Abstract
Coherent diffractive imaging (CDI) and related techniques enable a new type of diffraction-limited high resolution microscopy and have been widely used in the extreme ultraviolet (EUV) and X-ray communities. In this experiment, we demonstrate CDI using a compact gas-discharge EUV light source with a wavelength of 17.3 nm (oxygen VI emission). Our image reconstruction method accounts for the partial spatial coherence of the radiation using a deconvolution technique. Our results are promising for future laboratory-scale CDI applications, including mask inspection for EUV lithography and EUV metrology.
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Bußmann, J. et al. (2016). Coherent Diffractive Imaging with a Laboratory-Scale, Gas-Discharge Plasma Extreme Ultraviolet Light Source. In: Rocca, J., Menoni, C., Marconi, M. (eds) X-Ray Lasers 2014. Springer Proceedings in Physics, vol 169. Springer, Cham. https://doi.org/10.1007/978-3-319-19521-6_36
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DOI: https://doi.org/10.1007/978-3-319-19521-6_36
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