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Low-Temperature Grown InN Films Based on Sapphire Substrate with ECR-Plasma Enhanced MOCVD

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Proceedings of the 8th Pacific Rim International Congress on Advanced Materials and Processing

Abstract

Prefer-oriented and fine grained polycrystalline InN films are deposited on sapphire substrate using electron cyclotron resonance plasma enhanced metal organic chemical vapor deposition (ECR-PEMOCVD) system at low-temperature. Trimethyl indium (TMIn) and N2 are applied as precursors for In and N, respectively. The influence of deposition temperature on the structural, electrical and morphological properties of InN films is systematically investigated by x-ray diffraction analysis (XRD), Hall Effect measurement (HL5500) and atomic force microscopy (AFM). The results show that the as-grown InN films with smooth surface roughness of 4.59nm and preferred orientation are successfully achieved at the optimized deposition temperature of 450°C, which was low temperature here. The InN films reported here will provide various opportunities for the development of high efficiency and high performance semiconductor devices based on InN materials.

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Authors and Affiliations

  1. New Energy Source Research Center, Shenyang Institute of Engineering, Shenyang, 110136, China

    Ju Zhenhe, Zheng Hong, Zhang Dong, Zhao Yan, Wang Gang & Zhang Xiaohui

  2. Liaoning Solar Energy R&D Co., Ltd., 110136, China

    Ju Zhenhe, Li Shi, Zheng Hong, Zhang Dong & Zhao Yan

  3. Department of Physics, Shenyang Institute of Engineering, Shenyang, 110136, China

    Li Yucai & Li Shuangmei

  4. Mathematical Department, Shenyang Medical College, Shenyang, 110136, China

    Miao Lihua

  5. School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian, 116024, China

    Qin Fuwen

Authors
  1. Ju Zhenhe
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  2. Li Shi
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  3. Zheng Hong
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  4. Zhang Dong
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  5. Zhao Yan
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  6. Li Yucai
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  7. Miao Lihua
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  8. Wang Gang
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  9. Zhang Xiaohui
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  10. Li Shuangmei
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Editor information

Editors and Affiliations

  1. Department of Systems Engineering, Naval Post-graduate School in Monterey, California, USA

    Fernand Marquis (Research professor) (Research professor)

  2. Wayne E. Meyer Institute of Systems Engineering, Naval Post-graduate School in Monterey, California, USA

    Fernand Marquis (Research professor) (Research professor)

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© 2013 TMS (The Minerals, Metals & Materials Society)

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Zhenhe, J. et al. (2013). Low-Temperature Grown InN Films Based on Sapphire Substrate with ECR-Plasma Enhanced MOCVD. In: Marquis, F. (eds) Proceedings of the 8th Pacific Rim International Congress on Advanced Materials and Processing. Springer, Cham. https://doi.org/10.1007/978-3-319-48764-9_255

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