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Design of a Levitating Nano-Positioning Stage with Arc-Edged Permanent Magnet Halbach Arrays

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Intelligent Robotics and Applications (ICIRA 2015)

Part of the book series: Lecture Notes in Computer Science ((LNAI,volume 9245))

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Abstract

In this paper, a levitating nano-positioning stage with arc-edged permanent magnet Halbach arrays is presented. Construction of the nano-positioning stage is given, and the components of the stage are designed. For the key actuation unit, an accurate model of the arc-edged permanent magnet Halbach actuator is developed using the Fourier series expansion, which is validated by the Maxwell software. Based on the model, optimization is made to the arc-edged permanent magnet Halbach array. The optimization results show that the arc-edged permanent magnet Halbach actuator can produce a very small thrust ripple with a large average thrust to guarantee the high precision of the positioning stage.

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Author information

Authors and Affiliations

  1. State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, 200240, China

    Jun-wei Chen, Le-tong Ma, Bo Zhang & Han Ding

Authors
  1. Jun-wei Chen
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  2. Le-tong Ma
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  3. Bo Zhang
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  4. Han Ding
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Corresponding author

Correspondence to Bo Zhang .

Editor information

Editors and Affiliations

  1. University of Portsmouth, Portsmouth, United Kingdom

    Honghai Liu

  2. Tokyo Metropolitan University, Tokyo, Japan

    Naoyuki Kubota

  3. Shanghai Jiao Tong University, Shanghai, China

    Xiangyang Zhu

  4. Karlsruhe Institute of Technology, Karlsruhe, Germany

    Rüdiger Dillmann

  5. University of Portsmouth, Portsmouth, United Kingdom

    Dalin Zhou

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© 2015 Springer International Publishing Switzerland

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Chen, Jw., Ma, Lt., Zhang, B., Ding, H. (2015). Design of a Levitating Nano-Positioning Stage with Arc-Edged Permanent Magnet Halbach Arrays. In: Liu, H., Kubota, N., Zhu, X., Dillmann, R., Zhou, D. (eds) Intelligent Robotics and Applications. ICIRA 2015. Lecture Notes in Computer Science(), vol 9245. Springer, Cham. https://doi.org/10.1007/978-3-319-22876-1_50

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  • DOI: https://doi.org/10.1007/978-3-319-22876-1_50

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  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-319-22875-4

  • Online ISBN: 978-3-319-22876-1

  • eBook Packages: Computer ScienceComputer Science (R0)

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