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Ultrasonic Pulverization of an Aerosol: A Versatile Tool for the Deposition of Sol-Gel Thin Films

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Handbook of Sol-Gel Science and Technology
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Abstract

Fine droplets with a narrow size distribution are generated from a liquid stream, when an ultrasonic or pneumatic spraying device is used. The liquid containing the sol-gel precursors breaks into droplets that are directed at a substrate, in some cases using a DC voltage for electrospraying. The process of spray deposition encompasses several techniques and many variables. By adjusting the variables, high quality optical films can be achieved. The advantages and disadvantages of these processes are discussed in detail.

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References

  • Albin DS, Risbud SH. Spray pyrolysis processing of optoelectronic materials. Adv Ceram Mater. 1987;2:243–52.

    CAS  Google Scholar 

  • Bellessa J, Rabaste S, Plenet JC, Dumas J, Mugnier J, Marty O. Eu3+ doped microcavities fabricated by sol–gel process. Appl. Phys. Lett. 2001;79:2142–4.

    CAS  Google Scholar 

  • Biehl S, Danzebrink R, Oliveira P, Aegerter MA. Refractive microlens fabrication by ink-jet process. J. Sol–Gel Sci. Tech. 1998;13:177–82.

    CAS  Google Scholar 

  • Blandenet G, Court M, Lagarde Y. Thin layers deposited by the pyrosol process. Thin Solid Films. 1981;77:81–90.

    CAS  Google Scholar 

  • Bornand V, Papet P, Philippot EA. Study of the effects of process variables on the synthesis of PZT thin films by the pyrosol process. Eur. J. Solid State. Inorg. Chem. 1998;35:607–18.

    CAS  Google Scholar 

  • Bornand V, Huet I, Paper P. LiNbO3 thin films deposited on Si substrates: a morphological development study, Mat. Chem. Phys. 2002;77:571–7.

    Google Scholar 

  • Brinker CJ, Scherer GW. Sol–gel science. In: The physics and chemistry of sol–gel processing. San Diego: Academic; 1990.

    Google Scholar 

  • Brite-Euram project 7765, contract no. BRE2-CT94-0985, 1994–1998.

    Google Scholar 

  • Burgos M. PhD thesis, Grenoble. 2001.

    Google Scholar 

  • Chamberlin RR, Skarman JS. Chemical spray deposition process for inorganic films. J. Electrochem. Soc. 1966;113:86–9.

    CAS  Google Scholar 

  • Chen CH, Kelder EM, Schoonman J. Unique porous LiCoO2 thin layers prepared by electrostatic spray deposition. J. Mater. Sci. 1996;31:5437–42.

    CAS  Google Scholar 

  • Chen CH, Kelder EM, Schoonman J. Electrostatic sol-spray deposition (ESSD) and characterisation of nanostructured TiO2 thin films. Thin Solid Films. 1999a;342:35–41.

    CAS  Google Scholar 

  • Chen KM, Sparks AW, Luan HC, Lim DR, Wada K, Kimerling LC. SiO2/TiO2 omnidirectional reflector and microcavity resonator via the sol–gel method. Appl. Phys. Lett. 1999b;75:3805–7.

    CAS  Google Scholar 

  • Chu J, Lu J, Wu Y, Huang W, Maeda R, Itoh T, Suga T. Micro sensors and actuators array based on Pb(Zr, Ti)O3 thin film for AFM data-storage. SPIE Proc. 2001;4601:379–83.

    CAS  Google Scholar 

  • Coutier C. PhD thesis, Grenoble. 2001.

    Google Scholar 

  • Coutier C, Audier M, Fick J, Rimet R, Langlet M. Aerosol-gel deposition of optically active layers in the system Er/SiO2–TiO2. Thin Solid Films. 2000;372:177–89.

    CAS  Google Scholar 

  • Coutier C, Meffre W, Jenouvrier P, Fick J, Audier M, Rimet R, Jacquier B, Langlet M. The effects of phosphorus on the crystallisation and photoluminescence behaviour of aerosol–gel deposited SiO2–TiO2–Er2O3–P2O5 thin films. Thin Solid Films. 2001;392:40–9.

    CAS  Google Scholar 

  • Danzebrink R, Aegerter MA. Deposition of micropatterned coating using an ink-jet technique. Thin Solid Films. 1999;351:115–8.

    CAS  Google Scholar 

  • Danzebrink R, Aegerter MA. Deposition of optical microlens arrays by ink-jet processes. Thin Solid Films. 2001;392:223–5.

    CAS  Google Scholar 

  • Fink-Straube C., Kalleder A., Koch T., Mennig M., Schmidt H. Method for the production of optical layers having uniform layer thickness, DE Patent 19840525 Al. 2000.

