Abstract
Chemical vapor deposition (CVD) is a powerful method to synthesize various carbon nanostructures (e.g., carbon nanotubes). A conventional CVD process has to be carried out at the temperatures over 600 °C. To extend the applications of carbon nanostructures, for example in the semiconductor industry, low-temperature synthesis processes are thus always pursued. In this chapter we review the CVD growth of carbon nanostructures at low temperatures (<450 °C). These growth processes are discussed in detail with respect to the applied catalyst system, carbon source, reaction atmosphere, catalyst faces, morphology control as well as unique structural characteristics of grown products. For the low-temperature CVD growth, catalytic reaction occurring on the low index faces of a metal catalyst is a crucial issue, and the growth is rate-limited by surface diffusion. Instead of the classical Vapor-Liquid-Solid (VLS) growth mechanism, the growth mechanism at low temperatures is interpreted with a novel Vapor-Facet-Solid (VFS) mechanism. Due to their unique features, the synthesized carbon nanostructures are promising to be applied for interconnects in large-scale integrated circuits, field emission, microwave adsorption, and as the anode material of lithium ion secondary battery, etc.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Similar content being viewed by others
References
S. Iijima, Helical microtubules of graphitic carbon. Nature 354(6348), 56–58 (1991). doi:10.1038/354056a0
J. Hone, M.C. Llaguno, N.M. Nemes, A.T. Johnson, J.E. Fischer, D.A. Walters, M.J. Casavant, J. Schmidt, R.E. Smalley, Electrical and thermal transport properties of magnetically aligned single walt carbon nanotube films. Appl. Phys. Lett. 77(5), 666–668 (2000). doi:10.1063/1.127079
M.F. Yu, B.S. Files, S. Arepalli, R.S. Ruoff, Tensile loading of ropes of single wall carbon nanotubes and their mechanical properties. Phys. Rev. Lett. 84(24), 5552–5555 (2000). doi:10.1103/PhysRevLett.84.5552
H. Kataura, Y. Kumazawa, Y. Maniwa, I. Umezu, S. Suzuki, Y. Ohtsuka, Y. Achiba, Optical properties of single-wall carbon nanotubes. Synth. Met. 103(1–3), 2555–2558 (1999). doi:10.1016/s0379-6779(98)00278-1
J.L. Hutchison, N.A. Kiselev, E.P. Krinichnaya, A.V. Krestinin, R.O. Loutfy, A.P. Morawsky, V.E. Muradyan, E.D. Obraztsova, J. Sloan, S.V. Terekhov, D.N. Zakharov, Double-walled carbon nanotubes fabricated by a hydrogen arc discharge method. Carbon 39(5), 761–770 (2001). doi:10.1016/s0008-6223(00)00187-1
E.G. Gamaly, T.W. Ebbesen, Mechanism of carbon nanotube formation in the arc-discharge. Phys. Rev. B. 52(3), 2083–2089 (1995). doi:10.1103/PhysRevB.52.2083
C.D. Scott, S. Arepalli, P. Nikolaev, R.E. Smalley, Growth mechanisms for single-wall carbon nanotubes in a laser-ablation process. Appl. Phys. A Mater. Sci. Process. 72(5), 573–580 (2001). doi:10.1007/s003390100761
Y. Zhang, S. Iijima, Formation of single-wall carbon nanotubes by laser ablation of fullerenes at low temperature. Appl. Phys. Lett. 75(20), 3087–3089 (1999). doi:10.1063/1.125239
A. Tanaka, S.H. Yoon, I. Mochida, Formation of fine Fe–Ni particles for the non-supported catalytic synthesis of uniform carbon nanofibers. Carbon 42(7), 1291–1298 (2004). doi:10.1016/j.carbon.2004.01.029
J.H. Xia, X. Jiang, C.L. Jia, C. Dong, Hexahedral nanocementites catalyzing the growth of carbon nanohelices. Appl. Phys. Lett. 92(6), 063121 (2008). doi:10.1063/1.2842410
S. Motojima, Q.Q. Chen, Three-dimensional growth mechanism of cosmo-mimetic carbon microcoils obtained by chemical vapor deposition. J. Appl. Phys. 85(7), 3919–3921 (1999). doi:10.1063/1.369765
G.Y. Zhang, X. Jiang, E.G. Wang, Tubular graphite cones. Science 300(5618), 472–474 (2003). doi:10.1126/science.1082264
X.S. Qi, W. Zhong, Y. Deng, C.T. Au, Y.W. Du, Characterization and magnetic properties of helical carbon nanotubes and carbon nanobelts synthesized in acetylene decomposition over Fe–Cu nanoparticles at 450 °C. J. Phys. Chem. C 113(36), 15934–15940 (2009). doi:10.1021/jp905387v
A.M. Cassell, J.A. Raymakers, J. Kong, H.J. Dai, Large scale CVD synthesis of single-walled carbon nanotubes. J. Phys. Chem. B 103(31), 6484–6492 (1999). doi:10.1021/jp990957s
