Skip to main content

Impacts of Dislocations and Point Defects on the Internal Quantum Efficiency of the Near-Band-Edge Emission in AlGaN-Based DUV Light-Emitting Materials

  • Chapter
  • First Online:
III-Nitride Ultraviolet Emitters

Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 227))

Abstract

In this chapter, we show the impact of point defects rather than threading dislocations (TDs) on the emission dynamics of the near-band-edge (NBE) excitonic luminescence in AlN and high AlN mole fraction (x) Al x Ga1−x N alloy films using deep ultraviolet (DUV) time-resolved luminescence and positron annihilation measurements. The extreme radiative nature of excitons in AlN is identified, as the radiative lifetime (τ R) for a free excitonic emission was determined to be as short as 11 ps at 7 K and 180 ps at 300 K, which are the shortest ever reported for the spontaneous emission in bulk semiconductors. However, apparent τ R increased to 530 ps at 7 K with increasing impurity and Al-vacancy (V Al) concentrations irrespective of the TD density. The result reflects the contribution of bound exciton components. A continuous decrease in τ R with increasing temperature up to 200 K of heavily impurity-doped samples reflects a carrier release from band-tail states. The room temperature (RT) τ R of Al x Ga1−x N alloys of high x was nevertheless as short as a few ns at 300 K. The results essentially indicate an excellent radiative performance. Finally, the impact of Si-doping and the resulting cation vacancy formation on the nonradiative lifetime (τ NR) of the NBE emission in Al0.6Ga0.4N films are discussed.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 99.00
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 129.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 179.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

References

  1. C. Pernot, M. Kim, S. Fukahori, T. Inazu, T. Fujita, Y. Nagasawa, A. Hirano, M. Ippommatsu, M. Iwaya, S. Kamiyama, I. Akasaki, H. Amano, Appl. Phys. Express 3, 061004 (2010)

    Article  Google Scholar 

  2. M. Shatalov, W. Sun, A. Lunev, X. Hu, A. Dobrinsky, Y. Bilenko, J. Yang, M. Shur, R. Gaska, C. Moe, G. Garrett, M. Wraback, Appl. Phys. Express 5, 082101 (2012)

    Google Scholar 

  3. M. Kneissl, T. Kolbe, C. Chua, V. Kueller, N. Lobo, J. Stellmach, A. Knauer, H. Rodriguez, S. Einfeldt, Z. Yang, N.M. Johnson, M. Weyers, Semicond. Sci. Technol. 26, 014036 (2011)

    Article  Google Scholar 

  4. Y. Shimahara, H. Miyake, K. Hiramatsu, F. Fukuyo, T. Okada, H. Takaoka, H. Yoshida, Appl. Phys. Express 4, 042103 (2011)

    Article  Google Scholar 

  5. T. Oto, R.G. Banal, K. Kataoka, M. Funato, Y. Kawakami, Nat. Photonics 4, 767 (2010)

    Article  Google Scholar 

  6. T. Shibata, K. Asai, S. Sumiya, M. Mouri, M. Tanaka, O. Oda, H. Katsukawa, H. Miyake, K. Hiramatsu, Phys. Status Solidi C 0, 2023 (2003)

    Google Scholar 

  7. A. Rice, R. Collazo, J. Tweedie, R. Dalmau, S. Mita, J. Xie, Z. Sitar, J. Appl. Phys. 108, 043510 (2010)

    Article  Google Scholar 

  8. J.R. Grandusky, Z. Zhong, J. Chen, C. Leung, L.J. Schowalter, Solid-State Electron. 78, 127 (2012)

    Article  Google Scholar 

  9. S.F. Chichibu, A. Uedono, T. Onuma, T. Sota, B.A. Haskell, S.P. DenBaars, J.S. Speck, S. Nakamura, Appl. Phys. Lett. 86, 021914 (2005)

    Article  Google Scholar 

  10. S.F. Chichibu, A. Uedono, T. Onuma, B.A. Haskell, A. Chakraborty, T. Koyama, P.T. Fini, S. Keller, S.P. DenBaars, J.S. Speck, U.K. Mishra, S. Nakamura, S. Yamaguchi, S. Kamiyama, H. Amano, I. Akasaki, J. Han, T. Sota, Nat. Mater. 5, 810 (2006); Philos. Mag. 87, 2019 (2007)

