3D white light interference microscope with specialized illumination for better sample imaging and observation

Abstract

3D microscopes based on white light interferometry, in addition to great precision topography measurement of small objects, can now provide great sample color or grayscale imaging capabilities. In addition to topography, image representation of the sample allows for additional ways of feature or defect characterization of the sample. A simple but very powerful additional illumination source on interference microscope allows for excellent imaging especially of low reflective and diffusive surfaces. The additional illumination enables ease of use features like finding focus and location of area of interest on sample, which are so important in commercial products nowadays. The paper industry may be one area that would significantly benefit from this modification of the white light interferometer.