Abstract
The extraordinary development of micro- and nano-electronics is based on the brilliant idea of Gordon Moore, Robert Noyce, and others who proposed in the early 1970s a model development based on the shrinking of the integrated structures (transistors, connections) in the chips. This provides a long-term road map for technological development as well as a very efficient economic model. The size reduction, all other aspects being equal, results in performance improvements related to the possibility of making faster and more complex devices on the same area of silicon. Each node, typical scale length of the components, follows the same development cycle with massive investments for production and a return on investment at the end of the cycle related to the fact that better-performing, cheaper devices flood the market. The idea was also that the performance improvement was mostly a continuous process and not based on technological breakthrough at each node. Indeed it is reasonable to anticipate that such breakthroughs take a considerable amount of time to be fully realized and implemented. Initially the performances of the chips were largely limited by the active components which are the transistors. Since the mid-1990s this situation is completely reversed and now the chips are limited by interconnects. These limitations are so serious that they contribute to slowing down the microelectronic road map. A first revolution in the field of interconnects was the replacement of aluminum wires by copper wires and the introduction of low K dielectric materials instead of more conventional ones. To overcome current limitations a new material revolution is probably mandatory. Carbon materials such as carbon nanotubes, thanks to their superlative physical properties, can be the future material of choice.
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References
Berger C, Yi Y, Wang ZL, de Heer WA (2002) Multiwalled carbon nanotubes are ballistic conductors at room temperature. Appl Phys A 74:363
Jourdain V, Bichara C (2013) Current understanding of the growth of carbon nanotubes in catalytic chemical vapour deposition. Carbon 58:2–39
Yamada T, Namai T, Hata K, Futaba DN, Mizuno K, Fan J, Yudasaka M, Yumura M, Iijima S (2006) Size-selective growth of double-walled carbon nanotube forests from engineered iron catalysts. Nat Nanotechnol 1:131–136
Dijon J, Fournier A, Szkutnik PD, Okuno H, Jayet C, Fayolle M (2010) Carbon nanotubes for interconnects in future integrated circuits: the challenge of the density. Diam Relat Mater 19(5–6):382–288
Nessim GD, Hart AJ, Kim JS, Acquaviva D, Oh J, Morgan CD, Seita M, Leib JS, Thompson CV (2008) Tuning of vertically-aligned carbon nanotube diameter and areal density through catalyst pre-treatment. Nano Lett 8(11):3587–3593
Zhong G, Warner JH, Fouquet M, Robertson AW, Chen B, Robertson J (2012) Growth of ultrahigh density single-walled carbon nanotube forests by improved catalyst design. ACS Nano 6(4):2893–2903
Yang J, Esconjauregui S, Robertson AW, Guo Y, Hallam T, Sugime H, Zhong G, Duesberg GS, Robertson J (2015) Growth of high-density carbon nanotube forests on conductive TiSiN supports. Appl Phys Lett 106:083108
Kim SM, Pint CL, Amama PB, Zakharov DN, Hauge RH, Maruyama B, Stach EA (2010) Evolution in catalyst morphology leads to carbon nanotube growth termination. J Phys Chem Lett 1:918–922
Robertson J, Zhong G, Esconjauregui CS, Bayer BC, Zhang C, Fouquet M, Hofmann S (2012) Applications of carbon nanotubes grown by chemical vapor deposition. Jpn J Appl Phys 51:01AH01
Jackson R, Grahama S (2009) Specific contact resistance at metal/carbon nanotube interfaces. Appl Phys Lett 94:012109