    Google Scholar 

  11. A.Y. Polyakov, M. Shin, J.A. Freitas, M. Skowronski, D.W. Greve, R.G. Wilson, J. Appl. Phys. 80, 6349 (1996)

    Article  Google Scholar 

  12. T. Bradley, S.H. Goss, L.J. Brillson, J. Hwang, W.J. Schaff, J. Vac. Sci. Technol. B 21, 2558 (2003)

    Article  Google Scholar 

  13. T. Onuma, S.F. Chichibu, A. Uedono, T. Sota, P. Cantu, T.M. Katona, J.F. Keading, S. Keller, U.K. Mishra, S. Nakamura, S.P. DenBaars, J. Appl. Phys. 95, 2495 (2004)

    Article  Google Scholar 

  14. T. Kubo, H. Taketomi, H. Miyake, K. Hiramatsu, T. Hashizume, Appl. Phys. Express 3, 021004 (2010)

    Article  Google Scholar 

  15. K. Ooyama, K. Sugawara, S. Okuzaki, H. Taketomi, H. Miyake, K. Hiramatsu, T. Hashizume, Jpn. J. Appl. Phys., Part 1 49, 101001 (2010)

    Google Scholar 

  16. J. Neugebauer, C.G. Van de Walle, Phys. Rev. B 50, 8067 (1994)

    Article  Google Scholar 

  17. J. Neugebauer, C.G. Van de Walle, Appl. Phys. Lett. 69, 503 (1996)

    Article  Google Scholar 

  18. C. Stampfl, C.G. Van de Walle, Appl. Phys. Lett. 72, 459 (1998)

    Article  Google Scholar 

  19. C.G. Van de Walle, J. Neugebauer, J. Appl. Phys. 95, 3851 (2004)

    Article  Google Scholar 

  20. A.F. Wright, U. Grossner, Appl. Phys. Lett. 73, 2751 (1998)

    Article  Google Scholar 

  21. K. Leung, A.F. Wright, E.B. Stechel, Appl. Phys. Lett. 74, 2495 (1999)

    Article  Google Scholar 

  22. A.F. Wright, J. Appl. Phys. 90, 1164 (2001)

    Article  Google Scholar 

  23. S. Keller, P. Cantu, C. Moe, Y. Wu, S. Keller, U.K. Mishra, J.S. Speck, S.P. DenBaars, Jpn. J. Appl. Phys. Part 1 44, 7227 (2005)

    Google Scholar 

  24. Y. Shimahara, H. Miyake, K. Hiramatsu, F. Fukuyo, T. Okada, H. Takaoka, H. Yoshida, Jpn. J. Appl. Phys. Part 1 50, 095502 (2011)

    Google Scholar 

  25. G.R. James, A.W.R. Leitch, F. Omnes, M. Leroux, Semicond. Sci. Technol. 21, 744 (2006)

    Article  Google Scholar 

  26. N. Nepal, M.L. Nakarmi, J.Y. Lin, H.X. Jiang, Appl. Phys. Lett. 89, 092107 (2006)

    Article  Google Scholar 

  27. K.X. Chen, Q. Dai, W. Lee, J.K. Kim, E.F. Schubert, W. Liu, S. Wu, X. Li, J.A. Smart, Appl. Phys. Lett. 91, 121110 (2007)

    Article  Google Scholar 

  28. J. Slotte, F. Tuomisto, K. Saarinen, C.G. Moe, S. Keller, S.P. DenBaars, Appl. Phys. Lett. 90, 151908 (2007)

    Article  Google Scholar 

  29. A. Uedono, K. Tenjinbayashi, T. Tsutsui, Y. Shimahara, H. Miyake, K. Hiramatsu, N. Oshima, R. Suzuki, S. Ishibashi, J. Appl. Phys. 111, 013512 (2012)

    Article  Google Scholar 

  30. H. Murotani, D. Akase, K. Anai, Y. Yamada, H. Miyake, K. Hiramatsu, Appl. Phys. Lett. 101, 042110 (2012)

    Article  Google Scholar 

  31. C. Stampfl, C.G. Van de Walle, Phys. Rev. B 65, 155212 (2002)

    Article  Google Scholar 

  32. A. Uedono, S. Ishibashi, S. Keller, C. Moe, P. Cantu, T.M. Katona, D.S. Kamber, Y. Wu, E. Letts, S.A. Newman, S. Nakamura, J.S. Speck, U.K. Mishra, S.P. DenBaars, T. Onuma, S.F. Chichibu, J. Appl. Phys. 105, 054501 (2009)

