present study relates the influence of the annealing temperature on the morphology and crystallography of Cr, CrN and CrAlN films, deposited on silicon substrate (100) using magnetron sputtering. Annealing treatments are performed at 500°C, 600°C and 800°C for 1 hour on Cr coating samples for different thickness. At low temperatures, the results show a thermal stability of these coatings and the XRD analysis show that these films are crystallized according to the orientation (110). Annealing treatments that carried out on CrN coatings, between 500°C and 1000°C, show a thermal stability of these coatings until 700°C. Moreover, {111} texture is observed for the CrN thinner films, while texture {200} is obtained for CrN thick films. However, adding aluminum increases the oxidation resistance up to 1200°C but with lower adherence.

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Author information

Authors and Affiliations

  1. Laboratoire Microstructures et Défauts dans les Matériaux, Université Frères Mentouri, Constantine 1, Route Ain EL Bey, Constantine, 25017, Algeria

    F. Z. Mammeri, B. Riah, A. Ayad, L. Chekour & N. Rouag

  2. Département de pharmacie, Faculté de Médecine, Université Constantine 3, Algeria

    A. Ayad

  3. Institut des Matériaux Jean Rouxel IMN UMR 6502, 2 rue de la Houssinière, BP 32229, 44322, Nantes Cedex, France

    M. A. Djouadi

Authors
  1. F. Z. Mammeri
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  2. B. Riah
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  3. A. Ayad
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  4. L. Chekour
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  5. M. A. Djouadi
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  6. N. Rouag
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Editor information

Editors and Affiliations

  1. Carnegie Mellon University, USA

    Elizabeth A. Holm (Professor of Materials Science and Engineering), Gregory S. Rohrer Ph.D.  & Anthony D. Rollett (Professor of Materials Science and Engineering) (Professor of Materials Science and Engineering),  &  (Professor of Materials Science and Engineering)

  2. Research and Technology Center, U. S. Steel Corporation, USA

    Susan Farjami (Senior research engineer) (Senior research engineer)

  3. Robert Morris University, Pittsburgh, PA, USA

    Priyadarshan Manohar (Associate Professor of Engineering and Co-Director Research and Outreach Center (ROC) (Associate Professor of Engineering and Co-Director Research and Outreach Center (ROC)

  4. University of Pennsylvania, USA

    Gregory S. Rohrer Ph.D.  & David Srolovitz Ph.D. (Member of the National Academy of Engineering, Fellow of MRS, TMS, ASM, Institute of Physics) &  (Member of the National Academy of Engineering, Fellow of MRS, TMS, ASM, Institute of Physics)

  5. Rutgers University, USA

    David Srolovitz Ph.D. (Member of the National Academy of Engineering, Fellow of MRS, TMS, ASM, Institute of Physics) (Member of the National Academy of Engineering, Fellow of MRS, TMS, ASM, Institute of Physics)

  6. Alcoa Technical Center, Pittsburgh, PA, USA

    Hasso Weiland (Technical Fellow) (Technical Fellow)

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© 2016 TMS (The Minerals, Metals & Materials Society)

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Mammeri, F.Z., Riah, B., Ayad, A., Chekour, L., Djouadi, M.A., Rouag, N. (2016). Influence of Annealing Temperature on the Morphology and Crystallography of Cr, CrN and CrAlN Films. In: Holm, E.A., et al. Proceedings of the 6th International Conference on Recrystallization and Grain Growth (ReX&GG 2016). Springer, Cham. https://doi.org/10.1007/978-3-319-48770-0_42

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