Koechlin C, Maine S, Haidar R, Trétout B, Loiseau A, Pelouard JL (2010) Electrical characterization of devices based on carbon nanotube films. Appl Phys Lett 96:103501
Franklin AD, Chen Z (2010) Length scaling of carbon nanotube transistors. Nat Nanotechnol 5:858–862
Chiodarelli N, Fournier A, Okuno H, Dijon J (2013) Carbon nanotubes horizontal interconnects with end-bonded contacts, diameters down to 50 nm and lengths up to 20 μm. Carbon 60: 139–145
Chiodarelli N, Delabie A, Masahito S et al (2011) ALD of Al2O3 for carbon nanotube vertical interconnect and its impact on the electrical properties. MRS Proc 1283:46–54
Lee S et al (2011) Integration of carbon nanotube interconnects for full compatibility with semiconductor technologies. J Electrochem Soc 158(11):K193–K196
Santini CA, Volodin A, Van Haesendonck C, De Gendt S, Groeseneken G, Vereecken PM (2011) Carbon nanotube–carbon nanotube contacts as an alternative towards low resistance horizontal interconnects. Carbon 4(9):4004–4012
Kim S, Kulkarni DD, Rykaczewski K, Henry M, Tsukruk VV, Fedorov AG (2012) Fabrication of an ultra-low resistance ohmic contact to MWCNT–metal interconnect using graphitic carbon by electron beam-induced deposition (EBID). IEEE Trans Nanotechnol 11(6):1223–1230
Zhang Z et al (2010) Sharp reduction in contact resistivities by effective Schottky barrier lowering with silicides as diffusion sources. IEEE Electron Device Lett 31:731–733
Chen KN, Fan A, Tan CS, Reif R (2004) Contact resistance measurement of bonded copper interconnects for three-dimensional integration technology. IEEE Electron Device Lett 25(1):10–12
Chiodarelli N, Li Y, Cott DJ, Mertens S, Peys N, Heyns M, De Gendt S, Groeseneken G, Vereecken PM (2011) Integration and electrical characterization of carbon nanotube via interconnects. Microelectron Eng 88:837–843
Chiodarelli N, Richard O, Bender H, Heyns M, De Gendt S, Groeseneken G, Vereecken PM (2012) Correlation between number of walls and diameter in multiwall carbon nanotubes grown by chemical vapor deposition. Carbon 50:1748–1752
Esconjauregui S, Fouquet M, Bayer BC, Ducati C, Smajda R, Hofmann S, Robertson J (2010) Growth of ultrahigh density vertically aligned carbon nanotube forests for interconnects. ACS Nano 4(12):7431–7436
Dijon J, Okuno H, Fayolle M, Vo T, Pontcharra J, Acquaviva D, Bouvet D, Ionescu AM, Esconjauregui CS, Capraro B, Quesnel E, Robertson J (2010) Ultra-high density carbon nanotubes on Al-Cu for advanced vias. IEDM 2010 IEEE international electron devices meeting, pp 33.4.1–33.4.4
Yamazaki Y, Saluma N, Katagiri M, Suzuki M, Sakai T, Sato S, Nihei M, Awano Y (2010) Synthesis of a closely packed carbon nanotube forest by a multi-step growth method using plasma-based chemical vapor deposition. Appl Phys Express 3:55002–55004
Journet C, Maser WK, Bernier P, Loiseau A, Lamyde la Chapelle M, Lefrant S, Deniard P, Leek R, Fischerk JE (1997) Large-scale production of single-walled carbon nanotubes by the electric-arc technique. Nature 388:756–758
Chhowalla M, Teo KBK, Ducati C, Rupesinghe NL, Amaratunga GAJ, Ferrari AC, Roy D, Robertson J, Milne WI (2001) Growth process conditions of vertically aligned carbon nanotubes using plasma enhanced chemical vapor deposition. J Appl Phys 90(10):5308–5317
Zhong G, Iwasaki T, Honda K, Furukawa Y, Ohdomari I, Kawarada H (2005) Low temperature synthesis of extremely dense and vertically aligned single-walled carbon nanotubes. Jpn J Appl Phys 44(4A):1558–1561
Pint CL, Pheasant ST, Parra-Vasquez ANG, Horton CC, Xu Y, Hauge RH (2009) Investigation of optimal parameters for oxide-assisted growth of vertically aligned single-walled carbon nanotubes. J Phys Chem C 113:4125