    Article  Google Scholar 

  33. K.B. Nam, J. Li, M.L. Nakarmi, J.Y. Lin, H.X. Jiang, Appl. Phys. Lett. 82, 1694 (2003)

    Article  Google Scholar 

  34. T. Onuma, K. Hazu, A. Uedono, T. Sota, S.F. Chichibu, Appl. Phys. Lett. 96, 061906 (2010)

    Article  Google Scholar 

  35. S.F. Chichibu, T. Onuma, K. Hazu, A. Uedono, Appl. Phys. Lett. 97, 201904 (2010)

    Article  Google Scholar 

  36. S.F. Chichibu, K. Hazu, T. Onuma, A. Uedono, Appl. Phys. Lett. 99, 051902 (2011)

    Article  Google Scholar 

  37. S.F. Chichibu, T. Onuma, K. Hazu, A. Uedono, Phys. Status Solidi (c) 10, 501 (2013)

    Article  Google Scholar 

  38. S.F. Chichibu, H. Miyake, Y. Ishikawa, M. Tashiro, T. Ohtomo, K. Furusawa, K. Hazu, K. Hiramatsu, A. Uedono, J. Appl. Phys. 113, 213506 (2013)

    Article  Google Scholar 

  39. S.F. Chichibu, K. Hazu, Y. Ishikawa, M. Tashiro, T. Ohtomo, K. Furusawa, A. Uedono, S. Mita, J. Xie, R. Collazo, Z. Sitar, Appl. Phys. Lett. 103, 142103 (2013)

    Article  Google Scholar 

  40. S. Nakamura, T. Mukai, M. Senoh, Jpn. J. Appl. Phys. 31, 2883 (1992)

    Article  Google Scholar 

  41. R.T. Chen, V. Rana, W.G. Spitzer, J. Appl. Phys. 51, 1532 (1980)

    Article  Google Scholar 

  42. N. Furuhata, K. Kakimoto, M. Yoshida, T. Kamejima, J. Appl. Phys. 64, 4692 (1988)

    Article  Google Scholar 

  43. S. Chichibu, A. Iwai, Y. Nakahara, S. Matsumoto, H. Higuchi, L. Wei, S. Tanigawa, J. Appl. Phys. 73, 3880 (1993)

    Article  Google Scholar 

  44. K. Fujito, K. Kiyomi, T. Mochizuki, H. Oota, H. Namita, S. Nagao, I. Fujimura, Phys. Status Solidi A 205, 1056 (2008)

    Article  Google Scholar 

  45. C.G. Dunn, E.F. Koch, Acta Metall. 5, 548 (1957)

    Article  Google Scholar 

  46. K. Hazu, M. Kagaya, T. Hoshi, T. Onuma, S.F. Chichibu, J. Vac. Sci. Technol., B 29, 021208 (2011)

    Article  Google Scholar 

  47. M. Merano, S. Collin, P. Renucci, M. Gatri, S. Sonderegger, A. Crottini, J.D. Ganiere, B. Deveaud, Rev. Sci. Instrum. 76, 085108 (2005)

    Article  Google Scholar 

  48. S.F. Chichibu, Y. Ishikawa, M. Tashiro, K. Hazu, K. Furusawa, H. Namita, S. Nagao, K. Fujito, A. Uedono, Electrochem. Soc. Trans. 50(42), 1 (2013)

    Google Scholar 

  49. K. Furusawa, Y. Ishikawa, M. Tashiro, K. Hazu, S. Nagao, H. Ikeda, K. Fujito, S.F. Chichibu, Appl. Phys. Lett. 103, 052108 (2013)

    Article  Google Scholar 

  50. R. Krause-Rehberg, H.S. Leipner, Positron Annihilation in Semiconductors, Solid-State Sciences, vol. 127 (Springer, Berlin, 1999)

    Book  Google Scholar 

  51. P.G. Coleman, Positron Beams and Their Application (World Scientific, Singapore, 2000)

    Book  Google Scholar 

  52. T. Onuma, T. Shibata, K. Kosaka, K. Asai, S. Sumiya, M. Tanaka, T. Sota, A. Uedono, S.F. Chichibu, J. Appl. Phys. 105, 023529 (2009)

    Article  Google Scholar 

  53. G.A. Slack, L.J. Schowalter, D. Morelli, J.A. Freitas Jr, J. Cryst. Growth 246, 287 (2002)

    Article  Google Scholar 

  54. K.B. Nam, M.L. Nakarmi, J.Y. Lin, H.X. Jiang, Appl. Phys. Lett. 86, 222108 (2005)

    Article  Google Scholar 

  55. A. Dadgar, A. Krost, J. Christen, B. Bastek, F. Bertram, A. Krtschil, T. Hempel, J. Blasing, U. Haboeck, A. Hoffmann, J. Cryst. Growth 297, 306 (2006)