E. Couteau, K. Hernadi, J.W. Seo, L. Thien-Nga, C. Miko, R. Gaal, L. Forro, CVD synthesis of high-purity multiwalled carbon nanotubes using CaCO3 catalyst support for large-scale production. Chem. Phys. Lett. 378(1–2), 9–17 (2003). doi:10.1016/s0009-2614(03)01218-1
Y.A. Kim, T. Hayashi, S. Naokawa, T. Yanaisawa, M. Endo, Comparative study of herringbone and stacked-cup carbon nanofibers. Carbon 43(14), 3005–3008 (2005). doi:10.1016/j.carbon.2005.06.037
Y.A. Zhu, Z.J. Sui, T.J. Zhao, Y.C. Dai, Z.M. Cheng, W.K. Yuan, Modeling of fishbone-type carbon nanofibers: a theoretical study. Carbon 43(8), 1694–1699 (2005). doi:10.1016/j.carbon.2005.02.011
A. de Lucas, P.B. Garcia, A. Garrido, A. Romero, J.L. Valverde, Catalytic synthesis of carbon nanofibers with different graphene plane alignments using Ni deposited on iron pillared clays. Appl. Catal. A Gen. 301(1), 123–132 (2006). doi:10.1016/j.apcata.2005.11.026
H. Cui, O. Zhou, B.R. Stoner, Deposition of aligned bamboo-like carbon nanotubes via microwave plasma enhanced chemical vapor deposition. J. Appl. Phys. 88(10), 6072–6074 (2000). doi:10.1063/1.1320024
C.J. Lee, J. Park, Growth model of bamboo-shaped carbon nanotubes by thermal chemical vapor deposition. Appl. Phys. Lett. 77(21), 3397–3399 (2000). doi:10.1063/1.1320851
C.J. Lee, J.H. Park, J. Park, Synthesis of bamboo-shaped multiwalled carbon nanotubes using thermal chemical vapor deposition. Chem. Phys. Lett. 323(5–6), 560–565 (2000). doi:10.1016/s0009-2614(00)00548-0
M. Lin, J.P.Y. Tan, C. Boothroyd, K.P. Loh, E.S. Tok, Y.L. Foo, Dynamical observation of bamboo-like carbon nanotube growth. Nano Lett. 7(8), 2234–2238 (2007). doi:10.1021/nl070681x
J.P. Tu, L.P. Zhu, K. Hou, S.Y. Guo, Synthesis and frictional properties of array film of amorphous carbon nanofibers on anodic aluminum oxide. Carbon 41(6), 1257–1263 (2003). doi:10.1016/s0008-6223(03)00047-2
Z.W. Pan, S.S. Xie, B.H. Chang, L.F. Sun, W.Y. Zhou, G. Wang, Direct growth of aligned open carbon nanotubes by chemical vapor deposition. Chem. Phys. Lett. 299(1), 97–102 (1999). doi:10.1016/s0009-2614(98)01240-8
M.J. de Andrede, M.D. Lima, C.P. Bergmann, G.D. Ramminger, N.M. Balzaretti, T.M.H. Costa, M.R. Gallas, Carbon nanotube/silica composites obtained by sol-gel and high-pressure techniques. Nanotechnology 19(26), 265607 (2008). doi:10.1088/0957-4484/19/26/265607
R.R. Bacsa, C. Laurent, A. Peigney, W.S. Bacsa, T. Vaugien, A. Rousset, High specific surface area carbon nanotubes from catalytic chemical vapor deposition process. Chem. Phys. Lett. 323(5–6), 566–571 (2000). doi:10.1016/s0009-2614(00)00558-3
J.P. Pinheiro, M.C. Schouler, P. Gadelle, Nanotubes and nanofilaments from carbon monoxide disproportionation over Co/MgO catalysts I. Growth versus catalyst state. Carbon 41(15), 2949–2959 (2003). doi:10.1016/s0008-6223(03)00410-x
Y.M. Li, W. Kim, Y.G. Zhang, M. Rolandi, D.W. Wang, H.J. Dai, Growth of single-walled carbon nanotubes from discrete catalytic nanoparticles of various sizes. J. Phys. Chem. B 105(46), 11424–11431 (2001). doi:10.1021/jp012085b
D. Venegoni, P. Serp, R. Feurer, Y. Kihn, C. Vahlas, P. Kalck, Parametric study for the growth of carbon nanotubes by catalytic chemical vapor deposition in a fluidized bed reactor. Carbon 40(10), 1799–1807 (2002). doi:10.1016/s0008-6223(02)00057-x
K. Hernadi, A. Fonseca, J.B. Nagy, D. Bernaerts, A. Fudala, A.A. Lucas, Catalytic synthesis of carbon nanotubes using zeolite support. Zeolites 17(5–6), 416–423 (1996). doi:10.1016/s0144-2449(96)00088-7
H. Ago, T. Komatsu, S. Ohshima, Y. Kuriki, M. Yumura, Dispersion of metal nanoparticles for aligned carbon nanotube arrays. Appl. Phys. Lett. 77(1), 79–81 (2000). doi:10.1063/1.126883
Y. Li, J. Liu, Y.Q. Wang, Z.L. Wang, Preparation of monodispersed Fe–Mo nanoparticles as the catalyst for CVD synthesis of carbon nanotubes. Chem. Mater. 13(3), 1008–1014 (2001). doi:10.1021/cm000787s
C.L. Cheung, A. Kurtz, H. Park, C.M. Lieber, Diameter-controlled synthesis of carbon nanotubes. J. Phys. Chem. B. 106(10), 2429–2433 (2002). doi:10.1021/jp0142278
Y. Qin, Z.K. Zhang, Z.L. Cui, Helical carbon nanofibers with a symmetric growth mode. Carbon 42(10), 1917–1922 (2004). doi:10.1016/j.carbon.2004.03.020
N.G. Shang, X. Jiang, Large-sized tubular graphite cones with nanotube tips. Appl. Phys. Lett. 87(16), 163102 (2005). doi:10.1063/1.2093919