Sato S, Nihei M, Mimura A, Kawabata A, Kondo D, Shioya H, Iwai T, Mishima M, Ohfuti M, Awano Y (2006) Novel approach to fabricating carbon nanotube via interconnects using size-controlled catalyst nanoparticles. In: Proceedings second ITC conference, in Fukuoka, pp230–232
Pint CL, Xu Y-Q, Pasquali M, Hauge RH (2008) Formation of highly dense aligned ribbons and transparent films of single-walled carbon nanotubes directly from carpets. ACS Nano 2(9):1871–1878
Futaba DN, Hata K, Yamada T, Hiraoka T, Hayamizu Y, Kakudate Y, Tanaike O, Hatori H, Yumura M, Iijima S (2006) Shape-engineerable and highly densely packed single-walled carbon nanotubes and their application as super-capacitor electrodes. Nat Mater 5:987–994
Hayamizu Y, Yamada T, Mizuno K, Davis RC, Futaba DN, Yumura M, Hata K (2008) Integrated three-dimensional microelectromechanical devices from processable carbon nanotube wafers. Nat Nanotechnol 3:289
Lu J, Miao J, Xu T, Yan B, Yu T, Shen Z (2011) Growth of horizontally aligned dense carbon nanotubes from trench sidewalls. Nanotechnology 22:265614
Guerin H, Le Poche H, Pohle R, Bernard LS, Buitrago E, Ramos R, Dijon J, Ionescu AM (2014) High-yield, in-situ fabrication and integration of horizontal carbon nanotube arrays at the wafer scale for robust ammonia sensors. Carbon 78:326–338
Wang Y, Maspoch D, Zou S, Schatz G, Smalley R, Mirkin C (2006) Controlling the shape, orientation, and linkage of carbon nanotube features with nano affinity templates. Proc Natl Acad Sci USA 103:2026–2031
Ko H, Tsukruk V (2006) Liquid-crystalline processing of highly oriented carbon nanotube arrays for thin-film transistors. Nano Lett 6:1443–1448
Chen XQ, Saito T, Yamada H, Matsushige K (2001) Aligning single-wall carbon nanotubes with an alternating-current electric field. Appl Phys Lett 78:3714
Vijayaraghavan A, Blatt S, Weissenberger D, Oron-Carl M, Hennrich F, Gerthsen D, Hahn H, Krupke R (2007) Ultra-large-scale directed assembly of single-walled carbon nanotube devices. Nano Lett 7(6):1556–1560
Steiner M, Engel M, Lin Y-M, Wu Y, Jenkins K, Farmer DB, Humes JJ, Yoder NL, Seo J-WT, Green AA et al (2012) High-frequency performance of scaled carbon nanotube array field-effect transistors. Appl Phys Lett 101:053123
Seichepine F, Salomon S, Collet M, Guillon S, Nicu L, Larrieu G, Flahaut E, Vieu C (2012) A combination of capillary and dielectrophoresis-driven assembly methods for wafer scale integration of carbon-nanotube-based nanocarpets. Nanotechnology 23:095303
Cao Q, Han S-J, Tulevski GS, Zhu Y, Lu DD, Haensch W (2013) Arrays of single-walled carbon nanotubes with full surface coverage for high-performance electronics. Nat Nanotechnol 8:180–186
Chiodarelli N, Fournier A, Dijon J (2013) Impact of the contact’s geometry on the line resistivity of carbon nanotubes bundles for applications as horizontal interconnects. Appl Phys Lett 103:053115. doi:10.1063/1.4817648
Dijon J, Chiodarelli N, Fournier A, Okuno H, Ramos R (2013) Horizontal carbon nanotube interconnects for advanced integrated circuits. Mater Res Soc Symp Proc 1559: © 2013 Materials Research Society. doi:10.1557/opl.2013
Leroy WP, Detavernier C, Van Meirhaeghe RL, Kellock AJ, Lavoie C (2006) Solid-state formation of titanium carbide and molybdenum carbide as contacts for carbon-containing semiconductors. J Appl Phys 99:063704
Zienert A, Schuster J, Gessner T (2014) Metallic carbon nanotubes with metal contacts: electronic structure and transport. Nanotechnology 25:425203. doi:10.1088/0957-4484/25/42/425203
Zhang Y, Franklin NW, Chen RJ, Dai H (2000) Metal coating on suspended carbon nanotubes and its implication to metal-tube interaction. Chem PhysLett 331:35–41
Kim W et al (2005) Electrical contacts to carbon nanotubes down to 1 nm in diameter. Appl Phys Lett 87:173101
Wang M-S, Golberg D, Bando Y (2010) Superstrong low-resistant carbon nanotube–carbide–metal nanocontacts. Adv Mater 22:5350–5355