    Article  Google Scholar 

  56. T. Koyama, M. Sugawara, T. Hoshi, A. Uedono, J.F. Kaeding, R. Sharma, S. Nakamura, S.F. Chichibu, Appl. Phys. Lett. 90, 241914 (2007)

    Article  Google Scholar 

  57. H. Ikeda, T. Okamura, K. Matsukawa, T. Sota, M. Sugawara, T. Hoshi, P. Cantu, R. Sharma, J.F. Kaeding, S. Keller, U.K. Mishra, K. Kosaka, K. Asai, S. Sumiya, T. Shibata, M. Tanaka, J.S. Speck, S.P. DenBaars, S. Nakamura, T. Koyama, T. Onuma, S.F. Chichibu, J. Appl. Phys. 102, 123707 (2007); 103, 089901(E) (2008)

    Google Scholar 

  58. B. Neuschl, K. Thonke, M. Feneberg, S. Mita, J. Xie, R. Dalmau, R. Collazo, Z. Sitar, Phys. Status Solidi B 249, 511 (2012)

    Article  Google Scholar 

  59. Z. Bryan, I. Bryan, M. Bobea, L. Hussey, R. Kirste, Z. Sitar, R. Collazo, J. Appl. Phys. 115, 133503 (2014)

    Article  Google Scholar 

  60. G. Pozina, J.P. Bergman, T. Paskova, B. Monemar, Appl. Phys. Lett. 75, 4124 (1999)

    Article  Google Scholar 

  61. S.F. Chichibu, T. Onuma, M. Kubota, A. Uedono, T. Sota, A. Tsukazaki, A. Ohtomo, M. Kawasaki, J. Appl. Phys. 99, 093505 (2006)

    Article  Google Scholar 

  62. R. Hoger, E.O. Göbel, J. Kuhl, K. Ploog, H.J. Quiesser, J. Phys. C 17, L905 (1984)

    Article  Google Scholar 

  63. C. Gourdon, P. Lavallard, M. Dagenais, Phys. Rev. B 37, 2589 (1988)

    Article  Google Scholar 

  64. S. Charbonneau, L.B. Allard, A.P. Roth, T.S. Rao, Phys. Rev. B 47, 13918 (1993)

    Article  Google Scholar 

  65. Y. Yamada, T. Mishina, Y. Masumoto, Y. Kawakami, S. Yamaguchi, K. Ichino, S. Fujita, S. Fujita, T. Taguchi, Phys. Rev. B 51, 2596 (1995)

    Article  Google Scholar 

  66. K. Watanabe, T. Taniguchi, T. Kuroda, H. Kanda, Diam. Relat. Mater. 15, 1891 (2006)

    Article  Google Scholar 

  67. G.W. p’t Hooft, W.A.J.A. van der Poel, L.W. Molenkamp, C.T. Foxon, Phys. Rev. B 35, 8281 (1987)

    Google Scholar 

  68. S. Shokhovets, O. Ambacher, B.K. Meyer, G. Gobsch, Phys. Rev. B 78, 035207 (2008)

    Article  Google Scholar 

  69. H. Sumi, J. Phys. Soc. Jpn. 41, 526 (1976)

    Article  Google Scholar 

  70. C. Weisbuch, H. Benisty, R. Houdre, J. Lumin. 85, 271 (2000)

    Article  Google Scholar 

  71. J. Shah, Ultrafast Spectroscopy of Semiconductors and Semiconductor Nanostructures (Springer, Berlin, 1996)

    Book  Google Scholar 

  72. K. Torii, T. Deguchi, T. Sota, K. Suzuki, S. Chichibu, S. Nakamura, Phys. Rev. B 60, 4723 (1999)

    Article  Google Scholar 

  73. R. Kohlrausch, Ann. Phys. 12, 393 (1847)

    Google Scholar 

  74. J. Feldmann, G. Peter, E.O. Göbel, P. Dawson, K. Moore, C. Foxon, R.J. Elliot, Phys. Rev. Lett. 59, 2337 (1987)

    Article  Google Scholar 

  75. N. Teofilov, K. Thonke, R. Sauer, L. Kirste, D.G. Ebling, K.W. Benz, Diam. Relat. Mater. 11, 892 (2002)

    Article  Google Scholar 

  76. H. Murotani, Y. Yamada, H. Miyake, K. Hiramatsu, Appl. Phys. Lett. 98, 021910 (2011)

    Article  Google Scholar 

  77. H. Murotani, T. Kuronaka, Y. Yamada, T. Taguchi, N. Okada, H. Amano, J. Appl. Phys. 105, 083533 (2009)

    Article  Google Scholar 

  78. V. Lebedev, F.M. Morales, H. Romanus, S. Krischok, G. Ecke, V. Cimalla, M. Himmerlich, T. Stauden, D. Cengher, O. Ambacher, J. Appl. Phys. 98, 093508 (2005)