N.G. Shang, W.I. Milne, X. Jiang, Tubular graphite cones with single-crystal nanotips and their antioxygenic properties. J. Am. Chem. Soc. 129(28), 8907–8911 (2007). doi:10.1021/ja071830g
G.Y. Zhang, X.C. Ma, D.Y. Zhong, E.G. Wang, Polymerized carbon nitride nanobells. J. Appl. Phys. 91(11), 9324–9332 (2002). doi:10.1063/1.1476070
Y.G. Zhang, A.L. Chang, J. Cao, Q. Wang, W. Kim, Y.M. Li, N. Morris, E. Yenilmez, J. Kong, H.J. Dai, Electric-field-directed growth of aligned single-walled carbon nanotubes. Appl. Phys. Lett. 79(19), 3155–3157 (2001). doi:10.1063/1.1415412
A. Ural, Y.M. Li, H.J. Dai, Electric-field-aligned growth of single-walled carbon nanotubes on surfaces. Appl. Phys. Lett. 81(18), 3464–3466 (2002). doi:10.1063/1.1518773
R.S. Wagner, W.C. Ellis, Vapor-liquid-solid mechanism of single crystal growth (New method growth catalysis from impurity whisker epitaxial + large crystals Si E). Appl. Phys. Lett. 4(5), 89 (1964). doi:10.1063/1.1753975
H. Kanzow, A. Ding, Formation mechanism of single-wall carbon nanotubes on liquid-metal particles. Phys. Rev. B 60(15), 11180–11186 (1999). doi:10.1103/PhysRevB.60.11180
M.A. Ermakova, D.Y. Ermakov, A.L. Chuvilin, G.G. Kuvshinov, Decomposition of methane over iron catalysts at the range of moderate temperatures: the influence of structure of the catalytic systems and the reaction conditions on the yield of carbon and morphology of carbon filaments. J. Catal. 201(2), 183–197 (2001). doi:10.1006/jcat.2001.3243
Y. Shibuta, S. Maruyama, Molecular dynamics simulation of formation process of single-walled carbon nanotubes by CCVD method. Chem. Phys. Lett. 382(3–4), 381–386 (2003). doi:10.1016/j.cplett.2003.10.080
S. Tsunekawa, S. Ito, Y. Kawazoe, J.T. Wang, Critical size of the phase transition from cubic to tetragonal in pure zirconia nanoparticles. Nano Lett. 3(7), 871–875 (2003). doi:10.1021/ni034129t
S.S. Fan, W.J. Liang, H.Y. Dang, N. Franklin, T. Tombler, M. Chapline, H.J. Dai, Carbon nanotube arrays on silicon substrates and their possible application. Physica E 8(2), 179–183 (2000). doi:10.1016/s1386-9477(00)00136-3
R.T.K. Baker, Catalytic growth of carbon filaments. Carbon 27(3), 315–323 (1989). doi:10.1016/0008-6223(89)90062-6
J. Gavillet, A. Loiseau, C. Journet, F. Willaime, F. Ducastelle, J.C. Charlier, Root-growth mechanism for single-wall carbon nanotubes. Phys. Rev. Lett. 87(27), 275504 (2001). doi:10.1103/PhysRevLett.87.275504
N.M. Rodriguez, A. Chambers, R.T.K. Baker, Catalytic engineering of carbon nanostructures. Langmuir 11(10), 3862–3866 (1995). doi:10.1021/la00010a042
R.T. Yang, J.P. Chen, Mechanism of carbon-filament growth on metal-catalysts. J. Catal. 115(1), 52–64 (1989). doi:10.1016/0021-9517(89)90006-7
J.A. Lobo, G.H. Geiger, Thermodynamics and solubility of carbon in ferrite and ferritic Fe–Mo alloys. Metall. Trans. A Phys. Metall. Mater. Sci. 7(9), 1347–1357 (1976). doi:10.1007/bf02658820
C.P. Deck, K. Vecchio, Prediction of carbon nanotube growth success by the analysis of carbon-catalyst binary phase diagrams. Carbon 44(2), 267–275 (2006). doi:10.1016/j.carbon.2005.07.023
T. Maruyama, K. Sato, Y. Mizutani, K. Tanioku, T. Shiraiwa, S. Naritsuka, Low-temperature synthesis of single-walled carbon nanotubes by alcohol gas source growth in high vacuum. J. Nanosci. Nanotechnol. 10(6), 4095–4101 (2010). doi:10.1166/jnn.2010.2000
J. Highfield, Y.S. Loo, Z. Zhong, B. Grushko, Thermogravimetric studies of carbon nanofiber formation from methane at low temperature over Ni-based skeletal catalysts and the effect of substrate pre-carburization. Carbon 45(13), 2597–2607 (2007). doi:10.1016/j.carbon.2007.08.012
D. He, J. Bai, Acetylene-enhanced growth of carbon nanotubes on ceramic microparticles for multi-scale hybrid structures. Chem. Vap. Depos. 17(4–6), 98–106 (2011). doi:10.1002/cvde.201006878
A. Magrez, J.W. Seo, R. Smajda, B. Korbely, J.C. Andresen, M. Mionic, S. Casimirius, L. Forro, Low-temperature, highly efficient growth of carbon nanotubes on functional materials by an oxidative dehydrogenation reaction. ACS Nano 4(7), 3702–3708 (2010). doi:10.1021/nn100279j
N. Halonen, A. Sapi, L. Nagy, R. Puskas, A.-R. Leino, J. Maklin, J. Kukkola, G. Toth, M.-C. Wu, H.-C. Liao, W.-F. Su, A. Shchukarev, J.-P. Mikkola, A. Kukovecz, Z. Konya, K. Kordas, Low-temperature growth of multi-walled carbon nanotubes by thermal CVD. Physica Status Solidi B Basic Solid State Phys. 248(11), 2500–2503 (2011). doi:10.1002/pssb.201100137