    Google Scholar 

  • Garcia-Hipolito M, Alvarez-Fregoso O, Martinez E, Falcony C, Aguilar-Frutis MA. Characterization of ZrO2:Mn,Cl luminescent coatings synthesized by the pyrosol technique. Opt. Mater. 2002;20:113–8.

    CAS  Google Scholar 

  • Gershenzon EL, Eknadiosyants OK. On the mechanism of atomization of liquid in an ultrasonic fountain. Sov. Phys. Acoust. 1964;10:156–62.

    Google Scholar 

  • Gomez A, Tang K. Charge and fission of droplets in electrostatic sprays. Phys. Fluids. 1994;6:404–14.

    CAS  Google Scholar 

  • Gurav A, Kodas T, Pluym T, Xiong Y. Aerosol processing of materials. Aerosol Sci. Tech. 1993;19:411–52.

    CAS  Google Scholar 

  • Hong BS, Han JH, Kim ST, Cho YJ, Park MS, Dolukhanyan T, Sung C. Endurable water-reppelent glass for automobiles. Thin Solid Films. 1999;351:274–8.

    CAS  Google Scholar 

  • Huffman M. Liquid source misted chemical deposition (LSMCD) – a critical review. Integr. Ferroelectr. 1995;10:39–53.

    CAS  Google Scholar 

  • Jang GW, Chen C, Gumbs RW. Large-area electrochromic coatings. J. Electrochem. Soc. 1996;143:2591–6.

    CAS  Google Scholar 

  • Jenouvrier P, Cela E, Coutier C, Langlet M, Rimet R, Fick J. Photoluminescence of terbium-organic complex in aerosol–gel-derived planar waveguides. Appl. Phys. B. 2001;73:463–6.

    CAS  Google Scholar 

  • Jenouvrier P, Langlet M, Fick J. High photoluminescence in a new nano-crystalline active phase: YETO. SPIE Proc. 2002;4808:52–9.

    Google Scholar 

  • Jenouvrier P, Langlet M, Rimet R, Fick J. Influence of crystallisation on the photoluminescence properties of Y2–xErxTi2O7 sol–gel thin films. Appl. Phys. A. 2003;77:687–92.

    CAS  Google Scholar 

  • Jergel M, Gallardo AC, Guajardo CF, Strbik V. Tl-based superconductors for high-current, high-field applications. Supercond. Sci. Technol. 1996;9:427–46.

    CAS  Google Scholar 

  • Jimenez C, Langlet M. Formation of TiN by nitridation of TiO2 films deposited by ultrasonically assisted sol–gel technique. Surf. Coat. Tech. 1994;68–69:249–52.

    Google Scholar 

  • Kang YC, Park SB. Preparation of nanometre size oxide particles using filter expansion aerosol generator. J. Mater. Sci. 1996;31:2409–16.

    CAS  Google Scholar 

  • Kang YC, Seup YS, Park SB. Preparation of YAG: europium red phosphors by spray pyrolysis using a filter-expansion aerosol generator. J. Am. Ceram. Soc. 1999;82:2056–60.

    CAS  Google Scholar 

  • Kim HH, Kim KB. Ruthenium oxide thin film electrodes for supercapacitors. Electrochem. Solid-State Lett. 2001;4:A62–4.

    CAS  Google Scholar 

  • Kololuoma T, Haatainen T. Plastic integrated optoelectronics. SPIE Proc. 2002;4647:52–9.

    Google Scholar 

  • Kololuoma T, Oksanen JAI, Raerinne P, Rantala JT. Dye-doped sol–gel coatings for near-infrared laser protection. J. Mater. Res. 2001;16:2186–8.

    CAS  Google Scholar 

  • Lang RJ. Ultrasonic atomization of liquids. J. Acoust. Soc. Am. 1962;34:6–8.

    Google Scholar 

  • Langlet M. Optically active coatings deposited from an ultrasonically generated aerosol. Thin Solid Films. 2001;398–9:71–7.

    Google Scholar 

  • Langlet M., Joubert J.C. Procédé sol gel de dépôt en couches minces par pulvérisation ultrasonore, FR Patent 9014312, 1990; EU Patent 0486393. 1991.

    Google Scholar 

  • Langlet M, Joubert JC. The pyrosol process or the pyrolysis of an aerosol. In: Chemistry of Advanced Materials. Oxford: IUPAC-Blackwell; 1992. p. 55–79.

    Google Scholar 

  • Langlet M, Vautey C. Influence of the deposition parameters on the characteristics of aerosol–gel deposited thin films. J. Sol–gel Sci. Tech. 1997;8:347–51.

    CAS  Google Scholar 

  • Langlet M, Walz D, Marage P, Joubert JC. SiO2 thin films deposited by a new sol–gel technique. J. Non-Cryst. Sol. 1992;147–8:488–92.