    Article  Google Scholar 

  79. M. Mashita, Jpn. J. Appl. Phys., Part 1 28, 1298 (1989)

    Google Scholar 

  80. S. Chichibu, A. Iwai, S. Matsumoto, H. Higuchi, Appl. Phys. Lett. 60, 489 (1992); Erratum 60, 2439 (1992)

    Google Scholar 

  81. B.T. Luke, J.A. Pople, M.K. Jespersen, Y. Apeloig, J. Chandrasekhar, P.R. Schleyer, J. Am. Chem. Soc. 108, 260 (1986)

    Article  Google Scholar 

  82. Y. Ishikawa, M. Tashiro, K. Hazu, K. Furusawa, H. Namita, S. Nagao, K. Fujito, S.F. Chichibu, Appl. Phys. Lett. 101, 212106 (2012)

    Article  Google Scholar 

  83. S.F. Chichibu, Y. Ishikawa, M. Tashiro, K. Hazu, K. Furusawa, H. Namita, S. Nagao, K. Fujito, A. Uedono, Electrochem. Soc. Trans. 50(42), 1 (2013)

    Google Scholar 

  84. S.F. Chichibu, K. Hazu, Y. Ishikawa, M. Tashiro, H. Namita, S. Nagao, K. Fujito, A. Uedono, J. Appl. Phys. 111, 103518 (2012)

    Article  Google Scholar 

  85. S.F. Chichibu, A. Uedono, A. Tsukazaki, T. Onuma, M. Zamfirescu, A. Ohtomo, A. Kavokin, G. Cantwell, C.W. Litton, T. Sota, M. Kawasaki, Semicond. Sci. Technol. 20, S67 (2005)

    Article  Google Scholar 

  86. D. Takamizu, Y. Nishimoto, S. Akasaka, H. Yuji, K. Tamura, K. Nakahara, T. Onuma, T. Tanabe, H. Takasu, M. Kawasaki, S.F. Chichibu, J. Appl. Phys. 103, 063502 (2008)

    Article  Google Scholar 

  87. Z. Bryan, I. Bryan, B.E. Gaddy, P. Reddy, L. Hussey, M. Bobea, W. Guo, M. Hoffmann, R. Kirste, J. Tweedie, M. Gerhold, D.L. Irving, Z. Sitar, R. Collazo, Appl. Phys. Lett. 105, 222101 (2014)

    Article  Google Scholar 

Download references

Acknowledgments

The authors thank Prof. T. Sota of Waseda Univ., Prof. B. Gil of Univ. Montpellier II, Prof. C. Weisbuch of Univ. California Santa Barbara, Dr. M. Tanaka, and Prof. S. Nakamura of Univ. California Santa Barbara for fruitful discussions. The first author is thankful to Dr. K. Furusawa for help with the experiments. This work was supported in part by NEDO programs under METI, Grant-in-Aids for Scientific Research Nos. 23656206 and 18069001 under MEXT, Japan, and AFOSR/AOARD Grant Nos. FA2386-11-1-4013 and FA2386-11-1-4108 monitored by Dr. G. Jessen. We finally thank Prof. Michael Kneissl for giving us a chance to contribute to this issue.

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Shigefusa F. Chichibu .

Editor information

Editors and Affiliations

Rights and permissions

Reprints and permissions

Copyright information

© 2016 Springer International Publishing Switzerland

About this chapter

Cite this chapter

Chichibu, S.F., Miyake, H., Hiramtsu, K., Uedono, A. (2016). Impacts of Dislocations and Point Defects on the Internal Quantum Efficiency of the Near-Band-Edge Emission in AlGaN-Based DUV Light-Emitting Materials. In: Kneissl, M., Rass, J. (eds) III-Nitride Ultraviolet Emitters. Springer Series in Materials Science, vol 227. Springer, Cham. https://doi.org/10.1007/978-3-319-24100-5_5

Download citation

Publish with us

Policies and ethics