O. Pitkanen, N. Halonen, A.R. Leino, J. Maklin, A. Dombovari, J.H. Lin, G. Toth, K. Kordas, Low-temperature growth of carbon nanotubes on bi- and tri-metallic catalyst templates. Top. Catal. 56(9–10), 522–526 (2013). doi:10.1007/s11244-013-0047-9
Y.M. Shyu, F.C.N. Hong, Low-temperature growth and field emission of aligned carbon nanotubes by chemical vapor deposition. Mater. Chem. Phys. 72(2), 223–227 (2001). doi:10.1016/s0254-0584(01)00441-2
Y.M. Shyu, F.C.N. Hong, The effects of pre-treatment and catalyst composition on growth of carbon nanofibers at low temperature. Diam. Relat. Mater. 10(3–7), 1241–1245 (2001). doi:10.1016/s0925-9635(00)00550-1
K. Aoki, T. Yamamoto, H. Furuta, T. Ikuno, S. Honda, M. Furuta, K. Oura, T. Hirao, Low-temperature growth of carbon nanofiber by thermal chemical vapor deposition using CuNi catalyst. Jpn. J. Appl. Phys. Part 1 Regular Pap. Brief Commun. Rev. Pap. 45(6A), 5329–5331 (2006). doi:10.1143/jjap.45.5329
N. Na, D.Y. Kim, Y.-G. So, Y. Ikuhara, S. Noda, Simple and engineered process yielding carbon nanotube arrays with 1.2 × 1013 cm−2 wall density on conductive underlayer at 400 °C. Carbon 81, 773–781 (2015). doi:10.1016/j.carbon.2014.10.023
K. Tanioku, T. Maruyama, S. Naritsuka, Low temperature growth of carbon nanotubes on Si substrates in high vacuum. Diam. Relat. Mater. 17(4–5), 589–593 (2008). doi:10.1016/j.diamond.2007.10.028
X. Li, Z. Xu, One-step catalytic growth of carbon nanofiber arrays vertically aligned on carbon substrate. Mater. Res. Bull. 47(6), 1557–1561 (2012). doi:10.1016/j.materresbull.2012.02.027
Y. Ma, C. Weimer, N. Yang, L. Zhang, T. Staedler, X. Jiang, Low-temperature growth of carbon nanofiber using a vapor–facet–solid process. Mater. Today Commun. 2, e55–e61 (2015). doi:10.1016/j.mtcomm.2014.12.003
B. Yu, S. Wang, Q. Zhang, Y. He, H. Huang, J. Zou, Ni3C-assisted growth of carbon nanofibres 300 °C by thermal CVD. Nanotechnology 25(32), 325602 (2014). doi:10.1088/0957-4484/25/32/325602
W.-H. Chiang, R.M. Sankaran, Synergistic effects in bimetallic nanoparticles for low temperature carbon nanotube growth. Adv. Mater. 20(24), 4857–4861 (2008). doi:10.1002/adma.200801006
Y. Ma, X. Sun, N. Yang, J. Xia, L. Zhang, X. Jiang, Shape-controlled growth of carbon nanostructures: yield and mechanism. Chem. Eur. J. 21, 12370–12375 (2015). doi:10.1002/chem.201500440
Y. Qin, Q. Zhang, Z.L. Cui, Effect of synthesis method of nanocopper catalysts on the morphologies of carbon nanofibers prepared by catalytic decomposition of acetylene. J. Catal. 223(2), 389–394 (2004). doi:10.1016/j.jcat.2004.02.004
J.H. Xia, X. Jiang, C.L. Jia, The size effect of catalyst on the growth of helical carbon nanofibers. Appl. Phys. Lett. 95(22), 223110 (2009). doi:10.1063/1.3271031
Y. Qin, M. Eggers, T. Staedler, X. Jiang, Symmetric growth of carbon nanosheets on Cu nanowires by a surface diffusion mechanism. Nanotechnology 18(34), 345607 (2007). doi:10.1088/0957-4484/18/34/345607
Y. Qin, X. Jiang, Z.L. Cui, Low-temperature synthesis of amorphous carbon nanocoils via acetylene coupling on copper nanocrystal surfaces at 468 K: a reaction mechanism analysis. J. Phys. Chem. B 109(46), 21749–21754 (2005). doi:10.1021/jp054412b
X. Sun, Y.W. Zhang, R. Si, C.H. Yan, Metal (mn Co, and Cu) oxide nanocrystals from simple formate precursors. Small 1(11), 1081–1086 (2005). doi:10.1002/smll.200500119
J.H. Xia, Growth of carbon nanofibers studied by using transmission electron microscopy. Shaker Verlag, D-52018 Aachen (2010)
A.J. Hart, A.H. Slocum, L. Royer, Growth of conformal single-walled carbon nanotube films from Mo/Fe/Al2O3 deposited by electron beam evaporation. Carbon 44(2), 348–359 (2006). doi:10.1016/j.carbon.2005.07.008
Y.J. Tian, Z. Hu, Y. Yang, X.Z. Wang, X. Chen, H. Xu, Q. Wu, W.J. Ji, Y. Chen, In situ TA-MS study of the six-membered-ring-based growth of carbon nanotubes with benzene precursor. J. Am. Chem. Soc. 126(4), 1180–1183 (2004). doi:10.1021/ja037561i
B. Zheng, C.G. Lu, G. Gu, A. Makarovski, G. Finkelstein, J. Liu, Efficient CVD growth of single-walled carbon nanotubes on surfaces using carbon monoxide precursor. Nano Lett. 2(8), 895–898 (2002). doi:10.1021/nl025634d
A.J. Hart, A.H. Slocum, Rapid growth and flow-mediated nucleation of millimeter-scale aligned carbon nanotube structures from a thin-film catalyst. J. Phys. Chem. B. 110(16), 8250–8257 (2006). doi:10.1021/jp055498b