    Google Scholar 

  • Langlet M, Marage P, Joubert JC. Aerosol–gel deposition of oxide films in the system SiO2–TiO2. Adv. Sci. Tech. 1995;5:267–74.

    CAS  Google Scholar 

  • Langlet M, Vautey C, Mazeas N. Some aspects of the aerosol–gel process. Thin Solid Films. 1997;299:25–32.

    CAS  Google Scholar 

  • Langlet M, Burgos M, Coutier C, Jimenez C, Morant C, Manso M. Preparation of sol–gel TiO2 thin films at low temperature for AR coating applications. J. Sol–gel Sci. Tech. 2001a;22:139–50.

    CAS  Google Scholar 

  • Langlet M, Coutier C, Fick J, Audier M, Meffre W, Jacquier B, Rimet R. Sol–gel thin film deposition and characterization of a new optically active compound: Er2Ti2O7. Opt. Mater. 2001b;16:463–73.

    CAS  Google Scholar 

  • Langlet M, Jenouvrier P, Fick J, Rimet R. Aerosol–gel deposition of optically active thin films in the system Y2Ti2O7–Er2Ti2O7. J. Sol–gel Sci. Tech. 2003a;26:985–8.

    CAS  Google Scholar 

  • Langlet M, Jenouvrier P, Fick J, Rimet R. Aerosol–gel deposition and spectroscopic characterization of pyrochlore films heavily doped with erbium ions. Opt. Mater. 2003b;25:141–7.

    Google Scholar 

  • Lin Y, Wu C. The properties of antimony-doped tin oxide thin films from the sol–gel process. Surf. Coat. Tech. 1997;88:239–47.

    Google Scholar 

  • Lu J, Chu J, Huang W, Ping Z. Preparation of thick Pb(Zr,Ti)O3 (PZT) films by electrostatic spray deposition (ESD) for applications in micro-system technology. Jpn. J. Appl. Phys. 2002;41:4317–20.

    CAS  Google Scholar 

  • Manso M, Langlet M, Jimenez C, Martinez-Duart JM. Hydroxyapatite coatings obtained by the thermal activation of polymeric sols. Int. J. Inorg. Mater. 2001;3:1153–5.

    CAS  Google Scholar 

  • Manso M, Martinez-Duart JM, Langlet M, Jimenez C, Herrero P, Million E. Aerosol–gel-derived microcrystalline hydroxyapatite coatings. J. Mater. Res. 2002a;17:1482–9.

    CAS  Google Scholar 

  • Manso M, Ogueta S, Garcia P, Perez-Rigueiro J, Jimenez C, Martinez-Duart JM, Langlet M. Mechanical and in vitro testing of aerosol–gel deposited titania coatings for biocompatible applications. Biomaterials. 2002b;23:349–56.

    CAS  Google Scholar 

  • Manso M, Ogueta S, Herrero P, Vazquez L, Langlet M, Garcia P. Biological evaluation of aerosol–gel-derived hydroxyapatite coatings with human mesenchymal stem cells. Biomaterials. 2002c;23:3985–90.

    CAS  Google Scholar 

  • Manso M, Herrero P, Fernández M, Langlet M, Martínez-Duart JM. Textured hydroxyapatite interface onto biomedical Ti based coatings. J. Biomed. Mater. Res. A. 2003a;64:600–5.

    Google Scholar 

  • Manso M, Langlet M, Fernández M, Vázquez L, Martinez-Duart JM. Surface and interface analysis of hydroxyapatite/TiO2 biocompatible structures. Mater. Sci. Eng. C. 2003b;23:451–4.

    Google Scholar 

  • Marage R, Langlet M, Joubert JC. A new route for the deposition of SiO2 sol–gel coatings. Thin Solid Films. 1994a;238:218–27.

    CAS  Google Scholar 

  • Marage P, Langlet M, Joubert JC. Understanding and improving the deposition conditions of SiO2 thin films obtained by ultrasonic sol–gel procedure. J. Sol–Gel Sci. Tech. 1994b;2:615–8.

    CAS  Google Scholar 

  • Mennig M, Kalleder A, Jonschker G, Schmidt H. Sol–gel coatings for the substitution of fluoride or lead containing white decoration on glass. J. Non-Cryst. Sol. 1997;218:395–8.

    CAS  Google Scholar 

  • Moon WS, Chung HJ, Park SB, Woo SI. Effect of lead acetate concentration on the droplet size in liquid source misted chemical deposition. Thin Solid Films. 2000a;358:86–9.

    CAS  Google Scholar 

  • Moon WS, Woo SI, Park SB. preparation and characterization of lead zirconate titanate thin films by liquid source misted chemical deposition. Thin Solid Films. 2000b;359:77–81.