Reeves GK, Harrison HB (1982) Obtaining the specific contact resistance from transmission line model measurements. IEEE Electron Device Lett 3:111–113
Solomon PM (2011) Contact resistance to a one-dimensional quasi-ballistic nanotube/wire. IEEE Electron Device Lett 32:246–248
Casparis L (2010) Conductance anisotropy in natural and HOPG graphite. Master Thesis, University of Basel
Primak W (1956) C-axis electrical conductivity of graphite. Phys Rev 103:544
Yoon YG, Delaney P, Louie SG (2002) Quantum conductance of multiwall carbon nanotubes. Phys Rev B 66:073407
Bourlon B, Miko C, Forro L, Glattli DC, Bachtold A (2004) Determination of the intershell conductance in multiwalled carbon nanotubes. Phys Rev Lett 93(17):176806
Chai Y, Hazeghi A, Takei K, Chen H-Y, Chan PCH, Javey A, Wong HSP (2010) Graphitic interfacial layer to carbon nanotube for low electrical contact resistance. IEDM, San Francisco, pp 210–213
Lin A (2010) Carbon nanotube synthesis device fabrication, and circuit design for digital logic applications. PhD Thesis, Stanford University
Li H, Liu W, Cassell AM, Kreupl F, Banerjee K (2013) Low-resistivity long-length horizontal carbon nanotube bundles for interconnect applications—part II: characterization. IEEE Trans Electron Devices 60(9):2870
Tawfick S, O’Brien K, Hart AJ (2009) Flexible high-conductivity carbon-nanotube interconnects made by rolling and printing. Small 5(21):2467–2473
Kim YL, Li B, An X, Hahm MG, Chen L, Washington M, Ajayan PM, Nayak SK, Busnaina A, Kar S, Jung YJ (2009) Highly aligned scalable platinum-decorated single-wall carbon nanotube arrays for nanoscale electrical interconnects. ACS Nano 3:2818–2826
Dijon J, Ramos R, Fournier A, Le Poche H, Fournier H, Okuno H, Simonato JP (2014) Record resistivity of in-situ grown horizontal carbon nanotube interconnect. In: Technical proceedings of the 2014 NSTI nanotechnology conference and expo, NSTI-Nanotech 2014, vol 3, pp 17–20
Close GF, Wong H-SP (2008) Assembly and electrical characterization of multiwall carbon nanotube interconnects. IEEE Trans Nanotechnol 7(5):596–600
Pint CL, Xu Y-Q, Morosan E, Hauge RH (2009) Alignment dependence of one-dimensional electronic hopping transport observed in films of highly aligned, ultralong single-walled carbon nanotubes. Appl Phys Lett 94:182107
Behabtu N, Young CC, Tsentalovich DE, Kleinerman O et al (2013) Strong, light, multifunctional fibers of carbon nanotubes with ultrahigh conductivity. Science 339:182–185
Zhao Y, Wei J, Vajtai R, Ajayan PM, Barrera EV (2011) Iodine doped carbon nanotube cables exceeding specific electrical conductivity of metals. Sci Rep 83:1–5. doi:10.1038/srep00083
Wang JN et al (2014) High-strength carbon nanotube fibre-like ribbon with high ductility and high electrical conductivity. Nat Commun 5:3848. doi:10.1038/ncomms4848
Liu K, Sun Y, Zhou R, Zhu H, Wang J, Liu L, Fan S, Jiang K (2010) Carbon nanotube yarns with high tensiles strength made by a twisting and shrinking method. Nanotechnology 21:045708. doi:10.1088/0957-4484/21/4/045708
Wei J, Ci L, Jiang B, Li Y, Zhang X, Zhu H, Xua C, Wua D (2003) Preparation of highly pure double-walled carbon nanotubes. J Mater Chem 13:1340–1344
Bedewy M, Meshot ER, John Hart A (2012) Diameter-dependent kinetics of activation and deactivation in carbon nanotube population growth. Carbon 50:5106–5116
Collins PG, Hersam M, Arnold M, Martel R, Avouris P (2001) Current saturation and electrical breakdown in multiwalled carbon nanotubes. Phys Rev Lett 86(14):3128–3131
Wei BQ et al (2001) Reliability and current carrying capacity of carbon nanotubes. Appl Phys Lett 79:1172–1174
Yang Y, Murali R (2010) Impact of size effect on graphene nanoribbon transport. IEEE Electron Device Lett 31:237–239