M. Jung, K.Y. Eun, J.K. Lee, Y.J. Baik, K.R. Lee, J.W. Park, Growth of carbon nanotubes by chemical vapor deposition. Diam. Relat. Mater. 10(3–7), 1235–1240 (2001). doi:10.1016/s0925-9635(00)00446-5
A.V. Vasenkov, D. Sengupta, M. Frenklach, Multiscale modeling catalytic decomposition of hydrocarbons during carbon nanotube growth. J. Phys. Chem. B. 113(7), 1877–1882 (2009). doi:10.1021/jp808346h
G.D. Nessim, A. Al-Obeidi, H. Grisaru, E.S. Polsen, C.R. Oliver, T. Zimrin, A.J. Hart, D. Aurbach, C.V. Thompson, Synthesis of tall carpets of vertically aligned carbon nanotubes by in situ generation of water vapor through preheating of added oxygen. Carbon 50(11), 4002–4009 (2012). doi:10.1016/j.carbon.2012.04.043
D.N. Futaba, K. Hata, T. Yamada, K. Mizuno, M. Yumura, S. Iijima, Kinetics of water-assisted single-walled carbon nanotube synthesis revealed by a time-evolution analysis. Phys. Rev. Lett. 95(5), 4 (2005). doi:10.1103/PhysRevLett.95.056104
S. Hussain, R. Amade, E. Bertran, Study of CNTs structural evolution during water assisted growth and transfer methodology for electrochemical applications. Mater. Chem. Phys. 148(3), 914–922 (2014). doi:10.1016/j.matchemphys.2014.08.070
M. Bansal, C. Lal, R. Srivastava, M.N. Kamalasanan, L.S. Tanwar, Comparison of structure and yield of multiwall carbon nanotubes produced by the CVD technique and a water assisted method. Physica B Condens. Matter 405(7), 1745–1749 (2010). doi:10.1016/j.physb.2010.01.031
C.-S. Chen, C.-K. Hsieh, Oxygen-assisted low-pressure chemical vapor deposition for the low-temperature direct growth of graphitic nanofibers on fluorine-doped tin oxide glass as a counter electrode for dye-sensitized solar cell. Jpn. J. Appl. Phys. 53(11), 11RE02 (2014). doi:10.7567/jjap.53.11re02
I.H. Son, H.J. Song, S. Kwon, A. Bachmatiuk, S.J. Lee, A. Benayad, J.H. Park, J.-Y. Choi, H. Chang, M.H. Ruemmeli, CO2 enhanced chemical vapor deposition growth of few-layer graphene over NiOx. ACS Nano 8(9), 9224–9232 (2014). doi:10.1021/nn504342e
J.Q. Huang, Q. Zhang, M.Q. Zhao, F. Wei, Process intensification by CO2 for high quality carbon nanotube forest growth: double-walled carbon nanotube convexity or single-walled carbon nanotube bowls? Nano Res. 2(11), 872–881 (2009). doi:10.1007/s12274-009-9088-6
Z. Zhu, H. Jiang, T. Susi, A.G. Nasibulin, E.I. Kauppinen, The use of NH3 to promote the production of large-diameter single-walled carbon nanotubes with a narrow (n, m) distribution. J. Am. Chem. Soc. 133(5), 1224–1227 (2011). doi:10.1021/ja1087634
T. Susi, A.G. Nasibulin, P. Ayala, Y. Tian, Z. Zhu, H. Jiang, C. Roquelet, D. Garrot, J.-S. Lauret, E.I. Kauppinen, High quality SWCNT synthesis in the presence of NH3 using a vertical flow aerosol reactor. Physica Status Solidi B Basic Solid State Phys. 246(11–12), 2507–2510 (2009). doi:10.1002/pssb.200982338
A.F. Carley, P.R. Davies, K.R. Harikumar, R.V. Jones, M.W. Roberts, Oxygen states at magnesium and copper surfaces revealed by scanning tunneling microscopy and surface reactivity. Top. Catal. 24(1–4), 51–59 (2003). doi:10.1023/B:TOCA.0000003076.82649.c4
P.R. Davies, D. Edwards, D. Richards, Possible role for Cu(II) compounds in the oxidation of malonyl dichloride and HCl at Cu (110) surfaces. J. Phys. Chem. C 113(24), 10333–10336 (2009). doi:10.1021/jp903042f
Y. Ma, Vapor-facet-solid (VFS) mechanism: a new route for catalytic CVD growth of one-dimensional nanostructures at low temperature. Schriftenreihe der Arbeitsgruppe des Lehrstuhls für Oberfächen- und Werkstofftechnologie im Institut für Werkstofftechnik. 4 (2015)
J.T. Hu, L.S. Li, W.D. Yang, L. Manna, L.W. Wang, A.P. Alivisatos, Linearly polarized emission from colloidal semiconductor quantum rods. Science 292(5524), 2060–2063 (2001). doi:10.1126/science.1060810
A.X. Yin, X.Q. Min, Y.W. Zhang, C.H. Yan, Shape-selective synthesis and facet-dependent enhanced electrocatalytic activity and durability of monodisperse sub-10 nm Pt-Pd tetrahedrons and cubes. J. Am. Chem. Soc. 133(11), 3816–3819 (2011). doi:10.1021/ja200329p
S. Mostafa, F. Behafarid, J.R. Croy, L.K. Ono, L. Li, J.C. Yang, A.I. Frenkel, B.R. Cuenya, Shape-dependent catalytic properties of Pt nanoparticles. J. Am. Chem. Soc. 132(44), 15714–15719 (2010). doi:10.1021/ja106679z
