Abstract
Vibration control involves designing architectural, structural, mechanical, and electrical systems, both independently and in combination, to not generate or propagate vibration that is detrimental to research activities. The environment itself must be considered as an experimental variable and constrained to known and closely controlled values. For “routine measurements” the requirement is root mean square (RMS) amplitude displacement of 0.025 micrometer (μm) at frequencies between 1 and 20 Hz and RMS velocity amplitude of 3 μm/s at frequencies between 20 and 100 Hz. The metrology requirements are RMS velocity amplitude of 3 μm/s at frequencies below 4 Hz; RMS velocity amplitude of 0.75 μm/s at frequencies between 4 and 100 Hz. This chapter addresses the structural design of the building, the layout of the process and mechanical equipment, and the equipment layout in the laboratory or production spaces that are critical to achieving an acceptable level of vibration within specific areas.
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Notes
- 1.
H. Amick, M. Gendreau, T. Busch, and C. Gordon, “Evolving Criteria for Research Facilities: Vibration,” Proceedings of SPIE Conference 5933: Buildings for Nanoscale Research and Beyond (2005).
- 2.
H. Amick, “On Generic Vibration Criteria for Advanced Technology Facilities, with a Tutorial on Vibration Data Representation,” Journal of the Institute of Environmental Sciences 40(5), 35–44 (1997).
- 3.
The Institute of Environmental Sciences and Technology (IEST) has published a Recommended Practice (RP) that explores the factors to consider in the design of cleanroom facilities and provides a framework to establish performance criteria—IEST-RP-CC012.2: Considerations in Cleanroom Design. The document is organized into two primary sections: planning and design requirements. The planning section helps users develop a utility matrix to establish the equipment and processes to be used in the cleanroom, to determine the manufacturing layout, and to identify relevant contamination control, life safety , and environmental issues. Ergonomics, budget, and schedule projections are also reviewed.
- 4.
H. Amick, M. Gendreau, T. Busch, and C. Gordon, “Evolving Criteria for Research Facilities I—Vibration,” in Proceedings of SPIE Conference 5933: Buildings for Nanoscale Research and Beyond (2005).
- 5.
For documentation requirements for a vibration survey, see IEST RP-CC024, ISBN 978-1-877862-24-3; H. Amick “On Generic Vibration Criteria for Advanced Technology Facilities, with a Tutorial on Vibration Data Representation,” Journal of the Institute of Environmental Sciences XL(5), 35–44 (1997); H. Amick, L. Vitale, and B. Haxton, “Nanotech I: Site Parameters” and “Nanotech II: Case Studies and Trends,” R&D 2007 Laboratory Design Handbook, pp. 38–45 (November 2006); and H. Amick, M. Gendreau, and T. Xu, “On the Appropriate Timing for Facility Vibration Surveys,” Semiconductor Fabtech, No. 25, Cleanroom Section (March 2005).
- 6.
H. Amick, M. Gendreau, and Y. Wongprasert, “Centile Spectra, Measurement Times, and Statistics of Ground Vibration,” Proceedings of the Second International Symposium on Environmental Vibrations: Prediction, Monitoring, Mitigation and Evaluation (September 2005).
- 7.
H. Amick and A. Bayat, “Dynamics of Stiff Floors for Advanced Technology Facilities,” Proceedings of 12th ASCE Engineering Mechanics Conference, pp. 318–321 (May 1998).
- 8.
H. Amick and P.J.M. Monteiro, “Modification of Concrete Damping Properties for Vibration Control in Technology Facilities,” Proceedings of SPIE Conference 5933: Buildings for Nanoscale Research and Beyond (2005).
- 9.
E. Ungar and R. White, “Footfall-Induced Vibration of Floors Supporting Sensitive Equipment,” Sound and Vibration (the Noise and Vibration Control Magazine), p. 10 (1970); E.E. Ungar, J.A. Zapfe, and J.D. Kemp, “Predicting Footfall-Induced Vibrations of Floors,” Sound and Vibration, p. 16 (November, 2004).
- 10.
H. Amick and A. Bayat, “Dynamics of Stiff Floors for Advanced Technology Facilities,” Proceedings of 12th ASCE Engineering Mechanics Conference, pp 318–321 (1998); H. Amick, M. Gendreau, and C.G. Colin, “Vibrations of Raised Access Floors,” Proceedings of the First Pan-American/Iberian Meeting on Acoustics: 144th Meeting of the Acoustical Society of American (December 2002).
- 11.
H. Amick, S. Hardash, P. Gillett, and R.J. Reaveley, “Design of Stiff, Low-Vibration Floor Structures,” Proceedings of International Society for Optical Engineering (SPIE) 1619, 180–191 (1991).
- 12.
H. Amick, N. Wongprasert, J. Montgomery, P. Haswell, and D. Lynch, “An Experimental Study of Vibration Attenuation Performance of Several on-grade Slab Configurations,” Proceedings of SPIE Conference 5933: Buildings for Nanoscale Research and Beyond (July 2005).
- 13.
H. Amick and P.J.M. Monteiro, “Vibration Control Using Large Pneumatic Isolation Systems with Damped Concrete Inertia Masses,” 7th International Conference on Motion and Vibration Control, Paper 118 (2004); H. Amick, B. Sennewald, N. C. Pardue, E.C. Teague, and B. Scace, “Analytical/Experimental Study of Vibration of a Room-Sized Airspring-Supported Slab,” Noise Control Engineering Journal 46(2), 39–47 (1998).
- 14.
- 15.
M. Gendreau and H. Amick, “Maturation of the Vibration Environment in Advanced Technology Facilities,” J. Institute of Environmental Sciences and Technology 48(1), 83–93 (2005).
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Acknowledgement
Thanks to Hal Amick, who integrated material from various sources into the initial draft.
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Soueid, A., Teague, E.C., Murday, J. (2015). Vibration Isolation. In: Soueid, A., Teague, E., Murday, J. (eds) Buildings for Advanced Technology. Science Policy Reports. Springer, Cham. https://doi.org/10.1007/978-3-319-24892-9_4
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