    CAS  Google Scholar 

  • Morse TF, Kilian A, Reinhart L, Risen Jr W, Cipolla Jr JW. Aerosol techniques for glass formation. J. Non-Cryst. Sol. 1991;129:93–100.

    CAS  Google Scholar 

  • Olding T, Sayer M, Barrow D. Ceramic sol–gel composite coatings for electrical insulation. Thin Solid Films. 2001;398–9:581–6.

    Google Scholar 

  • Ortiz A, Alonso JC, Pankov V, Huanosta A, Andrade E. Characterization of amorphous aluminium oxide films prepared by the pyrosol process. Thin Solid Films. 2000;368:74–9.

    CAS  Google Scholar 

  • Primeau N, Vautey C, Langlet M. The effect of thermal annealing on aerosol–gel deposited SiO2 films: a FTIR deconvolution study. Thin Solid Films. 1997;310:47–56.

    CAS  Google Scholar 

  • Sauvet AL, Guindet J, Fouletier J. La0.8Sr0.2Cr0.95Ru0.05O3 (LSCRu) as a new anode material for SOFC using natural gas. Ionics. 1999;5:150–5.

    CAS  Google Scholar 

  • Solayappan N, Derbenwick GF, McMillan LD, Paz de Araujo CA, Hayashi S, Conformal LSMCD. deposition of SrBi2(Ta1–xNbx)2O9. Integr. Ferroelectr. 1997;14:237–46.

    CAS  Google Scholar 

  • Tokumoto MS, Smith A, Santilli CV, Pulcinelli SH, Craievich AF, Elkaim E, Traverse A, Briois V. Structural electrical and optical properties of undoped and indium doped ZnO thin films prepared by the pyrosol process at different temperatures. Thin Solid Films. 2002;416:284–93.

    CAS  Google Scholar 

  • Tourtin F, Armand P, Ibanez A, Tourillon G, Philippot E. Gallium phosphate thin solid films: structural and chemical determination of oxygen surroundings by XANES and XPS. Thin Solid Films. 1998;322:85–92.

    CAS  Google Scholar 

  • Trejo-Valdez M., Jenouvrier P., Fick J., Langlet M. Characterization of optically active and photocurable ORMOSIL thin films deposited using the Aerosol process. J. Mat. Sci. 2004;39:2801–2810.

    Google Scholar 

  • Vasiliev RB, Rumyantseva MN, Ryabova LI, Akimov BA, Labeau M, Langlet M, Gaskov AM. Memory effect and its switching by electric field in solid-state gas sensors. J. Mater. Sci. Eng. B. 2000;77:106–9.

    Google Scholar 

  • Vautey C. PhD thesis, Grenoble. 1998.

    Google Scholar 

  • Vautey C, Burgos M, Langlet M. Aerosol–gel deposition and low temperature post-treatment of SiO2 layers. Thin Solid Films. 1999;347:184–94.

    CAS  Google Scholar 

  • Viguié JC, Spitz J. Chemical vapor deposition at low temperature. J. Electrochem. Soc. 1975;122:585–8.

    Google Scholar 

  • Viitala RI, Langlet M, Simola J, Linden M, Rosenholm JB. Aerosol–gel deposition of doped titania thin films. Thin Solid Films. 2000;368:35–40.

    CAS  Google Scholar 

  • Viitala RI, Simola J, Peltola T, Rahiala H, Langlet M, Rosenholm JB. vitro bioactivity of aerosol–gel deposited TiO2 thin coatings. J. Biomed. Mater. Res. 2001;54:109–14.

    CAS  Google Scholar 

  • Wang J, Curtis CJ, Schulz DL, Ji-Guang Z. Spray deposited V2O3nH2O xerogel films as cathodes in rechargeable lithium batteries. Proc. Symp. Lithium Batteries (Electrochem. Soc. Proc.). 1999;98:374–82.

    Google Scholar 

  • Wilson S, Hawthorne HM, Yang Q, Troczynski T. Scale effects in abrasive wear of composite sol–gel alumina coated light alloys. Wear. 2001;251:1042–50.

    Google Scholar 

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Acknowledgments

The author is warmly grateful toward the following collaborators for their close participation in the aforementioned researches and for rereading the present chapter: M. Burgos, C. Coutier, C. Jimenez, P. Jenouvrier, P. Marage, M. Trejo Valdez, and C. Vautey.

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Correspondence to M. Langlet .

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Langlet, M. (2018). Ultrasonic Pulverization of an Aerosol: A Versatile Tool for the Deposition of Sol-Gel Thin Films. In: Klein, L., Aparicio, M., Jitianu, A. (eds) Handbook of Sol-Gel Science and Technology. Springer, Cham. https://doi.org/10.1007/978-3-319-32101-1_13

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