H. Zhang, M.S. Jin, Y.J. Xiong, B. Lim, Y.N. Xia, Shape-controlled synthesis of Pd nanocrystals and their catalytic applications. Acc. Chem. Res. 46(8), 1783–1794 (2013). doi:10.1021/ar300209w
R. Narayanan, M.A. El-Sayed, Catalysis with transition metal nanoparticles in colloidal solution: nanoparticle shape dependence and stability. J. Phys. Chem. B. 109(26), 12663–12676 (2005). doi:10.1021/jp051066p
Y.H. Leng, Y.H. Zhang, T. Liu, M. Suzuki, X.G. Li, Synthesis of single crystalline triangular and hexagonal Ni nanosheets with enhanced magnetic properties. Nanotechnology 17(6), 1797–1800 (2006). doi:10.1088/0957-4484/17/6/042
Y.W. Jun, J.S. Choi, J. Cheon, Shape control of semiconductor and metal oxide nanocrystals through nonhydrolytic colloidal routes. Angewandte Chemie International Edition 45(21), 3414–3439 (2006). doi:10.1002/anie.200503821
Y.N. Xia, Y.J. Xiong, B. Lim, S.E. Skrabalak, Shape-controlled synthesis of metal nanocrystals: simple chemistry meets complex physics? Angewandte Chemie International Edition 48(1), 60–103 (2009). doi:10.1002/anie.200802248
A.R. Tao, S. Habas, P.D. Yang, Shape control of colloidal metal nanocrystals. Small 4(3), 310–325 (2008). doi:10.1002/smll.200701295
E.F. Kukovitsky, S.G. L’Vov, N.A. Sainov, VLS-growth of carbon nanotubes from the vapor. Chem. Phys. Lett. 317(1–2), 65–70 (2000). doi:10.1016/s0009-2614(99)01299-3
B.C. Satishkumar, P.J. Thomas, A. Govindaraj, C.N.R. Rao, Y-junction carbon nanotubes. Appl. Phys. Lett. 77(16), 2530–2532 (2000). doi:10.1063/1.1319185
J. Li, C. Papadopoulos, J. Xu, Nanoelectronics—growing Y-junction carbon nanotubes. Nature 402(6759), 253–254 (1999). doi:10.1038/46214
H. Takikawa, M. Yatsuki, R. Miyano, M. Nagayama, T. Sakakibara, S. Itoh, Y. Ando, Amorphous carbon fibrilliform nanomaterials prepared by chemical vapor deposition. Jpn. J. Appl. Phys. Part 1 Regular Pap. Short Notes Rev. Pap. 39(9A), 5177–5179 (2000). doi:10.1143/jjap.39.5177
K. Inomata, N. Aoki, H. Koinuma, Production of fullerenes by low-temperature plasma chemical-vapor-deposition under atmospheric-pressure. Jpn. J. Appl. Phys. Part 2 Lett. 33(2A), L197–L199 (1994). doi:10.1143/jjap.33.l197
Y. Suda, Y. Shimizu, M. Ozaki, H. Tanoue, H. Takikawa, H. Ue, K. Shimizu, Y. Umeda, Electrochemical properties of fuel cell catalysts loaded on carbon nanomaterials with different geometries. Mater. Today Commun. 3, 96–103 (2015). doi:10.1016/j.mtcomm.2015.02.003
G. Wang, G. Ran, G. Wan, P. Yang, Z. Gao, S. Lin, C. Fu, Y. Qin, Size-selective catalytic growth of nearly 100 % pure carbon nanocoils with copper nanoparticles produced by atomic layer deposition. ACS Nano 8(5), 5330–5338 (2014). doi:10.1021/nn501709h
G. Wang, Z. Gao, S. Tang, C. Chen, F. Duan, S. Zhao, S. Lin, Y. Feng, L. Zhou, Y. Qin, Microwave absorption properties of carbon nanocoils coated with highly controlled magnetic materials by atomic layer deposition. ACS Nano 6(12), 11009–11017 (2012). doi:10.1021/nn304630h
K. Hernadi, A. Fonseca, J.B. Nagy, D. Bernaerts, A.A. Lucas, Fe-catalyzed carbon nanotube formation. Carbon 34(10), 1249–1257 (1996). doi:10.1016/0008-6223(96)00074-7
D. Chen, K.O. Christensen, E. Ochoa-Fernandez, Z.X. Yu, B. Totdal, N. Latorre, A. Monzon, A. Holmen, Synthesis of carbon nanofibers: effects of Ni crystal size during methane decomposition. J. Catal. 229(1), 82–96 (2005). doi:10.1016/j.jcat.2004.10.017
P.L. Hansen, J.B. Wagner, S. Helveg, J.R. Rostrup-Nielsen, B.S. Clausen, H. Topsoe, Atom-resolved imaging of dynamic shape changes in supported copper nanocrystals. Science 295(5562), 2053–2055 (2002). doi:10.1126/science.1069325
C.A. Wert, Diffusion coefficient of C in α-iron. Phys. Rev. 79(4), 601–605 (1950). doi:10.1103/PhysRev.79.601
J.J. Lander, H.E. Kern, A.L. Beach, Solubility and diffusion coefficient of carbon in nickel-reaction rates of nickel-carbon alloys with barium oxide. J. Appl. Phys. 23(12), 1305–1309 (1952). doi:10.1063/1.1702064
B.C. Stipe, M.A. Rezaei, W. Ho, Single-molecule vibrational spectroscopy and microscopy. Science 280(5370), 1732–1735 (1998). doi:10.1126/science.280.5370.1732
B.C. Stipe, M.A. Rezaei, W. Ho, Coupling of vibrational excitation to the rotational motion of a single adsorbed molecule. Phys. Rev. Lett. 81(6), 1263–1266 (1998). doi:10.1103/PhysRevLett.81.1263