Li S, Yu Z, Yen SF, Tang WC, Burke PJ (2004) Carbon nanotube transistor operation at 2.6 GHz. Nano Lett 4(4):753–756
Mann D, Javey A, Kong J, Wang Q, Dai H (2003) Ballistic transport in metallic nanotubes with reliable Pd ohmic contacts. Nano Lett 3(11):1541–1544
Ebbessen TW, Lezec HJ, Hiura H, Bennet JW, Ghaemi HF, Thio T (1996) Electrical conductivity of individual carbon nanotubes. Nature 382:54–56
Kreupl F, Graham AP, Duesberg GS, Steinhögl W, Liebau M, Unger E, Hönlein W (2002) Carbon nanotubes in interconnects applications. Microelectron Eng 64:399–408
Bachtold A, Fuhrer MS, Plyasunov S, Forero M, Anderson EH, Zettl A, McEuen PL (2000) Scanned probe microscopy of electronic transport in carbon nanotubes. Phys Rev Lett 84:6082
Naeemi A, Meindl JD (2006) Compact physical models for multiwall carbon-nanotube interconnects. IEEE Electron Device Lett 27(5):338–340
Rutherglen C, Jain D, Burke P (2009) Nanotube electronics for radiofrequency applications. Nat Nanotechnol 4:811
Ding L, Yuan D, Liu J (2008) Growth of high-density parallel arrays of long single-walled carbon nanotubes on quartz substrates. J Am Chem Soc 130:5428
Ibrahim I, Bachmatiuk A, Börrnert F, Blüher J, Zhang S, Wolff U, Büchner B, Cuniberti G, Rümmeli MH (2011) Optimizing substrate surface and catalyst conditions for high yield chemical vapor deposition grown epitaxially aligned single-walled carbon nanotubes. Carbon 49:5029
Zhou W, Ding L, Yang S, Liu J (2011) Synthesis of high-density, large-diameter, and aligned single-walled carbon nanotubes by multiple-cycle growth methods. ACS Nano 5(5): 3849–3857
Hu Y et al (2015) Growth of high-density horizontally aligned SWNT arrays using Trojan catalysts. Nat Commun 6:6099. doi:10.1038/ncomms7099
Hou P-X, Li W-S, Zhao S-Y, Li G-X, Shi C, Liu C, Cheng H-M (2014) Preparation of metallic single-wall carbon nanotubes by selective etching. ACS Nano 8(7):7156–7162
Wang Y, Liu Y, Li X, Cao L, Wei D, Zhang H, Shi D, Yu G, Kajiura H, Li Y (2007) Direct enrichment of metallic single-walled carbon nanotubes induced by the different molecular composition of monohydroxy alcohol homologues. Small 3:1486
Patil N, Lin A, Myers ER, Ryu K, Badmeav A, Zhu C, Wong H-SP, Mitra S (2009) Wafer-scale growth and transfer of aligned single-walled carbon nanotubes. IEEE Trans Nanotechnol 8(4):498–504
Choi WJ, Chung YJ, Kim YH, Han J, Lee Y-K, Kong K, Chang H, Lee YK, Kim BG, Lee J-O (2014) Drawing circuits with carbon nanotubes: scratch-induced graphoepitaxial growth of carbon nanotubes on amorphous silicon oxide substrates. Sci Report 4:5289. doi:10.1038/srep05289
Yu Q, Qin G, Li H et al (2006) Mechanism of horizontally aligned growth of single-wall carbon nanotubes on R-plane sapphire. J Phys Chem B 110:22676–22680
Huang S, Woodson M, Smalley R, Liu J (2004) Growth mechanism of oriented long single walled carbon nanotubes using fast-heating chemical vapor deposition process. Nano Lett 4(6):1025–1028
Terrones M, Ajayan PM et al (2002) N-doping and coalescence of carbon nanotubes: synthesis and electronic properties. Appl Phys A 74:355–361
Dresselhaus MS, Dresselhaus G (2002) Intercalation compounds of graphite. Adv Phys 51(1):1–186. doi:10.1080/00018730110113644
Esconjauregui S, D’Arsie L, Guo Y, Yang J, Sugime H, Caneva S, Cepek C, Robertson J (2015) Efficient transfer doping of carbon nanotube forests by MoO3. ACS Nano 9(10):10422–10430
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Dijon, J. (2017). Overview of Carbon Nanotubes for Horizontal On-Chip Interconnects. In: Todri-Sanial, A., Dijon, J., Maffucci, A. (eds) Carbon Nanotubes for Interconnects. Springer, Cham. https://doi.org/10.1007/978-3-319-29746-0_6
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