J. Szanyi, M.T. Paffett, Dimerization and trimerization of acetylene over a model Sn/Pt catalyst. J. Am. Chem. Soc. 117(3), 1034–1042 (1995). doi:10.1021/ja00108a020
S. Helveg, C. Lopez-Cartes, J. Sehested, P.L. Hansen, B.S. Clausen, J.R. Rostrup-Nielsen, F. Abild-Pedersen, J.K. Norskov, Atomic-scale imaging of carbon nanofibre growth. Nature 427(6973), 426–429 (2004). doi:10.1038/nature02278
T.E. Fischer, S.R. Kelemen, Influence of the substrate structure on the bonding of chemisorbed acetylene to transition metal surfaces. Surf. Sci. 74(47), 47–53 (1978). doi:10.1016/0039-6028(78)90270-4
J. Dvorak, J. Hrbek, Adsorbate ordering effects in the trimerization reaction of acetylene on Cu (100). J. Phys. Chem. B. 102(47), 9443–9450 (1998). doi:10.1021/jp981956n
J.R. Lomas, C.J. Baddeley, M.S. Tikhov, R.M. Lambert, Ethyne cyclization to benzene over Cu (110). Langmuir 11(8), 3048–3053 (1995). doi:10.1021/la00008a033
G. Kyriakou, J. Kim, M.S. Tikhov, N. Macleod, R.M. Lambert, Acetylene coupling on Cu (111): formation of butadiene, benzene, and cyclooctatetraene. J. Phys. Chem. B. 109(21), 10952–10956 (2005). doi:10.1021/jp044213c
W. Alter, D. Borgmann, M. Stadelmann, M. Worn, G. Wedler, Interaction of acetylene with films of the transition-metals iron, nickel, and palladium. J. Am. Chem. Soc. 116(22), 10041–10049 (1994). doi:10.1021/ja00101a024
F. Zaera, R.B. Hall, High-resolution electron energy loss spectroscopy and thermal programmed desorption studies of the chemisorption and thermal decomposition of ethylene and acetylene on Ni (100) single-crystal surfaces. J. Phys. Chem. 91(16), 4318–4323 (1987). doi:10.1021/j100300a023
J.C. Bertolini, J. Massardier, G. Dalmaiimelik, Evolution of adsorbed species during C2H2 adsorption on Ni (111) in relation to their vibrational spectra. J. Chem. Soc. Faraday Trans. I. 74, 1720–1725 (1978). doi:10.1039/f19787401720
J.A. Stroscio, S.R. Bare, W. Ho, The chemisorption and decomposition of ethylene and acetylene on Ni (110). Surf. Sci. 148(2–3), 499–525 (1984). doi:10.1016/0039-6028(84)90596-x
A. Benninghoven, P. Beckmann, D. Greifendorf, M. Schemmer, Investigation of surface-reactions by SIMS and TDMS—interaction of ethylene and acetylene with hydrogen on polycrystalline nickel. Appl. Surf. Sci. 6(3–4), 288–296 (1980). doi:10.1016/0378-5963(80)90018-5
P.M. Mattlis, The oligomerization of acetylenes induced by metals of the nickel triad. Pure Appl. Chem. 30(3–4), 427–448 (1972). doi:10.1351/pac197230030427
D.L. Trimm, I.O.Y. Liu, N.W. Cant, The oligornerization of acetylene in hydrogen over Ni/SiO2 catalysts: product distribution and pathways. J. Mol. Catal. A Chem. 288(1–2), 63–74 (2008). doi:10.1016/j.molcata.2008.03.022
B. Lesiak, A. Jablonski, W. Palczewska, I. Kulszewiczbajer, M. Zagorska, Identification of the carbonaceous residues at nickel and platinum surfaces on the basis of the carbon Kll spectra. Surf. Interf. Anal. 18(6), 430–438 (1992). doi:10.1002/sia.740180610
S. Hofmann, G. Csanyi, A.C. Ferrari, M.C. Payne, J. Robertson, Surface diffusion: the low activation energy path for nanotube growth. Phys. Rev. Lett. 95(3), 036101 (2005). doi:10.1103/PhysRevLett.95.036101
O.V. Yazyev, A. Pasquarello, Effect of metal elements in catalytic growth of carbon nanotubes. Phys. Rev. Lett. 100(15), 4 (2008). doi:10.1103/PhysRevLett.100.156102
K. Bartsch, K. Biedermann, T. Gemming, A. Leonhardt, On the diffusion-controlled growth of multiwalled carbon nanotubes. J. Appl. Phys. 97(11), 7 (2005). doi:10.1063/1.1922067
Z.Y. Juang, J.F. Lai, C.H. Weng, J.H. Lee, H.J. Lai, T.S. Lai, C.H. Tsai, On the kinetics of carbon nanotube growth by thermal CVD method. Diam. Relat. Mater. 13(11–12), 2140–2146 (2004). doi:10.1016/j.diamond.2004.03.007
O.A. Louchev, Y. Sato, H. Kanda, Multiwall carbon nanotubes: self-organization and inhibition of step-flow growth kinetics. J. Appl. Phys. 89(6), 3438–3446 (2001). doi:10.1063/1.1347407
S. Hofmann, B. Kleinsorge, C. Ducati, A.C. Ferrari, J. Robertson, Low-temperature plasma enhanced chemical vapour deposition of carbon nanotubes. Diam. Relat. Mater. 13(4–8), 1171–1176 (2004). doi:10.1016/j.diamond.2003.11.046
O.A. Louchev, T. Laude, Y. Sato, H. Kanda, Diffusion-controlled kinetics of carbon nanotube forest growth by chemical vapor deposition. J. Chem. Phys. 118(16), 7622–7634 (2003). doi:10.1063/1.1562195
O.A. Louchev, Formation mechanism of pentagonal defects and bamboo-like structures in carbon nanotube growth mediated by surface diffusion. Physica Status Solidi A Appl. Res. 193(3), 585–596 (2002). doi:10.1002/1521-396x(200210)193:3<585:aid-pssa585>3.0.co;2-y
O.A. Louchev, Y. Sato, H. Kanda, Growth mechanism of carbon nanotube forests by chemical vapor deposition. Appl. Phys. Lett. 80(15), 2752–2754 (2002). doi:10.1063/1.1468266
D.C. Li, L.M. Dai, S.M. Huang, A.W.H. Mau, Z.L. Wang, Structure and growth of aligned carbon nanotube films by pyrolysis. Chem. Phys. Lett. 316(5–6), 349–355 (2000). doi:10.1016/s0009-2614(99)01334-2
S.A. Dayeh, E.T. Yu, D. Wang, III-V nanowire growth mechanism: V/III ratio and temperature effects. Nano Lett. 7(8), 2486–2490 (2007). doi:10.1021/nl0712668
P.B. Amama, O. Ogebule, M.R. Maschmann, T.D. Sands, T.S. Fisher, Dendrimer-assisted low-temperature growth of carbon nanotubes by plasma-enhanced chemical vapor deposition. Chem. Commun. 27, 2899–2901 (2006). doi:10.1039/b602623k
H.Y. Wang, J.J. Moore, Low temperature growth mechanisms of vertically aligned carbon nanofibers and nanotubes by radio frequency-plasma enhanced chemical vapor deposition. Carbon 50(3), 1235–1242 (2012). doi:10.1016/j.carbon.2011.10.041
S. Hofmann, C. Ducati, J. Robertson, B. Kleinsorge, Low-temperature growth of carbon nanotubes by plasma-enhanced chemical vapor deposition. Appl. Phys. Lett. 83(1), 135–137 (2003). doi:10.1063/1.1589187
T.M. Minea, S. Point, A. Granier, M. Touzeau, Room temperature synthesis of carbon nanofibers containing nitrogen by plasma-enhanced chemical vapor deposition. Appl. Phys. Lett. 85(7), 1244–1246 (2004). doi:10.1063/1.1781352
M. Meyyappan, A review of plasma enhanced chemical vapour deposition of carbon nanotubes. J. Phys. D Appl. Phys. 42(21), 15 (2009). doi:10.1088/0022-3727/42/21/213001
Y. Ishikawa, K. Ishizuka, Growth of single-walled carbon nanotubes by hot-filament assisted chemical vapor deposition below 500 °C. Appl. Phys. Express 2(4), 3 (2009). doi:10.1143/apex.2.045001
N.G. Shang, Y.Y. Tan, V. Stolojan, P. Papakonstantinou, S.R.P. Silva, High-rate low-temperature growth of vertically aligned carbon nanotubes. Nanotechnology 21(50), 6 (2010). doi:10.1088/0957-4484/21/50/505604
Y. Ishikawa, H. Jinbo, Synthesis of multiwalled carbon nanotubes at temperatures below 300 °C by hot-filament assisted chemical vapor deposition. Jpn. J. Appl. Phys. Part 2 Lett. Express Lett. 44(12–15), L394–L397 (2005). doi:10.1143/jjap.44.l394
Y. Awano, S. Sato, M. Nihei, T. Sakai, Y. Ohno, T. Mizutani, Carbon nanotubes for VLSI: interconnect and transistor applications. Proc. IEEE 98(12), 2015–2031 (2010). doi:10.1109/JPROC.2010.2068030
C.L. Long, D.P. Qi, T. Wei, J. Yan, L.L. Jiang, Z.J. Fan, Nitrogen-doped carbon networks for high energy density supercapacitors derived from polyaniline coated bacterial cellulose. Adv. Funct. Mater. 24(25), 3953–3961 (2014). doi:10.1002/adfm.201304269
N.P. Wickramaratne, J.T. Xu, M. Wang, L. Zhu, L.M. Dai, M. Jaroniec, Nitrogen enriched porous carbon spheres: attractive materials for supercapacitor electrodes and CO2 adsorption. Chem. Mater. 26(9), 2820–2828 (2014). doi:10.1021/cm5001895
W. Wei, H.W. Liang, K. Parvez, X.D. Zhuang, X.L. Feng, K. Mullen, Nitrogen-doped carbon nanosheets with size-defined mesopores as highly efficient metal-free catalyst for the oxygen reduction reaction. Angewandte Chemie-International Edition 53(6), 1570–1574 (2014). doi:10.1002/anie.201307319
Acknowledgements
The authors would like to acknowledge financial support of this work by the German Research Foundation (DFG JI22/16-1, DFG JI22/21-1).
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2016 Springer International Publishing Switzerland
About this chapter
Cite this chapter
Ma, Y., Yang, N., Jiang, X. (2016). One-Dimensional Carbon Nanostructures: Low-Temperature Chemical Vapor Synthesis and Applications. In: Yang, N., Jiang, X., Pang, DW. (eds) Carbon Nanoparticles and Nanostructures. Carbon Nanostructures. Springer, Cham. https://doi.org/10.1007/978-3-319-28782-9_2
Download citation
DOI: https://doi.org/10.1007/978-3-319-28782-9_2
Published:
Publisher Name: Springer, Cham
Print ISBN: 978-3-319-28780-5
Online ISBN: 978-3-319-28782-9
eBook Packages: Chemistry and Materials ScienceChemistry and Material Science (R0)